Tencor™ P-17 Stylus Profiler
The P-17 offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments. The system supports 2D and 3D measurements of step heights, roughness, bow and stress for scans up to 200mm without stitching. Excellent measurement stability is achieved with the combination of an UltraLite® sensor, constant force control and an ultra-flat scanning stage.
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- Step Height Repeatability of 4Å on a 1μm step
- Low force with constant force control: 0.03 to 50mg
- Long Scan Over Full 200mm Stage without stitching
- Auto Pattern Recognition & Sequencing
- Advanced Apex 2D & 3D Surface Analysis Software
- 3D Stress Capability
- Constant Force Control Sensor
- Video: 5MP high-resolution color camera
- Arc correction: Removes error due to arc motion of the stylus
- Software: Easy-to-use software interface
- Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM
- Wafer handler: Automatically loads 75mm through 200mm opaque
Unrivalled Scan Length & Advanced Sample Stage
The KLA P-17 Stylus Profiler features a motorised stage capable of performing long scans up to 200mm in length, without the need for scan stitching. The full diameter of sample wafers can be measured in a single scan. The P-17 has the longest scan capability on the market today.
The P-17’s sample stage also has a variety of advanced enhancements, such as automatic stage levelling. Before scanning the P-17 will take measurements at the start and end of a scan, and automatically adjust the stage tilt to correct levelling and improve accuracy. The stage can be configured with a variety of sample chucks to support a wide range of applications.
High Measurement Repeatability
Building upon over 40 years of surface metrology development, KLA have designed the P-17 to utilise highly advanced measurement technology. Performing 2D and 3D measurements with the P-17 is fast and accurate. The P-17 features the UltraLite® sensor, with constant force control, high linearity and unmatched repeatability and reproducibility. With a step height repeatability of 4Å on a 1μm step, the P-17’s repeatability is the best in the industry.
The UltraLite® sensor also provides unprecedented detail in measurement, featuring the highest vertical resolution on the market. A wide 1mm Z range allows for greater flexibility in handling samples with large topography variations.
Comprehensive 2D & 3D Measurement Capabilities
The P-17 provides a comprehensive range of 2D and 3D measurement types, for both production and research applications. Step height can be measured with a vertical range from nanometres to 1000µm. With the UltraLite® sensor’s constant force control, measurement stability is ensured, and soft or delicate samples be measured accurately.
Measurement of texture, including roughness and waviness, and form, including bow and shape can also be measured. The P-17 is capable of measuring stress in both 2D and 3D. 2D stress measurement can be measured in a single scan across the diameter of a sample, utilising the P-17’s long 200mm scan length to avoid the need for stitching.
Shown left: 3D Surface Topography
Shown right: 3D Stress Mapping
Advanced Automation & Pattern Recognition
To make surface measurement as efficient as possible in production environments, KLA provide a comprehensive set of automation capabilities for the P-17. Automated defect review, sequencing, pattern recognition, and integration with SECS/GEM and HSMS are all possible on the P-17 platform.
The P-17’s pattern recognition capabilities utilise pre-taught patterns to automatically align a sample. This allows the P-17 to make fully automated measurements with enhanced stability, and reduces inaccuracies introduced by operator error. With the P-17’s defect review features, a wafer map can be loaded and specific areas can be inspected, and highlighted for further investigation. Automation recipes can be seamlessly moved between systems for maximum flexibility.
Tencor™ P-17 & P-17 OF
- Step Height: 2D step height
- Texture: 2D roughness and waviness
- Form: 2D bow and shape
- Stress: 2D thin film stress
- Defect review: 2D and 3D defect surface topography
- Universities, research labs and institutes
- Semiconductor and compound semiconductor
- LED: Light emitting diodes
- MEMS: Micro-electro-mechanical systems
- Data storage
- Medical devices
And more: Contact us with your requirements
If you like to learn more about the KLA P-17 Stylus Profiler contact us today and discuss your measurement applications with our dedicated team of technical specialists. We would be happy to help you find the ideal profilometry solution. Contact us today!