Tencor™ P-17 Stylus Profiler
The P-17 offers step height measurement capability for steps from a few nanometres to one millimetre, for production and R&D environments. The system supports 2D and 3D measurements of step heights, roughness, bow and stress for scans up to 200mm without stitching. Excellent measurement stability is achieved with the combination of an UltraLite® sensor, constant force control and an ultra-flat scanning stage.
Manufacturer
KLA
A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data centre.
Key Features
- Step Height Nanometres to 1000µm
- Low force with constant force control: 0.03 to 50mg
- Scan full diameter of the sample without stitching
- Video: 5MP high-resolution colour camera
- Arc correction: Removes error due to arc motion of the stylus
- Software: Easy-to-use software interface
- Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM
- Advanced Apex 2D & 3D Surface Analysis Software
- 3D Stress Capability
- Constant Force Control Sensor
- Automatically loads 75mm through 200mm opaque
Unrivalled Scan Length & Advanced Sample Stage
The KLA P-17 Stylus Profiler features a motorised stage capable of performing long scans up to 200mm in length, without the need for scan stitching. The full diameter of sample wafers can be measured in a single scan. The P-17 has the longest scan capability on the market today.
The P-17’s sample stage also has a variety of advanced enhancements, such as automatic stage levelling. Before scanning the P-17 will take measurements at the start and end of a scan, and automatically adjust the stage tilt to correct levelling and improve accuracy. The stage can be configured with a variety of sample chucks to support a wide range of applications.
High Measurement Repeatability
Building upon over 40 years of surface metrology development, KLA have designed the P-17 to utilise highly advanced measurement technology. Performing 2D and 3D measurements with the P-17 is fast and accurate. The P-17 features the UltraLite® sensor, with constant force control, high linearity and unmatched repeatability and reproducibility. With a step height repeatability of 4Å on a 1μm step, the P-17’s repeatability is the best in the industry.
The UltraLite® sensor also provides unprecedented detail in measurement, featuring the highest vertical resolution on the market. A wide 1mm Z range allows for greater flexibility in handling samples with large topography variations.
Comprehensive 2D & 3D Measurement Capabilities
The P-17 provides a comprehensive range of 2D and 3D measurement types, for both production and research applications. Step height can be measured with a vertical range from nanometres to 1000µm. With the UltraLite® sensor’s constant force control, measurement stability is ensured, and soft or delicate samples be measured accurately.
Measurement of texture, including roughness and waviness, and form, including bow and shape can also be measured. The P-17 is capable of measuring stress in both 2D and 3D. 2D stress measurement can be measured in a single scan across the diameter of a sample, utilising the P-17’s long 200mm scan length to avoid the need for stitching.
Shown left: 3D Surface Topography
Shown right: 3D Stress Mapping
Advanced Automation & Pattern Recognition
To make surface measurement as efficient as possible in production environments, KLA provide a comprehensive set of automation capabilities for the P-17. Automated defect review, sequencing, pattern recognition, and integration with SECS/GEM and HSMS are all possible on the P-17 platform.
The P-17’s pattern recognition capabilities utilise pre-taught patterns to automatically align a sample. This allows the P-17 to make fully automated measurements with enhanced stability, and reduces inaccuracies introduced by operator error. With the P-17’s defect review features, a wafer map can be loaded and specific areas can be inspected, and highlighted for further investigation. Automation recipes can be seamlessly moved between systems for maximum flexibility.
Industries
- Universities, research labs and institutes
- Semiconductor and compound semiconductor
- LED: Light emitting diodes
- Solar
- MEMS: Micro-electro-mechanical systems
- Data storage
- Automotive
- Medical devices
And more: Contact us with your requirements
Applications
Step Height: 2D and 3D step height
The Tencor P-17 stylus profiler is capable of measuring 2D and 3D step heights from nanometres to 1000µm. This enables quantification of material deposited or removed during etch, sputter, SIMS, deposition, spin coating, CMP and other processes. The Tencor P-17 has constant force control that dynamically adjusts to apply the same force on the sample surface, regardless of step height. This results in good measurement stability and enables accurate measurement of soft materials, such as photoresist.
Texture: 2D and 3D roughness and waviness
The Tencor P-17 measures 2D and 3D texture, quantifying the sample’s roughness and waviness. Software filters separate the measurement into roughness and waviness components and calculate parameters, such as the root mean square (RMS) roughness.
Form: 2D and 3D bow and shape
The Tencor P-17 can measure the 2D shape or bow of a surface. This includes measurement of wafer bow that can result from mismatch between layers during device fabrication, such as deposition of multiple layers for the production of semiconductor or compound semiconductor devices. The Tencor P-17 can also quantify the height and radius of curvature of structures, such as a lens.
Stress: 2D and 3D thin film stress
The Tencor P-17 is capable of measuring stress induced during the manufacture of devices with multiple process layers, such as semiconductor or compound semiconductor devices. The bow of the surface is accurately measured using a stress chuck to support the sample in a neutral position. The change in shape from a process, such as film deposition, is then used to calculate the stress by applying Stoney’s equation. 2D stress is measured with a single scan across the sample diameter for samples up to 200mm without the need to stitch. 3D stress is measured using a combination of 2D scans, with the theta stage rotating between scans to measure the full sample surface.
Defect review: 2D and 3D defect surface topography
Defect Review is used to measure the topography of defects, such as the depth of a scratch. Defect inspection tools identify defects and write the location coordinates to a KLARF file. The Defect Review feature reads the KLARF file, aligns the sample, and allows the user to select defects for 2D or 3D measurement.
Downloads
Tencor™ P-17 Stylus Profiler Brochure 2023
Benchtop Stylus Profilers Brochure
Options
Tencor P-17 OF
The Tencor P-17 OF (Open Frame) has the same capability as the Tencor P-17, but with a bigger frame to allow loading of larger samples. The system can be configured for 300mm wafers, or with a 240 x 240mm chuck.
Stylus Options
The Tencor P-17 has a variety of styli available to support the measurement of step heights, high aspect ratio steps, roughness, sample bow, and stress. The tip radius ranges from 40nm to 50µm and determines the lateral resolution of the measurement. The included angle ranges from 20 to 100 degrees, specifies the maximum aspect ratio of the measured feature. All styli are manufactured from diamond to reduce wear and increase stylus lifetime.
Sample Chucks
The Tencor P-17 has a range of chucks available to support application requirements. The standard is a universal vacuum chuck with precision locating pins for samples from 50 to 200mm. The universal chuck supports bow and stress measurements using 3-point locators to support the sample in a neutral position for accurate bow measurements. Additional options for solar samples, HDD disks, and precision sample location plates are available.
Isolation Tables
The Tencor P-17 has both tabletop and free-standing isolation table options. The Granite Isolator™ Series offers tabletop systems that combine granite with high grade silicone gel to provide passive isolation. The Onyz Series tabletop isolation systems use pneumatic air isolators to provide passive isolation. The TMC 63-500 Series isolation table is a free-standing steel frame table that uses pneumatic air isolators to provide passive isolation.
Step Height Standards
The Tencor P-17 uses thin and thick film NIST-traceable step height standards offered by VLSI Standards. The standards feature an oxide step on a silicon die mounted on a quartz block, or an etched quartz step with a chrome coating. A step height range of 8nm to 250µm is available.
Apex Analysis Software
Apex analysis software enhances the standard data analysis capability of the Tencor P-17 with an extended suite of leveling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods, plus local standards, such as ASME. Apex can also serve as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eight languages
Offline Analysis Software
The Tencor P-17 offline software has the same data analysis and recipe creation capability that exists on the tool. This enables the user to create recipes and analyze data without using valuable tool time.
Pattern Recognition
Pattern recognition uses pre-taught patterns to automatically align the sample. This enables fully automated measurements for enhanced measurement stability by reducing the impact of operator error. Pattern recognition combined with advanced calibrations reduces stage positioning error and enables seamless transfer of recipes between systems.
SECS/GEM and HSMS
SECS/GEM and HSMS communications support factory automation systems and enable remote control of the Tencor P-17. Measurement results are automatically reported to host SPC systems, plus alarms and key calibration/configuration data. The Tencor P-17 is compliant with SEMI standards E4, E5, E30, and E37.
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