Standard PLD Systems

The PREVAC Standard PLD systems comprise a deposition process chamber together with a load-lock chamber for easy and fast substrate loading. 

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • A versatile solution for most research needs in the field of PLD growth processes
  • Suited for the growth of ferromagnetic films, ceramic oxides, high temperature superconductive material, metallic multilayers and others
  • Vertical PLD process geometry
  • 1-4 axes, motorised or manual, substrate manipulator with receiving station able to achieve high temperatures up to 1400°C (with stable, long-life heater element made of Solid SiC)
  • Different substrate holders size: from 10×10 mm up to 2 inches
  • Six-position target manipulator with an in-situ target exchange system
  • Target holder sizes: 1 or 2 inches
  • Fully automated or manual target and substrate transferring system
  • Ion source with a power supply for cleaning, etching or activating the surface of the substrate
  • Base pressure from 5×10-8 mbar to 5×10-11 mbar, depends on the pumping system
  • Process chamber Ø 490 mm, with additional ports
  • Pumping system (based on the backing pump, TMP, ion pump & TSP)
  • Vacuum gauges with equipment
  • Quartz balance for deposition rate measurement and thickness monitor, with Z manipulator to measure rate in focus point
  • Load Lock chamber for the sample holders and targets
  • Reliable and fast linear transferring system from load-lock to the process chamber
  • Viewports – observation windows with shutter
  • Cooling system with integrated blow-off line before bakeout
  • Bakeout system
  • The adjustable rigid main frame of the system
  • 19“ cabinets with electronic units

Description

The Pulsed Laser Deposition (PLD) standalone system is suited for the growth of ferromagnetic films, ceramic oxides, high temperature superconductive material, metallic multilayers etc.

The process chamber contains 6 targets with some materials for the deposition on the substrate. The stage is intended for up to 2-inch diameter samples, with a cooling/heating & rotation option. The automated or manual PLD system enables the effortless transfer of targets and substrates from the load lock to the PLD manipulator stations.

The process chamber is equipped with connecting flanges in UHV standard for connecting current and future equipment, including:

  • Laser
  • Substrate manipulator with a temperature range
  • Target manipulator
  • Ion source with a power supply for cleaning, etching or activating the surface of the substrate
  • Pumping system (based on the backup pump, TMP, ion pump & TSP pump)
  • Vacuum gauges with equipment
  • Entry port for linear transferring systems e.g. from load lock, radial distribution chamber, transferring tunnel, or transport box
  • Quartz balance with Z manipulator
  • RHEED/TorrRHEED with equipment
  • Motorised or manual shutter (following the substrate) for vicinal layers or masks
  • Additional gas dosing system eg. for the reactive deposition process
  • Viewports – observation windows with shutters
  • Residual gas analyser
  • Beam flux monitor
  • Heated viewports for diagnostic devices

The final design and functionality depend on the system configuration.

If needed, the modular design of the system allows combining and integration with any other research platform via radial distribution transferring solution or transferring tunnel.

A pumping system combined with the standard volume of the process chamber allows for reaching the base pressure in the range of 1×10-8 – 5×10-11 mbar, depending on the pump’s configuration. A pumping system is a combination of different types of pumps, e.g. forevacuum pumps, ion pumps, cryo-pumps, turbo pumps, or titanium sublimation pumps, individually selected to achieve the best pumping performance according to specific application demands.

Synthesium process control software allows integration and perfect cooperation of sources of various types and manufacturers and enables easy recipe writing, automated growth control and extensive data recording. Allows integrating new additional components based on Tango open source device.

The system is equipped with advanced, easy-to-use power supplies and electronic devices controlling and supporting the sources and the whole included research equipment.

Options

  • RHEED/TorrRHEED with equipment
  • Motorised or manual shutter (following the substrate) for vicinal layers or masks
  • Laser power sensor
  • Additional storage chamber
  • Internal shield
  • Protection shield against cross-contamination
  • Vacuum suitcase (transport box) with a port in the load-lock chamber
  • Additional gas dosing eg. for the reactive deposition process
  • Residual gas analyser
  • Beam flux monitor
  • Heated viewports for the diagnostic devices
  • Pyrometer
  • Ellipsometer
  • Full control deposition process & equipment by PLC unit and Synthesium software 

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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