Profilm3D® Optical Profiler | White Light Interferometry
The Profilm3D® optical profilometer is an affordable, non-contact, white light interferometry based (WLI) 3D surface topography measurement system. The latest generation of the white light interferometer includes new imaging modes that extend performance and value. The Profilm3D series measures nanometre - to millimetre - scale surface with a simple, flexible recipe setup, accommodating single scans or automated measurements on multiple sites to support both R&D and production environments.
Key Features
- Vertical scanning and phase shifting interferometry for measurement of surface features from nanometres to millimetres
- TotalFocus 3D imaging with optimised focus for each pixel through the full measured range
- True-Colour imaging produces the actual sample colours for enhanced visualisation, especially for subtle or buried features
- Enhanced Roughness Mode (ERM) increases fringe contrast for improved fidelity on sloped surfaces such as lenses and enables signal improvement for rough surfaces
- Automated focus with industry-leading long piezo travel range for scanning multiple surfaces separated by large height distances
- Automated X-Y stage with a long travel range, great for mapping and stitching scans
Manufacturer
Filmetrics
Filmetrics was founded in 1995 with the mission of making thin-film measurements simple and affordable. Our approach, borne of the microelectronics and software revolution, results in film-thickness measurements that take less than a second - by operators who can be trained in minutes.
Product Description
The Filmetrics Profilm3D white light interferometer generate high-resolution measurements of the surface topography with sub-nanometre-level resolution. The tools support both vertical scanning and phase shifting interferometry.
Using TotalFocus® technology, Profilm3D provides stunning 3D natural colour images with every pixel in focus. The latest generation of the Profilm3D white light interferometer introduces enhanced roughness imaging for measuring rougher surfaces, higher slopes and lower reflectivity surfaces.
In the Profilm3D measurement technique, the vertical resolution of the measurement is independent of the numerical aperture of the objective, enabling high-resolution measurements with a large field of view. The measured area can be further increased by stitching multiple fields of view into a single measurement. The Profilm3D optical profilometer also features a simple, innovative user interface and automated features to support a broad range of working environments, from R&D to production.
Optional Features
Phase Shift Imaging (PSI) - Phase Shift Imaging is used when accurate measurement of nanometre-scale surface features is required.
Enhanced Roughness Mode - For rough surfaces, WLI mode and PSI mode may be insufficient. Enhanced Roughness Mode increases fringe contrast, providing significantly improved fidelity on sloped surfaces and rough surfaces, and especially when the surface includes both rough topography and low reflectivity.
TotalFocus Infinite Depth-of-Field Imaging - With a traditional microscope, it is impossible to simultaneously focus each pixel across the entire field of view without changing the setup. Profilm3D's TotalFocus mode utilises the 3D measurement data to produce images where every pixel is in focus.
True-Colour Imaging - True-Colour imaging is typically used to enhance image presentation but is highly important in distinguishing underlying or buried details that may influence colour variation from otherwise similar surface topography.
Stitching - Stitching combines multiple individual images to create a larger measured field of view. This feature is most commonly used for applications where a large area measurement is required, such as MEMS, biomedical devices, etc.
Industries
- Universities, research labs and institutes
- Silicon and compound semiconductor
- Precision optics and mechanics
- Medical devices
- LED: Light emitting diodes
- Power devices
- MEMS: Micro-electromechanical systems
- Data storage
- Automotive
Applications
Step height
The Filmetrics Profilm3D series white light interferometry-based profilometers support non-contact measurement of 3D step heights from nanometre to millimetre scales. Vertical scanning interferometry can measure a large step height with nanometre-level resolution. Sub-nanometre-level features can be measured rapidly using phase-shifting interferometry. Z-stitching interferometry enables rapid measurement of very large steps with multiple high-resolution scans that are combined into a single measurement. This variety of techniques enables users to quantify the amount of material removed or deposited by semiconductor processes such as etch, sputter, deposition, spin coating and more.
Texture: Roughness and Waviness
The Filmetrics Profilm3D series optical profilers provide non-contact measurements of 3D texture, quantifying the sample’s roughness and waviness. Phase-shifting mode is ideal for very smooth surfaces. Software filters separate the measurement into roughness and waviness components and calculate parameters such as root mean square (RMS) roughness.
Form: Bow and Shape
The Filmetrics Profilm3D series non-contact, white light interferometry-based profilers can measure the 3D shape or bow of a surface. This capability can be used to measure the radius of curvature of a lens or the shape of a medical implant, such as a hip joint or stent.
TotalFocus
The Filmetrics Profilm3D series optical profilometers with TotalFocus capture True Colour 3D images with every pixel in focus. This feature can be used to distinguish boundaries between materials with different optical properties.
Industry
3D and Flash Printing
The Profilm3D easily measures this silkscreen print on machined stainless steel. Measure thickness and uniformity of the printing layer and characterise delamination, coverage uniformity and surface roughness. The Profilm3D design offers easy sample setup and software interface to streamline manufacturing and QC process monitoring.
Metal Finishing / Micromachining / Tooling
The Profilm3D can be used in metal finishing and tooling, such as for the critical calibration of a dicing saw where cut depths into a piezoelectric material are quantified. The system also simultaneously measures surface roughness and critical dimensions of machined components.
Semiconductors
Backend packaging bump coplanarity is critical to ensure optimised bonding, and the Profilm3D quickly generates measurements of coplanarity, pitch uniformity, size, and more. Other applications include mask manufacturing, laser marking, photoresist patterning, and other R&D and process qualification.
Optics
This scan shows a miniaturised Fresnel lens that was created by electron beam lithography. For steep surfaces such as lenses, the Profilm3D in Enhanced Roughness mode can now measure up to 60°of slope.
Biology
The Profilm3D is well suited to measurement of biological samples, such as this Tetraphenylprophyrin (TPP) thin film on glass. The TPP was imaged with the 50X Mirau objective at 2x zoom, and the film displays growth of crystalline structures. This image was generated with TotalFocus® colour technology, showing the actual colours of the sample.
Downloads
Profilm3D Optical Profiler Brochure
Options
Profilm3D Series
The Filmetrics Profilm3D white light interferometer features motorized X-Y and Z stages with 100mm travel and a manual tip/tilt stage. The system supports phase shifting and vertical scanning interferometry for high-resolution 3D surface topography measurements. The Filmetrics Profilm3D-200 white light interferometer includes the same features as the Profilm3D but adds a larger motorized X-Y stage supporting 200mm by 200mm of travel.
Objective Lenses
The four-position turret holds objective lenses with magnifications ranging from 5x to 100x, to support nano-, micro- and macro-topography applications. The 5x objective is a Michaelson interferometry objective. The 10x, 20x, 50x, and 100x objectives are Mirau interferometry objectives.
Stages
Motorised stages for the X-Y and Z axes are standard on the Profilm3D system. The X-Y stage has a travel of 100mm by 100mm for Profilm3D, and 200mm by 200mm for Profilm3D-200. The Z stage has a range of 100mm. The travel along all axes of motion is programmable. A manual tip and tilt stage are standard with ±5° of motion. A manual R-theta wafer stage is also available on Profilm3D series optical profilometers, supporting 50mm- to 200mm-diameter wafers. In addition, the Profilm3D-200 supports an adapter for holding up to 200mm wafers.
Isolation Tables
The Filmetrics Profilm3D series offers Accurion Nano30 Series active tabletop vibration isolation systems, which use electro-dynamic drive active vibration isolation in all six degrees of freedom.
Step Height Standards
The Filmetrics Profilm3D series includes a custom-designed Cr on Si 10µm step height standard, consisting of an etched step with a chrome coating. A multi-step height standard is also available as an option, featuring 0.1µm, 2µm and 4µm steps.
Related Products
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Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
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- No surprise repair expense and much more!
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Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.