Plate Style Substrate Holders
Sample holders (substrate holders, plates, wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others.
Manufacturer
Prevac
Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.
Description
Sample holders (wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others. Available in 2“, 3“, 4“ diameter size as standard (6“, 8“ and larger on request). The holder can be configured with adaptations for single and multiples of other types of sample holders, for example flag style plates. Standard material is molybdenum or titanium, other materials are available on request.
Technical data
| Type | Size [inch]e | Heating methods |
Heating temp. |
Thermocouple | Table material |
| Wafer plate | 1, 2, 3, 4, 6, 8 | resistive EB |
1000 ÷ 1200 °C 1400 °C |
Mo, Ti, Ta | for direct wafer mounting or for sample mounting |
| 3-pins plate | 1, 2, 3, 4, 6, 8 | resistive EB |
1000 ÷ 1200 °C 1400 °C |
Mo, Ti, Ta | for direct wafer mounting or for sample mounting |
| 4-holes plate standard |
1, 2, 3, 4, 6, 8 | resistive EB |
1000 ÷ 1200 °C 1400 °C |
Mo, Ti, Ta | for direct wafer mounting or for sample mounting |
| 4-holes plate with adapter for flag sample holders |
1, 2, 3, 4, 6, 8 | resistive EB |
1000 ÷ 1200 °C 1400 °C |
Mo, Ti, Ta | adapter for 1, 2 or 3 flag sample holders |
| 4-holes plate with pedestal |
1, 2, 3, 4, 6, 8 | resistive EB |
1000 ÷ 1200 °C 1400 °C |
Mo, Ti, Ta | |
| 4-holes plate with masks |
1, 2, 3, 4, 6, 8 | resistive EB |
1000 ÷ 1200 °C 1400 °C |
Mo, Ti, Ta | different masks geometry possible |
| 4-holes plate special design |
1, 2, 3, 4, 6, 8 | resistive EB |
1000 ÷ 1200 °C 1400 °C |
Mo, Ti, Ta | e.g. for small or irregular samples |
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