Plate Style Substrate Holders

Sample holders (substrate holders, plates, wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Description

Sample holders (wafers, molyblocs) dedicated for different deposition techniques, such as MBE, magnetron sputtering, thermal evaporation and others. Available in 2“, 3“, 4“ diameter size as standard (6“, 8“ and larger on request). The holder can be configured with adaptations for single and multiples of other types of sample holders, for example flag style plates. Standard material is molybdenum or titanium, other materials are available on request.

Technical data

Type Size [inch]e Heating
methods
Heating
temp.
Thermocouple Table
material
Wafer plate 1, 2, 3, 4, 6, 8 resistive
EB
1000 ÷ 1200 °C
1400 °C
Mo, Ti, Ta for direct wafer mounting or for sample
mounting
3-pins plate 1, 2, 3, 4, 6, 8 resistive
EB
1000 ÷ 1200 °C
1400 °C
Mo, Ti, Ta for direct wafer mounting or for sample
mounting
4-holes plate
standard
1, 2, 3, 4, 6, 8 resistive
EB
1000 ÷ 1200 °C
1400 °C
Mo, Ti, Ta for direct wafer mounting or for sample
mounting
4-holes plate
with adapter for flag sample holders
1, 2, 3, 4, 6, 8 resistive
EB
1000 ÷ 1200 °C
1400 °C
Mo, Ti, Ta adapter for 1, 2 or 3 flag sample holders
4-holes plate
with pedestal
1, 2, 3, 4, 6, 8 resistive
EB
1000 ÷ 1200 °C
1400 °C
Mo, Ti, Ta
4-holes plate
with masks
1, 2, 3, 4, 6, 8 resistive
EB
1000 ÷ 1200 °C
1400 °C
Mo, Ti, Ta different masks geometry possible
4-holes plate
special design
1, 2, 3, 4, 6, 8 resistive
EB
1000 ÷ 1200 °C
1400 °C
Mo, Ti, Ta e.g. for small or irregular samples

Downloads

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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