NanoFlip® Nano Indenter

High accuracy, high speed nano indentation in-situ in vacuum environments. Perform nanomechanical testing inside a SEM chamber, and synchronise SEM imaging with mechanical property data. Custom experiments can be easily configured. The suite of options available, such as the InForce50 electromagnetic actuator, combine to deliver quantitative results that lead to valuable solutions in material research.

Manufacturer

KLA

A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.

 

Key Features

  • InForce 50 actuator for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
  • InQuest high-speed controller electronics with 100kHz data acquisition rate and 20µs time constant
  • XYZ motion system for sample targeting
  • SEM video capture for synchronized SEM images with test data
  • Unique software-integrated tip-calibration system for fast, accurate tip calibration
  • InView control and data review software with Windows ®10 compatibility and method developer for user-designed experiments

Flexible In-Situ Nano Indentation

The KLA NanoFlip is a flexible and expandable platform for performing nanomechanical testing in-situ with a variety of imaging instruments. The NanoFlip’s sample stage features a “flip” mechanism, which rotates the sample, allowing for direct imaging of the surface, or indentation of the surface. When indenting, the indenter and surface remain visible, allowing for indenter and sample interactions to be viewed in real time.

The NanoFlip can be used in-situ inside a wide range of imaging instruments. Optical profilers and optical microscopes, SEM and FIB systems, AFM systems, Raman Spectroscopy, and other instruments are all supported. The NanoFlip can also be used standalone inside a glove box or vacuum chamber for sensitive samples requiring a controlled environment.

Simplified Operation with Synchronised Imaging

KLA are making nanomechanical testing simple and easy with the InView software package. InView provides a modern and flexible interface for interacting with nano indentation systems. A guided setup is provided, which allows even novice users to configure mechanical tests in under a minute. A wide range of mechanical test methods are included out of the box. Custom test protocols can also be configured.

InView allows imaging to be synchronised with mechanical test data in real time. Live imaging from a SEM or other instrument is displayed side by side with testing data as it is recorded. This provide greater level of insight into the interactions of the indentation tip and sample material.

A Complete Range of Mechanical Tests

To suit the widest range of applications, the NanoFlip platform is capable of a multitude of mechanical test types. The NanoFlip can perform hardness and modulus testing (Oliver-Pharr) on many materials, including very soft samples. ISO 14577 hardness testing is included as standard. For material characterisation, scratch and wear testing is also possible, and supports many materials, including thin films, brittle ceramics, and polymers.

A variety of advanced testing modes are also available. These include Continuous Stiffness Measurement (CSM), AccuFilm™ thin film measurement with substate-independence, and ProbeDMA™ for testing viscoelastic properties of polymers.

Designed for Accuracy & Efficiency

The NanoFlip is a quick and accurate solution for in-situ nano indentation. The InForce actuators developed by KLA use electromagnetic force actuation and capacitance displacement technology. By decoupling the force actuation and displacement measurement, it is possible to independently optimise them and maximise performance. KLA’s InForce actuators have a high stiffness and maximised vertical stability, and offer the highest calibration stability available.

The NanoFlip’s stage has a high frame stiffness, concentrating deformation in the sample, and thus improving accuracy and resolution. High precision linear optical encoders on the sample stage allow for precise sample targeting.

Map Nanomechanical Properties with NanoBlitz 3D & NanoBlitz 4D

NanoBlitz 3D creates 3D nanomechanical property maps. Utilising the NanoFlip’s high-precision XY stage, NanoBlitz 3D generates an array of up to 100,000 indents on an area of a sample. For each indent Young’s modulus, hardness, and stiffness values are recorded. A 3D mechanical property map can then be created, providing a visualisation of surface mechanical properties. NanoBlitz 3D is fast, performing stage movement and indentation in less than a second for each indent.

By combining the 3D concept with the NanoFlip’s Continuous Stiffness Measurement (CSM) capability, NanoBlitz 4D provides mechanical property tomography. An array of up to 10,000 indents are performed, at 5 to 10 seconds per indent, recording Young’s modulus, hardness, and stiffness values for each as function of depth. Property maps can then be visualised at different depths.

Shown Left: NanoBlitz 3D image showing stiffness mapping
Shown Right: NanoBlitz 4D mapping at two different depths

Product range

NanoFlip® Nano Indenter
InSEM® HT Nano Indenter

Applications

  • Hardness and modulus measurements (Oliver-Pharr)
  • Continuous stiffness measurement
  • High speed material property maps
  • ISO 14577 hardness testing
  • Nano Dynamic Mechanical Analysis (DMA)
  • Quantitative scratch and wear testing

Industries

  • Universities, research labs and institutes
  • Pillar and microsphere manufacturing
  • MEMS: Micro-electro-mechanical systems
  • Materials manufacturing (structure compression/tensile/fracture testing)
  • Battery and component manufacturing

Options

Continuous Stiffness Measurement (CSM)

The CSM technique involves oscillating the probe during indentation to measure properties as a function of depth, force, time, or frequency. The option comes with a constant strain rate experiment that measures hardness and modulus as a function of depth or load, which is the most common test method used across academia and industry. CSM is also used for other advanced options, including the ProbeDMA™ method for storage and loss modulus measurements and AccuFilm™ substrate-independent measurements. The CSM is integrated into the InQuest controller and InView software to deliver unparalleled ease of use and data quality.

Gemini 2D Multi-Axis Transducer

The Gemini 2D multi-axis technology brings the same performance of standard indentation to a second lateral axis, with the CSM operating along both axes simultaneously. The additional information provided by this patented technique helps give new insight to material properties and failure mechanisms. The two-dimensional force transducer is a unique solution in lateral force and tribology measurements, and enables measurements of Poisson’s ratio, coefficient of friction, scratch, wear, shear and topology.

NanoBlitz 3D

NanoBlitz 4D utilizes the InForce 50 Actuator to generate 4D maps of measurements for both low-E/H and high-E (>3GPa) materials with a Berkovich tip. NanoBlitz performs indents at 5-10s per indent, up to 10,000 indents (30×30 array), and provides Young’s modulus, hardness, stiffness as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method, and also provides visualization software and data handling capabilities.

AccuFilm™ Thin Film Method Pack

The AccuFilm™ Thin Film Method Pack is an InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm™ corrects for substrate influence on film measurements for hard films on soft substrates as well as soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

The Polymer Pack enables measurement of the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional DMA test instruments.

Scratch and Wear Testing Method Pack

The scratch and wear testing method pack is provided with the InForce 50 actuator. Scratch testing involves the application of either a constant or ramped load to an indenter while moving across the sample surface at a specified velocity. Scratch testing allows characterization of numerous material systems, such as thin films, brittle ceramics, and polymers.

DataBurst

DataBurst enables systems equipped with InView software and the InQuest controller to record displacement data at rates >1kHz for measuring high strain step loads, pop-in and other high speed events. NanoFlip systems outfitted with the User Method Development option can also modify methods to work with DataBurst.

User Method Development for InView Control Software

InView offers an extremely powerful and intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test with the NanoFlip. KLA exclusively offers this capability.

True Test I-V Electrical Measurements

The I-V option for the NanoFlip nanoindenter is controlled through InView software and utilizes a precision ammeter and voltage source, a through-tip electrical path using the InForce 50/1000 actuator, and a conductive tip. This design allows the user to apply specific voltages to a sample and measure the current at the tip while simultaneously operating the InForce actuator.

Indenter Tips and Calibration Samples

A wide variety of sharp indenters are available, such as Berkovich, cube corner and Vickers, as well as flat punches, sphere punches, and other geometries. Standard reference materials and calibration standards are also available for the entire product line.

NanoBlitz 4D

NanoBlitz 4D utilizes the InForce 50 Actuator to generate 4D maps of measurements for both low-E/H and high-E (>3GPa) materials with a Berkovich tip. NanoBlitz performs indents at 5-10s per indent, up to 10,000 indents (30×30 array), and provides Young’s modulus, hardness, stiffness as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method, and also provides visualization software and data handling capabilities.

Downloads

NanoFlip® Nano Indenter Brochure

NanoFlip® Nano Indenter Brochure

Effect of Annealing on 50nm Gold Films

Effect of Annealing on 50nm Gold Films

Strain Rate Sensitivity of Thin Metal Films by Instrumented Indentation

Strain Rate Sensitivity of Thin Metal Films by Instrumented Indentation

Do you want to find out more about KLA’s NanoFlip in-situ nano indenter? Contact the CN Tech team to day to find out more. Our technical specialists would be happy to discuss your in-situ nanomechanical testing needs, and help you find the perfect solution. Contact us today!