Nano Indenter® G200x

A production-proven platform, the Nano Indenter G200X is capable of measuring Young’s modulus and hardness, including deformation, from nanometres to millimetres. Complex modulus and creep response are also supported. Highly flexible and upgradeable, and designed for high throughput. The G200X system handles a wide variety of samples from hard coatings to soft polymers and offers the most comprehensive test suite available in the KLA Instruments nanoindenter product line.

Manufacturer

KLA

A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.

 

Key Features

  • Electromagnetic actuator to achieve the high dynamic range in force and displacement
  • High resolution optical microscope and precision XYZ motion system for viewing, positioning and targeting samples.
  • Easy mount sample tray with multiple sample positions for high throughput testing.
  • Intuitive interface for quick test setup; testing parameters can be changed with just a few mouse clicks
  • Real-time experimental control, easy test protocol development and test setup.
  • Full suite of InView software including ReviewData and InFocus for analyzing data and creating reports.
  • Award-winning, high-speed testing for material property maps and increased statistical confidence.
  • InQuest high-speed controller electronics with 100kHz data acquisition rate and 20µs time constant.

Precise Mechanical Testing for Micro-To-Nano Range of Loads & Displacements

The Nano Indenter® G200X system is an accurate, flexible, user-friendly instrument for nanoscale mechanical testing. The Nano Indenter G200X measures Young’s modulus and hardness, including measurement of deformation over six orders of magnitude (from nanometers to millimeters). The system can also measure the complex modulus of polymers, gels and biological tissue, as well as the creep response (strain rate sensitivity) of thin metallic films. Modular system options can accommodate a variety of applications: frequency-specific testing, quantitative scratch and wear testing, integrated probe-based imaging, high-temperature testing, expanded load capacity up to 10N, and custom test protocols.

KLA Core Technology

The Nano Indenter G200X is powered by electromagnetic transducers to deliver precise measurements and avoid artifacts in the x and y axes. The system is designed to provide accurate sample positioning, easy sample viewing, and simple sample height adjustment. In its standard configuration, the G200X utilizes the XP indentation head, and a modular controller that allows users to add capabilities as needed. In addition, the G200X gives users the ability to program each transducer for specific measurements, and switch between them at any time. The system has a small footprint to conserve lab space and conforms to ISO 14577 to ensure data integrity.

The G200X system provides a wide array of imaging capabilities, including a survey scanning mode that is ideal for scratch and wear testing on large samples, or for working with large, irregularly-shaped, and/or heterogeneous samples.

Continuous Stiffness Measurement (CSM)

The CSM option measures stiffness during the indentation cycle to measure material properties as a function of depth, force, time or frequency.

AccuFilmTM allows for characterization of ultra-thin films by correcting for substrate influence on the measurement

ProbeDMATM enables dynamic mechanical analyses (DMA) on soft polymers and other materials with sample geometries and/or material volumes that are not suitable for standard DMA tests

Biomaterials Method Pack provides the ability to measure the complex modulus of biomaterials with shear moduli on the order of 1kPa . Utilizing the CSM module, the pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties

NanoBlitz 3D Rapid Mechanical Property Mapping

Quickly and quantitatively maps surface mechanical properties
Gives statistically significant results due to the increased number of observations
Measures rough surfaces and/or heterogeneous materials

The NanoBlitz 3D option measures elastic modulus and hardness as a function of (x, y) position, generating thousands of data points in a short period of time. The quantitative data is combined with powerful visualization techniques to assess differences in microstructure and gradients in mechanical properties.

NanoBlitz 4D Mechanical Property Tomography

Extends the Continuous Stiffness Measurement (CSM) technique to include mechanical property tomography

To assess elastic modulus and hardness as a function of (x, y) position and depth, NanoBlitz 4D option rapidly creates a user-defined array of constant strain rate indents using the CSM module. Because each indent is performed in about 7 seconds, the system can generate a statistically significant amount of data to accurately characterize complex microstructures and components.

Scanning Probe Microscopy Options

NanoVision Stage

Featuring a closed-loop nanopositioning stage for high-resolution 3D imaging and precise targeting, NanoVision allows users to target indentation test sites with nanometer-scale precision and characterize individual phases of complex materials. NanoVision users can also examine residual impressions to quantify material response phenomena such as pile-up, deformed volume and fracture toughness.

Survey Scanning

The Survey Scanning option utilizes the accurate, repeatable (x, y) motion of the Nano Indenter G200X system to provide a maximum scan size of 500μm by 500μm. The NanoVision stage and Survey Scanning options can be used together for precise location targeting for nanoindentation tests, particularly valuable for determination of sample fracture toughness.

Lateral Force Measurement (LFM) Option

The Lateral Force Measurement (LFM) option provides three-dimensional quantitative analysis for scratch testing, wear testing and MEMS probing by enabling shear force measurement in the x and y directions. Tribological studies benefit greatly from the LFM option, for determination of the critical load and coefficient of friction over the scratch length. Scratch testing applies a constant or ramped load to an indenter while moving across the sample surface, and can be used for thin films, brittle ceramics and polymers.

Product range

uNano™
iNano®
iMicro
Nano Indenter® G200
Nano Indenter® G200X

Applications

  • High speed hardness and modulus measurements (Oliver-Pharr)
  • High speed material property maps
  • ISO 14577 hardness testing
  • Interfacial adhesion measurement
  • Fracture toughness measurement
  • Viscoelastic property measurements including tan delta, and storage and loss modulus
  • Scanning probe microscopy (3D imaging)
  • Quantitative scratch and wear testing
  • High temperature nanoindentation testing

Industries

  • Universities, research labs and institutes
  • Semiconductor industry
  • PVD/CVD hard coatings (DLC, TiN)
  • MEMS: Micro-electro-mechanical systems/nanoscale universal testing
  • Ceramics and glass
  • Metals and alloys
  • Pharmaceuticals
  • Coatings and paints
  • Composites
  • Batteries and energy storage
  • Automotive and aerospace

Options

InForce 1000 Actuator

The InForce 1000 actuator performs nanomechanical tests with forces up to 1000mN. The patented electromagnetic force application ensures robust measurements and long-term force and displacement stability. Industry-leading mechanical design ensures one-degree of freedom harmonic motion so that force and displacement are controlled along a single axis. The tips are interchangeable with the entire line of InForce actuators. The InForce 1000 actuator is compatible with the CSM, NanoBlitz, sample heating, scratch, wear and ISO 14577 testing options.

InForce 50 Actuator

The InForce 50 actuator performs nanomechanical tests with forces up to 50mN. The patented electromagnetic force application ensures robust measurements and long-term force and displacement stability. Industry-leading mechanical design ensures one-degree of freedom harmonic motion so that force and displacement are controlled along a single axis. The tips are interchangeable with the entire line of InForce actuators. The InForce 50 actuator is compatible with the CSM, NanoBlitz, ProbeDMA ™, biomaterials, sample heating, scratch, wear and ISO 14577 testing options.

Continuous Stiffness Measurement (CSM)

Continuous stiffness measurement is used to quantify dynamic material properties, such as strain rate and frequency-induced effects. The CSM technique involves oscillating the probe during indentation to measure properties as a function of depth, force, time, or frequency. The option comes with a constant strain rate experiment that measures hardness and modulus as a function of depth or load, which is the most common test method used across academia and industry. CSM is also used for other advanced measurement options, including the ProbeDMA™ method for storage and loss modulus measurements and AccuFilm™ substrate-independent measurements. The CSM is integrated into the InQuest controller and InView software to deliver ease of use and data quality.

NanoBlitz 3D

NanoBlitz 3D utilizes the InForce 50 or InForce 1000 actuator and a Berkovich tip to generate 3D maps of nanomechanical properties for high-E (> 3GPa) materials. NanoBlitz performs up to 100,000 indents (300×300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array. The large number of tests enables increased statistical accuracy. Histogram charts show multiple phases or materials. The NanoBlitz 3D package includes visualization and data handling capabilities.

300°C Sample Heating

The 300°C sample heating option allows the sample to be placed into a chamber for uniform heating while simultaneously undergoing tests with either the InForce 1000 or InForce 50 actuators. The option includes high-precision temperature control, inert gas backfill to reduce oxidation, and cooling to remove waste heat. ProbeDMA, AccuFilm, NanoBlitz and CSM are all compatible with the sample heating option.

NanoBlitz 4D

NanoBlitz 4D utilizes the InForce 50 or InForce 1000 actuator and a Berkovich tip to generate 4D maps of nanomechanical properties for both low-E/H and high-E (>3GPa) materials. NanoBlitz performs up to 10,000 indents (30×30 array) at 5-10s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method. The package includes visualization and data handling capabilities.

AccuFilm™ Thin Film Method Pack

The AccuFilm Thin Film Method Pack is an InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates, as well as for soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

The Polymer Pack provides the ability to measure the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional dynamic mechanical analysis (DMA) test instruments.

Biomaterials Method Pack

The Biomaterials Method Pack provides the ability to measure the complex modulus of biomaterials with shear moduli on the order of 1kPa and utilizes Continuous Stiffness Measurement (CSM). The pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing small scale biomaterials that are not well-served by traditional rheometer instruments.

NanoVision

The NanoVision option features a closed loop nanopositioning stage for high-resolution 3D imaging and precise targeting. NanoVision allows users to target indentation test sites with nanometer-scale precision and characterize individual phases of complex materials. NanoVision users can also examine residual impressions to quantify material response phenomena such as pile-up, deformed volume and fracture toughness.

Survey Scanning

The Survey Scanning option utilizes the accurate, repeatable X/Y motion of the Nano Indenter G200X system to provide a maximum scan size of 500μm by 500μm. 10nm linear encoders provide improved imaging over the G200. The NanoVision stage and Survey Scanning options can be used together for precise location targeting for nanoindentation tests, particularly valuable for determination of sample fracture toughness.

InView Software Versions

All Nano Indenter G200X systems are powered by the standard InView software. The NanoSuite Professional version gives users access to pre-written test methods, including methods that comply with ISO 14577 standards. The InView Method Development option enables researchers to write their own InView test methods using a simple protocol. The InView software suite includes InView ReviewData and InFocus applications that make reviewing data and creating presentations easy. InView features a Simulation Mode so that users can write test methods, process and analyse data offline.

Downloads

Nano Indenter® G200x Brochure

Nano Indenter® G200x Brochure

Nano Indenter Product Family Line Card

Nano Indenter Product Family Line Card

If you like to find out more about the powerful and flexible nano indentation capabilities offered by the Nano Indenter G200X, contact the CN Tech team today. Our technical specialists would be happy to discuss your nanoscale mechanical testing requirements, and help you find the right solution. Contact us today!