Mini MBE Systems

A simple and fully functional Mini MBE System intended for the epitaxial growth of thin layers.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • Plug&work construction
  • Economical solution, designed for the lab with limited space
  • Suited for growth of elements from groups III/V, II/VI as well as other heterostructures
  • Up to 8 evaporation sources DN 40CF ports with power supplies
  • 4-axes motorised or manual manipulator with high precision temperature control: resistive heating up to 1000°C, EB heating up to 1400°C, water or LN2 cooling (simpler manipulator available on request)
  • Prepared for Flag-style substrate/sample holders
  • Base pressure with LN2 shroud: <2×10-10 mbar
  • Small process chamber Ø 250 mm with an exchangeable bottom flange
  • Pumping system (based on the backing pump, TMP, ion pump & TSP)
  • Quartz balance for deposition rate measurement and thickness monitor, with Z manipulator to measure rate in focus point
  • RHEED/TorrRHEED with equipment
  • Additional independent shutters on 40CF ports
  • Load Lock chamber for single sample holder or with carrousel (as storage) for 6 or 12 Flag style substrate holders
  • Reliable and fast linear transferring system from load-lock to the process chamber
  • Vacuum gauges with equipment
  • Viewports – observation windows with shutter
  • Cooling system with integrated blow-off line before bakeout
  • Bakeout system
  • Adjustable rigid main frame with large wheels for easy placement of the system
  • 19“ cabinet with electronic units

Description

Mini MBE Systems are the answer if you need a high-quality deposition process combined with low-running operating costs. The unit is ideal for quick tests of new materials and technologies in research and development units.

The Molecular Beam Epitaxy standalone system is suited for the growth of elements from groups III/V, II/VI as well as other heterostructures, and more.

The process chamber contains 8 ports for evaporation sources and the substrate stage is intended for 10×10 mm samples, with a heating & rotation option.

The deposition process can be controlled over a wide temperature range (from LN2 up to 1400˚C) and can be fully software programmed and controlled via a PLC controller.

The process chamber is equipped with connecting flanges in UHV standard for connecting current and future equipment, including:

  • Up to 8 effusion cells with flange DN40CF (high or low-temperature, single or multi-filament)
  • Substrate manipulator with a temperature range (from LN2 up to 1400˚C)
  • Pumping system (based on the backing pump, TMP, ion pump & TSP)
  • Vacuum gauges with equipment
  • Entry port for linear transferring systems or transport box
  • Quartz balance, thickness monitor with Z manipulator
  • RHEED/TorrRHEED with equipment
  • Motorised or manual shutter (following the substrate) for vicinal layers or masks
  • Additional gas dosing eg. for the reactive deposition process
  • Viewports – observation windows with shutters
  • Residual gas analyser
  • Heated viewports for diagnostic devices

The final design and functionality depend on the system configuration.

A pumping system combined with the small volume of the process chamber allows for reaching the base pressure in a short time, where the base pressure is guaranteed below 5×10-10 mbar.

The system is equipped with advanced, easy-to-use power supplies and electronic devices controlling and supporting the sources and the whole included research equipment.

Applications

Applications Sources
Effusion cell E-beam evaporators Valved Cracker Source Sublimation Source
Metals Al, Co, Ni, Cu (etc.) Mo, Pd, Ta, W, Pt    
Group III/V Be, Al, Ga, In   P, As, Sb C, Si doping
Group II/VI Be, Zn, Cd   S, Se, Te  
Group IV Ge, Sn, Pb Si, Ge   B, P, Sb doping
Oxides Mn, Fe, Ni, Ga, Bi, Eu      
Topological Insulators (TI) Ge, Sn, Te, Bi, GeSb B Se, Te  

 

 

Downloads

Brochures

MBE Systems Brochure

View Brochure

Options

  • Motorised or manual shutter (following the substrate) for vicinal layers or masks
  • Protection shield against cross-contamination
  • Vacuum suitcase (transport box) with a port in the load-lock chamber
  • Additional gas dosing eg. for the reactive deposition process
  • Residual gas analyser
  • Heated viewports for the diagnostic devices
  • Pyrometer
  • Full control deposition process & equipment by PLC unit and Synthesium software

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

Get in touch to discuss your requirements

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