Magnetron Source | 3-inch Targets
Magnetron source for applying thin layers with high homogeneity in the sputtering process. Intended for 3-inch diameter targets.
Manufacturer
Prevac
Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.
Key Features
- With or without insitu tilt module
- Range of mounting flanges
- Chimney as standard
- Pneumatic dome type or side swing shutter
- Indirectly cooled
Description
Depending on the required conditions of the sputtering process, we offer 2 types of sources: type B & C.
All types are fully compatible with our M600DC-PS power supply as well as all other DC, RF and pulsed DC power supplies available on the market.
Source type B
| Mounting flange | DN 160 CF* |
| Max. power (DC mode) | 600 W DC ** |
| Max. power (RF mode) | 600 W RF ** |
| Max. voltage DC | 1200 V |
| Connector DC/RF | type 7/16 |
| Target: | |
| form | ring |
| diameter | 3″ (76.2 mm) ± 0.2 mm |
| thickness | 1 – 7 mm (magnetic & non-magnetic) |
| cooling | indirect |
| Water flow | min. 1 l/min |
| Max. inlet water temperature | < 28 °C |
| Max. water pressure | 3 bar |
| Tubing diameter | Ø6×1 mm PTFE |
| Magnet material | Samarium Cobalt (SmCo) |
| Magnet max. temperature | 350°C |
| Internal pneumatic shutter | yes |
| Shutter type | dome type or flat swing |
| Insitu tilt module | yes, range +45° ÷ -10° |
| Chimney | yes |
| Dedicated materials: | |
| typical rates [nm/min] for 200 W: | |
| Cu | 18,72 nm/min (distance: 170 mm; target thickness: 3 mm)*** |
| Ti | 4,10 nm/min (distance: 170 mm; target thickness: 3 mm)*** |
| Fe | 5,16 nm/min ( distance: 170 mm; target thickness: 3 mm)*** |
| Internal gas inlet | yes (VCR standard) |
| Max. working pressure | 5×10-3 – 1×10-1 mbar |
| Optimal working pressure | 5×10-3 – 5×10-2 mbar |
| * Other mounting flanges on request ** The maximum power is determined by the target material *** Distances depend on the geometry of the chamber and the magnetrons |
Source type C
| Mounting flange | DN 160 CF* |
| Max. power (DC mode) | 600 W DC ** |
| Max. power (RF mode) | 600 W RF ** |
| Max. voltage DC | 1200 V |
| Connector DC/RF | type 7/16 |
| Target: | Keeper standard |
| form | circular |
| diameter | 3″ (76.2 mm) ± 0.2 mm |
| thickness | 1 – 6 mm |
| cooling | indirect |
| Water flow | min. 1 l/min |
| Max. inlet water temperature | < 28 °C |
| Max. water pressure | 3 bar |
| Tubing diameter | Ø6×1 mm PTFE |
| Magnet material | Neodymium Iron Boride (NdFeB) |
| Magnet max. temperature | 200°C |
| Internal pneumatic shutter | yes |
| Shutter type | dome type or flat swing |
| Insitu tilt module | yes, range +45° ÷ -10° |
| Chimney | yes |
| Dedicated materials: | |
| typical rates [nm/min] for 200 W: | |
| Cu | 19,76 nm/min (distance: 150 mm; target thickness: 3 mm)*** |
| Ti | 6,8 nm/min (distance: 100 mm; target thickness: 3 mm)*** |
| Fe | 4,08 nm/min (distance: 150 mm; target thickness: 6 mm)*** 4,32 nm/min (distance: 150 mm; target thickness: 3 mm)*** |
| Internal gas inlet | yes (VCR standard) |
| Working gas | Ar |
| Optimal working pressure | 5×10-3 – 1×10-1 mbar |
| Optimal working pressure | 5×10-3 – 5×10-2 mbar |
| * Other mounting flanges on request ** The maximum power is determined by the target material *** Distances depend on the geometry of the chamber and the magnetrons |
Options
- Mass Flow Controller (MKS MF1)
- Customised length
- Z manipulator
Related Products
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