Ion Source IS 40F1
Compact, easy-to-use extractor-type ion source with a beam-focusing function.
Manufacturer
Prevac
Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.
Key Features
- Beam focus function – possible beam concentration to 3 mm at all sample distances between 30 mm-150 mm
- High beam intensity at larger distances (due to the focus feature)
- Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
- High Ion Beam Current
- Long lifetime
- High stability
Description
The source is mainly used for sample surface cleaning, but the focus feature enables more possibilities. For example: it allows to cover different sample areas at the same sample distance or to use source even when it’s impossible to get the source closer to the sample. The source generates an ion current of >200 μA/cm2 (Argon) with a Gaussian beam profile. The ion gun insertion length is adaptable to individual requirements (between 143 mm – 386 mm, other on request).
Technical data
| Mounting flange | DN 40CF (rotatable) |
| Energy range | 0.12 keV – 5 keV |
| Current density | > 200 μA/cm2 (for distance 30 mm) |
| Shield | Cu, stainless steel (for reactive gases) |
| Cathode type | yttrium oxide coated iridium filament |
| Insertion length | min. 143 mm, other on request OD: max. 37 mm |
| FWHM | yttrium oxide coated iridium filament |
| Small cone angle | 50° |
| Insertion length | 163 mm (standard) |
| FWHM | dependent on ion energy and working distance (e.g. 1.4 mm for distance 60 mm, 3 mm for distance 150 mm) |
| Typical working distance | 30 – 250 mm |
| Bakeout temperature | up to 250 °C |
| Working pressure | 10-5 - 10-6 |
Downloads
IS 40F1 Brochure
Options
- Gas dosing system
- Customised insertion length
- Linear shift
Related Products
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