Ion Source IS 40F1

Compact, easy-to-use extractor-type ion source with a beam-focusing function.



Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • Beam focus function – possible beam concentration to 3 mm at all sample distances between 30 mm-150 mm
  • High beam intensity at larger distances (due to the focus feature)
  • Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
  • High Ion Beam Current
  • Long lifetime
  • High stability


The source is mainly used for sample surface cleaning, but the focus feature enables more possibilities. For example: it allows to cover different sample areas at the same sample distance or to use source even when it’s impossible to get the source closer to the sample. The source generates an ion current of >200 μA/cm2 (Argon) with a Gaussian beam profile. The ion gun insertion length is adaptable to individual requirements (between 143 mm – 386 mm, other on request).

Technical data

Mounting flange DN 40CF (rotatable)
Energy range 0.12 keV – 5 keV
Current density > 200 μA/cm2 (for distance 30 mm)
Shield Cu, stainless steel (for reactive gases)
Cathode type yttrium oxide coated iridium filament
Insertion length min. 143 mm, other on request
OD: max. 37 mm
FWHM yttrium oxide coated iridium filament
Small cone angle 50°
Insertion length 163 mm (standard)
FWHM dependent on ion energy and working distance
(e.g. 1.4 mm for distance 60 mm, 3 mm for distance 150 mm)
Typical working distance 30 – 250 mm
Bakeout temperature up to 250 °C
Working pressure 10-5 - 10-6



IS 40F1 Brochure

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  • Gas dosing system
  • Customised insertion length
  • Linear shift

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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