Ion Source IS 40E1

Ion Source IS 40E1 – two lens, extractor type, focused. Suitable for depth profiling (Ar), enables operation with reactive gases like O2, H2, hydrocarbons and all noble gases.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • Specially configured nose cone
  • Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
  • Continuously variable spot sized
  • Extremely homogeneous crater/beam profile
  • Onside replaceable filament
  • UHV gas inlet
  • UHV conditions maintained in chamber
  • Integrated scan and deflection unit
  • Correction of incident electron beam angle (provided by IS40-PS power supply)

Description

The source is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance. It is particularly suitable for depth profiling in XPS, ISS and SIMS. The source can be also used for sample surface cleaning.

Technical data

Mounting flange DN 40CF (rotatable)
Gases Ar and reactive gases (O2, H2 hydrocarbons with reduced lifetime)
Energy range 0.15 keV – 5 keV
Scan area 10 mm x 10 mm (for working distance of 23 mm)
Current density up to 4 mA / cm2 (for distance 23 mm)
Beam current > 1 μA (for distance 23 mm)
Cathode type yttrium oxide coated iridium filament
Small cone angle 50°
Insertion length 163 mm (standard)
FWHM dependent on working distance
(e.g. < 150 μm for distance 23 mm)
Typical working distance 23 – 120 mm
Bakeout temperature 250 °C
Working pressure 10-8 mbar (with max beam current)

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Options

  • Wien mass filter
  • Gas dosing system
  • Linear shift: 25, 50, 75, 100 mm
  • Pumping set (2 stages)
  • Vacuum Gauges set

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

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Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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