InSEM® HT Nano Indenter
High temperature nanomechanical testing up to 800°C, with independent heating of both the tip and sample which maximises accuracy and flexibility. Designed for use in-situ in a SEM chamber, the InSEM® HT can synchronise mechanical test data with SEM imaging. The combination of wide temperature range capability and low cost of ownership makes the InSEM ®HT a valuable tool in materials development research programs.
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- InForce 50 actuator with tip heating for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
- Sample heating up to 800 °C with 10mm sample-size and vacuum-compatible sample mounting system
- InQuest high speed controller electronics with 100kHz data acquisition rate and 20µs time constant
- XYZ motion system for sample targeting
- SEM video capture for synchronized SEM images with test data
- Unique software-integrated tip-calibration system for fast, accurate tip calibration
- InView control and data review software with Windows ® 10 compatibility and method developer for user-designed experiments
High Temperature In-Situ Nano Indentation
KLA’s InSEM® HT nano indenter provides high temperature nanomechanical testing capabilities for use in-situ inside imaging equipment. The InSEM® HT can perform nanomechanical tests at temperatures of up to 800°C in vacuum environments. Independent tip and complete sample heating is used to provide maximum flexibility and accuracy. The complete surface of a sample is heating to maximum temperature, maximising test are and eliminating thermal gradients. Real-world use had demonstrated the InSEM® HT’s results compare well to conventional macro-scale high temperature testing.
In-situ testing can be performed inside the chambers of scanning electron microscope (SEM) and focused ion beam (FIB) instruments from a range of manufacturers., and inside standalone vacuum chambers.
Synchronise Imaging & Mechanical Testing Data
To provide a nano indentation solution that is both simple and powerful, KLA have developed the InView software package. InView provides an elegant software interface, with both flexibility and ease of use. Guided test setups allow users of all experience levels to quickly configure effective mechanical tests. A comprehensive range of tests are available out of the box, with configuration options for custom test protocols also included.
InView provides the ability to synchronise live imaging and mechanical testing data. Real time images from a SEM or other imaging instrument are displayed together with incoming test data, which can also be recorded for later analysis. With InView, it is possible to gain a greater level of insight into tip and surface interactions.
Comprehensive Mechanical Testing Capabilities
To provide the flexibility to suit the widest range of testing applications, KLA’s InSEM® HT is capable of performing an array of different mechanical tests at high temperatures. Hardness and modulus testing (Oliver-Pharr) is fully supported for many materials, including soft surfaces. ISO 14577 hardness testing is included as standard.
The InSEM® HT can also perform high temperature creep measurement and strain rate sensitivity tests, at temperatures up to 800°C. This helps to provide the greatest understanding of the effect of combined mechanical and thermal stressors on materials.
Accurate & Efficient Design
KLA have designed the InSEM® HT to provide fast and accurate nanomechanical testing. KLA’s InForce actuators are based up electromagnetic force actuation and capacitance displacement technology. In an InForce actuator, force actuation and displacement measurement have been decoupled. This allows for actuation and measurement to be independently optimised, maximising accuracy and performance. The InForce actuators also have high stiffness and vertical stability, and offer the best calibration stability available.
The InSEM® HT stage features a high frame stiffness, which concentrates deformation in the sample, improving accuracy and resolution. High precision linear optical encoders on the sample stage allow for precise sample targeting.
NanoFlip® Nano Indenter
InSEM® HT Nano Indenter
- High temperature testing
- Hardness and modulus measurements (Oliver-Pharr)
- Continuous stiffness measurement
- High speed material property maps
- Creep measurement
- Strain rate sensitivity
- Universities, research labs and institutes
- Automotive manufacturing
- Hard coatings
- Nuclear energy
High Temperature Nanoindentation Creep Measurements of Al1100High Temperature Nanoindentation Creep Measurements of Al1100
Effect of Annealing on 50nm Gold FilmsEffect of Annealing on 50nm Gold Films
If you would like to learn more about the high-temperature nanomechanical testing capabilities provided by KLA’s InSEM® HT, contact our experienced technical team today. We would be happy to discuss your materials testing requirements in greater detail. Contact us today!