iNano® Nano Indenter
An easy to operate, highly accurate solution for performing nanoscale mechanical tests on thin films and soft materials. Setup and measurement is fast and efficient, across a wide range of test types. Visualise mechanical properties with NanoBlitz 3D and 4D property mapping and the remote video option.
A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.
- High Accuracy InForce 50 Actuator with interchangeable tips
- InQuest High Speed Controller with 100kHz data acquisition rate and 20µs time constant
- XY Motion System with easy mounting magnetic sample holder
- NanoBlitz 3D & 4D Property Mapping
- ISO 14577 & Standardised Tests
- Sample Heating
- Unique software-integrated tip-calibration system for fast, accurate tip calibration
- InView software package with RunTest, ReviewData, InFocus reporting
- InView University online training and InView mobile application
Make Nano Indentation Simple
KLA’s iNano® Nano Indenter is powered by the InView software package, which provides a modern and flexible interface to interact with nano indentation systems. In under a minute even inexperienced users can configure mechanical testing with InView’s guided setup. InView supports a wide selection of standard mechanical test procedures out of the box. Additional test methods for novel materials or new experiments can be programmed by users, and InView provides full control over all test parameters.
To ensure every user can maximise the potential of nano indentation, KLA provides access to a comprehensive learning portal with each instrument. A range of online webinars and documentation, covering both fundamental principles and advanced applications is available.
Flexibility to Suit All Applications
The iNano has been design to be modular and customisable, with a range of options to adapt to almost any application. A sample heating chamber is available, which has a maximum heating temperature of 300°C. Samples are heated uniformly, with precision temperature control. Sample heating can be used together with many of the iNano’s mechanical testing modes.
To ensure maximum performance for high-sensitivity applications, an active vibration isolation system can be added. The isolation provides vibration reduction in six degrees of freedom, with no complicated setup or tuning required. A remote video option is also available, providing additional viewing angles inside the iNano’s chamber.
A Comprehensive Suite of Mechanical Tests
The iMicro supports a wide range of mechanical test types. Hardness and modulus tests (Oliver-Pharr) can be performed on a wide range of materials, including soft materials such as ultra-soft gels. Full support for ISO 14577 hardness testing is also included as standard. Scratch and wear tests can be performed on a broad set of materials, including thin films and polymers.
For more advanced testing, the iNano can be configured for Continuous Stiffness Measurement (CSM), substate-independent thin film measurement with AccuFilm™, and ProbeDMA™ for testing viscoelastic properties of polymers. A package is also available providing complex modulus measurement for biomaterials.
Fast & Accurate Measurement
With the iNano, nanoscale mechanical testing is quick and reliable. The InForce actuator design used by KLA is based on electromagnetic force actuation and capacitance displacement technology. This design allows for the force actuation and displacement measurement to be decoupled, making it possible to independently optimise them to maximise performance. InForce actuators have a high stiffness and maximised vertical stability, and feature the highest calibration stability on the market.
To further ensure accuracy, regardless of material or load, the iNano uses a high-stiffness carbon fibre gantry. Passive vibration isolation is integrated into the iNano enclosure, providing a low noise floor during measurement.
Visualise Mechanical Properties with NanoBlitz 3D & NanoBlitz 4D
3D nanomechanical property maps can be generated with NanoBlitz 3D. Using the iNano’s motorised XY stage, NanoBlitz 3D uses an array of up to 100,000 indents to produce a property map of a sample region. Young’s modulus, hardness, and stiffness values are recorded for each indent. NanoBlitz 3D is fast, with each indent taking less than 1 second to perform, including stage movement.
By expanding the iNano’s Continuous Stiffness Measurement (CSM) capability, NanoBlitz 4D is able to generate mechanical property tomography. By performing up to 10,000 indents at 5 to 10 seconds per indent, mechanical properties can be visually mapped at multiple depths. Young’s modulus, hardness, and stiffness values are recorded as a function of depth for each indent.
Shown left: NanoBlitz 3D image showing hardness mapping
Shown right: NanoBlitz 4D mapping at two different depths
Nano Indenter® G200
Nano Indenter® G200X
- Hardness and modulus measurements (Oliver-Pharr)
- High speed material property maps
- ISO 14577 hardness testing
- Polymer tan delta, storage and loss modulus
- High Temperature Nanoindentation Testing
- Universities, research labs and institutes
- Semiconductor and packaging industry
- Polymers and plastics
- MEMS: Micro-electro-mechanical systems/nanoscale universal testing
- Ceramics and glass
- Metals and alloys
- Coatings and paints
- Polymer manufacturing
- Batteries and energy storage
iNano® Nano Indenter BrochureiNano® Nano Indenter Brochure
A Critical Assessment of the Fffect of Indentation Spacing on the Measurement of Hardness and ModulusA Critical Assessment of the Fffect of Indentation Spacing on the Measurement of Hardness and Modulus
Cross-Sectional DMA Testing on Automotive Tires Using Continuous Stiffness Measurement on NanoindentationCross-Sectional DMA Testing on Automotive Tires Using Continuous Stiffness Measurement on Nanoindentation
Effect of Annealing on 50nm Gold FilmsEffect of Annealing on 50nm Gold Films
In Vitro Complex Shear Modulus of Bovine Muscle Tissue (Steak)In Vitro Complex Shear Modulus of Bovine Muscle Tissue (Steak)
Instrumented Indentation Testing with the KLA Nano Indenter® systemsInstrumented Indentation Testing with the KLA Nano Indenter® systems
Mechanical Characterization of Sol-Gel Coatings Using KLA Nano Indenter systemsMechanical Characterization of Sol-Gel Coatings Using KLA Nano Indenter systems
Strain Rate Sensitivity of Thin Metal Films by Instrumented IndentationStrain Rate Sensitivity of Thin Metal Films by Instrumented Indentation
Critical Assessment of High Speed Nanoindentation Mapping Technique and Data DeconvolutionCritical Assessment of High Speed Nanoindentation Mapping Technique and Data Deconvolution
Nano Indenter Product Family Line CardNano Indenter Product Family Line Card
If you need more information about the KLA iNano® Nano Indenter, contact our technical experts to find out more. The CN Tech would be happy to explore the extensive measurement capabilities provides by the iNano® for thin films and soft samples. Contact us today!