iMicro Nano Indenter
The iMicro nanoindenter makes measuring hard coatings, thin films, and small volumes of material easy. A flexible and expandable nanomechanical testing platform with high speed and high accuracy. Perform a variety of mechanical tests quickly and easily with the KLA iMicro nano indenter. Generate 3D and 4D mechanical property maps with NanoBlitz. Interchangeable actuators provide a large dynamic range of force and displacement, allowing researchers to test materials from soft polymers to hard metals and ceramics with accuracy and repeatability.
A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.
- Interchangeable InForce 1000 Actuators
- InQuest High Speed Controller
- XY Motion System with easy mounting magnetic sample holder
- NanoBlitz 3D & 4D Property Mapping
- ISO 14577 & Standardised Tests
- Sample Heating
- High stiffness gantry with integrated vibration isolation
- Integrated microscope with digital zoom for precise indentation targeting
- ISO 14577 and standardized test methods
- InView software package with RunTest, ReviewData, InFocus reporting
- InView University online training and InView mobile application
Nano Indentation Made Easy
To make nano indentation as easy as possible, KLA have developed the InView software, a flexible and modern software package. Mechanical testing can be set up in under a minute with InView’s guided setup. A large range of standard test methods are pre-programmed into the system. New test protocols can also be configured for novel experiments or materials, with full control over all testing parameters.
With each nano indentation system, KLA also provides access to a comprehensive online nano indentation learning portal. This includes webinars and documentation on both the basic principles and advanced applications of nano indentation and the iMicro’s features.
Flexible & Extensible Design
The iMicro’s design features interchangeable actuators, which allows the iMicro to support a wide range of materials, both hard and soft. The InForce 1000 actuator is supplied as standard, with a max force of 1N. For soft materials, the InForce 50 actuator is available, with a maximum force of 50mN. The optional Gemini 2D transducer provides two-axis dynamic measurement.
A wide range of options are also available to enhance the iMicro’s capabilities. This includes integrated sample heating, with a maximum temperature of 300°C. The heating chamber provides uniform sample heating with precision temperature control, and is compatible with many of the iMicro’s advanced testing methods.
Comprehensive Mechanical Testing Capabilities
A comprehensive range of mechanical tests are supported by the iMicro. The iMicro can perform hardness and modulus measurements (Oliver-Pharr) for a variety of materials, from ultra-soft gels to hard coatings. ISO 14577 hardness testing is full supported. Scratch and wear testing is also supported on a wide selection of materials.
Options are also available for Continuous Stiffness Measurement (CSM), AccuFilm™ for substrate independent thin film measurement, and ProbeDMA™ for testing viscoelastic properties of polymers. An option is also available for measuring the complex modulus of biomaterials.
Fast & Accurate Measurement
The iMicro has been designed to make nanomechanical testing both fast and accurate. KLA’s actuator design utilises electromagnetic force actuation and capacitance displacement technology. The force actuation and displacement measurement are decoupled, allowing them to be independently optimised to maximise performance. This design provides a high stiffness while maximising vertical stability, and provides the highest calibration stability on the market.
The iMicro also features a high stiffness gantry to ensure measurement is accurate across a wide range of materials, even at high loads. Integrated vibration isolation is also provided to ensure a low noise floor during operation.
NanoBlitz 3D & NanoBlitz 4D Mechanical Property Mapping
NanoBlitz 3D generates 3D maps of nanomechanical properties. Using the iMicro’s automatic XY stage, NanoBlitz 3D performs up to 100,000 indents across a sample. Young’s modulus, hardness, and stiffness values are recorded for each indent, and can be visualised as property maps. Mapping with NanoBlitz 3D is fast, taking less than 1 second per indent, including stage movement time.
NanoBlitz 4D extends iMicro’s Continuous Stiffness Measurement (CSM) capability to provide mechanical property tomography. Up to 10,000 indents are performed at 5 to 10 seconds per indent. Young’s modulus, hardness, and stiffness values are recorded as a function of depth for each indent, which can be visualised as a set of property maps.
Shown left: NanoBlitz 3D image showing hardness mapping
Shown right: NanoBlitz 4D mapping at two different depths
Nano Indenter® G200
Nano Indenter® G200X
- Hardness and modulus measurements (Oliver-Pharr)
- High speed material property maps
- ISO 14577 hardness testing
- Polymer tan delta, storage and loss modulus
- Quantitative scratch and wear testing
- High Temperature Nanoindentation Testing
- Universities, research labs and institutes
- Semiconductor and packaging industry
- Polymers and plastics
- MEMS: Micro-electro-mechanical systems/nanoscale universal testing
- Ceramics and glass
- Metals and alloys
- Coatings and paints
- Polymer manufacturing
- Batteries and energy storage
iMicro Nano Indenter BrochureiMicro Nano Indenter Brochure
Cross-Sectional DMA Testing on Automotive Tires Using Continuous Stiffness Measurement on NanoindentationCross-Sectional DMA Testing on Automotive Tires Using Continuous Stiffness Measurement on Nanoindentation
Effect of Annealing on 50nm Gold FilmsEffect of Annealing on 50nm Gold Films
In Vitro Complex Shear Modulus of Bovine Muscle Tissue (Steak)In Vitro Complex Shear Modulus of Bovine Muscle Tissue (Steak)
Instrumented Indentation Testing with the KLA Nano Indenter® systemsInstrumented Indentation Testing with the KLA Nano Indenter® systems
Mechanical Characterization of Sol-Gel Coatings Using KLA Nano Indenter systemsMechanical Characterization of Sol-Gel Coatings Using KLA Nano Indenter systems
Strain Rate Sensitivity of Thin Metal Films by Instrumented IndentationStrain Rate Sensitivity of Thin Metal Films by Instrumented Indentation
Nano Indenter Product Family Line CardNano Indenter Product Family Line Card