Filmetrics® F60-t Series Automatic Thin Film Mapping Analyser
The Filmetrics® F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, and an industrial computer with pre-installed software. The different F60-t instruments are distinguished primarily by thickness and wavelength range.
Key Features
- Intuitive Analysis Software
- 1.5mm to 150μm Spot Size
- Large Material Reference Library
- Wide Spectrometer Wavelength Range
- Fast & Efficient Thickness Mapping
- 2” to 300mm Wafer Diameters
Manufacturer
KLA
A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. They enable evolution and innovation in the data era across key industries including automotive, mobile and data centre.
Automatic Thickness Mapping for Production Environments
The Filmetrics F60-t series brings the power of Filmetrics’ F50 automatic thickness mapping platform to the production environment. The F60-t features the same accurate and high-speed measurement technology, able to complete a typical 49-pint thickness map in around 45 seconds. A motorised R-Theta stage automatically moves to each measurement point, and is able to accept wafers from 2” to 300mm in diameter. The F60-t series features a number of features specifically for production environments. This includes automatic notch finding, automatic on-board baselining, and enclosed measurement stage with motion interlock, and an integrated industrial computer.
Efficient & Intuitive Analysis Software
To make film measurement workflows as simple as possible, Filmetrics have developed the FILMapper film thickness mapping and analysis software package. It includes a library of over 130 preconfigured materials, with access to thousands more available. A series of thickness map templates are included and custom maps can also be configured. Customisable mapping parameters include map shape and pattern, centre or edge exclusion, and spot density. To ensure minimum downtime, Filmetrics also provides a comprehensive package of technical assistance. This includes online diagnostics and application support, available 24 hours a day.
Model Specifications
Thickness and Wavelength Range
Model Specifications
Thickness Measurement Range
What’s Included
- Integrated spectrometer/light source unit
- TS-SiO2-4-7200 Thickness standard
- 4", 6" and 200mm wafer reflectance standards
- Door safety interlock
Additional Perks
- Library with over 130 materials included with every system, along with access to 100s more
- Online "Hands On" support (internet connection required)
- Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
- Hardware upgrade program
Downloads
F60-t Series Automatic Thin Film Mapping Analyser Brochure
Options
NIST-traceable thickness standard
F60 chuck - 200mm / 300mm
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Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.