F60-t Series Automatic Thin Film Mapping Analyser

The Filmetrics® F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, and an industrial computer with pre-installed software. The different F60-t instruments are distinguished primarily by thickness and wavelength range.

Manufacturer

Filmetrics

Filmetrics was founded in 1995 with the mission of making thin-film measurements simple and affordable. Our approach, borne of the microelectronics and software revolution, results in film-thickness measurements that take less than a second - by operators who can be trained in minutes.

 

Key Features

  • Intuitive Analysis Software
  • 1.5mm to 150μm Spot Size
  • Large Material Reference Library
  • Wide Spectrometer Wavelength Range
  • Fast & Efficient Thickness Mapping
  • 2” to 300mm Wafer Diameters

Automatic Thickness Mapping for Production Environments

The Filmetrics F60-t series brings the power of Filmetrics’ F50 automatic thickness mapping platform to the production environment. The F60-t features the same accurate and high-speed measurement technology, able to complete a typical 49-pint thickness map in around 45 seconds. A motorised R-Theta stage automatically moves to each measurement point, and is able to accept wafers from 2” to 300mm in diameter.

The F60-t series features a number of features specifically for production environments. This includes automatic notch finding, automatic on-board baselining, and enclosed measurement stage with motion interlock, and an integrated industrial computer.

Efficient & Intuitive Analysis Software

To make film measurement workflows as simple as possible, Filmetrics have developed the FILMapper film thickness mapping and analysis software package. It includes a library of over 130 preconfigured materials, with access to thousands more available. A series of thickness map templates are included, with custom maps also able to be configured. Customisable mapping parameters include map shape and pattern, centre or edge exclusion, and spot density.

Filmetrics technology is robust and reliable. To ensure minimum downtime, Filmetrics also provides a comprehensive package of technical assistance. This includes online diagnostics and application support, available 24 hours a day.

Model Specifications

Thickness and Wavelength Range

Model Specifications

Wavelength Range

What’s Included

  • Integrated spectrometer/light source unit
  • fiber optic cable
  • 4", 6" and 200mm wafer reflectance standards
  • TS-SiO2-4-7200 Thickness standard
  • BK7 reflectance standard
  • Flattening filter (for highly-reflective substrates)
  • Vacuum pump
  • Spare TH-1 lamp

 

Additional Perks

  • Library with over 130 materials included with every system, along with access to 100s more
  • Online "Hands On" support (internet connection required)
  • Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
  • Hardware upgrade program

Product range

F50
F54
F54-XY-200
F60-t

Options

NIST-traceable thickness standard

F60 chuck - 200mm / 300mm

Would you like to find out more about how the fast measurement provided by Filmetrics’ F60-t series can make your production workflow more efficient? Contact our dedicated technical team to day and discuss your application with us.