F50 Series Automatic Thin Film Mapping Analyser
Produce polar, rectangular, or linear thickness maps as quickly as 2 points per second, with Filmetrics’ F50 series automatic thin film analysers. Robust and reliable, and simple to set up and use. Multiple models available supporting different thickness ranges. The F50 film thickness mapping system connects to the USB port of your Windows® computer and can be set up in minutes.
Manufacturer
Filmetrics
Filmetrics was founded in 1995 with the mission of making thin-film measurements simple and affordable. Our approach, borne of the microelectronics and software revolution, results in film-thickness measurements that take less than a second - by operators who can be trained in minutes.
Key Features
- Intuitive Analysis Software
- 1.5mm to 150μm Spot Size
- Large Material Reference Library
- Wide Spectrometer Wavelength Range
- Measures up to 2 Points per Second
- Maximum 450mm Sample Diameter
Automatic Film Thickness Mapping
The F50 Series of automated film thickness mapping systems and produce thickness maps quickly and accurately. Mapping speed can be as fast as 2 points per second, which makes producing thickness maps quick and efficient. The motorised R-Theta stage can accept stand and custom chucks, and samples up to 450mm in diameter, and is robust and reliable. Thickness maps can be produced in polar, rectangular, and liner forms. Custom map types can also be configured, with no limit on the number of measurement points. Multiple pre-defined map patterns are included. Filmetrics’ also provides access to comprehensive online support, including diagnostics and applications support, available 24 hours a day.
Visualise Thickness in 2D & 3D with FILMapper
Filmetrics’ FILMapper software is simple and easy to use, requiring minimal user training. A library of over 130 materials is built in, with access to thousands more available. A selection of map types is included, or custom maps can be configured. Customisable mapping parameters include map shape and pattern, centre or edge exclusion, and spot density. Maps can be switched between 2D and 3D views, with 3D view freely rotatable.
Shown left: 2D map of sample.
Shown right: 3D view of sample.
Model Specifications
Thickness and Wavelength Range
Model Specifications
Thickness Measurement Range
No Backside Preparation Necessary
Our exclusive probe design rejects 98% of backside reflections on substrates 1.5mm thick, and rejects even more on thicker lenses. Like all our thin-film measurement systems, the F10-AR connects to the USB port of your Windows® computer and sets up in minutes.
What’s Included
- Integrated spectrometer/light source unit
- fibre optic cable
- 4", 6" and 200mm wafer reflectance standards
- TS-SiO2-4-7200 Thickness standard
- BK7 reflectance standard
- Flattening filter (for highly-reflective substrates)
- Vacuum pump
- Spare TH-1 lamp
Additional Perks
- Library with over 130 materials included with every system, along with access to 100s more
- Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
- Online "Hands On" support
- Hardware upgrade program
Downloads
F50 Series Automatic Thin Film Mapping Analyser Brochure
Options
NIST-traceable thickness standard
SiO2-on-Si thickness standard, approx 7200Å thick, 4 inch wafer.
F50 chuck - 100mm 200mm 300mm and 450mm (F50-450 req'd for 450mm chuck)
F50 chuck assembly for 4", 5", 6", 200mm, 300mm & 450mm wafers.
F50 small spot option VIS or UV
1" diameter lens assembly, 30mm focal-length lens for 60-1000mm working distance.
Related Products
F54-XY-200 Series Automatic Thin Film Mapping Analyser
F54-XY-200 Series Automatic Thin Film Mapping Analyser
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.