F3-sX Series Single Spot Thin Film Analyser
Overcome difficulties measuring thick semiconductor and dielectric layers up to 3mm thick, with Filmetrics’ high-speed measurement technology. Using a spot size of 10µmm the F3-sX series can handle measurements impossible with other instruments. Measurement rates of up to 1 kHz also make the F3-sX a top choice for many in-line applications (e.g. roll-to-roll processes).
Key Features
- Measures materials with unique stand-alone requirements that are difficult to measure with other instruments
- System package includes an integrated spectrometer/light source unit, FILMeasure software, single-spot measurement stage with 10µm spot size, Si reflectance standard and FILMeasure standalone software for remote data analysis
- Results available in fractions of a second
- Built-in online diagnostics
- Intuitive analysis software included
- Sophisticated history function for saving, reproducing and plotting results
- 24-hour (M-F) phone, email and online support by application engineers
Manufacturer
Filmetrics
Filmetrics was founded in 1995 with the mission of making thin-film measurements simple and affordable. Our approach, borne of the microelectronics and software revolution, results in film-thickness measurements that take less than a second - by operators who can be trained in minutes.
Wavelength Options
The F3-sX uses near-infrared (NIR) light to measure layer thickness - even many layers that are opaque to the eye (such as semiconductors). The 980nm wavelength version, the F3-s1310 is optimised for heavily-doped-silicon applications, while the F3-s1550 is intended for the thickest of layers.
| Model | Thickness Range* | Wavelength Range |
| F3-s980 | 10um-1mm | 960-1000nm |
| F3-s1310 | 15um-2mm | 1280-1340nm |
| F3-s1550 | 25um-3mm | 1520-1580nm |
Applications
- Si wafer thickness
- Conformal coatings
- IC failure analysis
- Thick photoresist (e.g., SU-8)
Industry
Semiconductor
Compound semiconductor
Coatings
Downloads
F3-sX Series Single Spot Thin Film Analyser Brochure
MEMS: Thickness of Silicon and Process Films
Silicon Wafer Backside Failure Analysis
Wafer Thickness Measurement
Options
Thickness-Measurement software upgrade
Index-Solving Software Upgrade. Requires UPG-RT-to-Thickness.
Samplecam-sX
Video camera for the sX probe. Includes sX probe optics modifications. Stage not included.
StageBase-XY10-Auto-100mm
10" x 10" Stage with 100mm of precision X-Y-Focus travel, motorized mapping and autofocus.
Related Products
F10-Arc Single Spot Reflectance & Thin Film Analyser
F10-Arc Single Spot Reflectance & Thin Film Analyser
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.