Evactron® Zephyr™ Plasma Cleaners

Dual vacuum mode plasma cleaning for SEM, FIB, and other vacuum instruments operating at roughing or turbomolecular pressures. Fast and effective contamination removal without damaging sensitive samples.


Evactron Plasma Cleaning by XEI Scientific

XEI Scientific, Inc. is the recognised leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.

Key Features

  • Low & High Vacuum Cleaning
  • Cleans at Turbo Pressure
  • Fast & Efficient Cleaning
  • Desktop or Rackmount Controller
  • “One Button” Cleaning Operation
  • Safe for Delicate Components

Zephyr™ Plasma Cleaning System

Evactron have developed the Zephyr™ series of plasma decontaminators specially for SEMs, FIBs, and other vacuum instruments using turbo molecular pumps. The Zephyr™ plasma clears provide fast and efficient hydrocarbon decontamination, and can operating at both roughing and turbomolecular pressures. Effective removal of contamination is essential for ensuring high quality imaging and analysis results.

Zephyr™ plasma cleaners are easy to operate, and feature “one button” cleaning operation. Both desktop and rackmountable controllers are available, with options for external control of cleaning parameters. The plasma cleaning provided is safe for both samples and sensitive components, with no risk of damage.

Sample Cleaning

If hydrocarbon contamination is allowed to build up inside instrument chambers or on the surface of samples, the quality of imaging and analysis data will be significantly degraded. The plasma decontamination technology developed by Evactron® for the Zephyr™ plasma cleaners provides and efficient and effective method for removing hydrocarbons, organics, and surface carbon. The Zephyr system will not cause damage to samples or sensitive instruments during cleaning.

Shown Left: Sample with contamination
Shown Right: Sample cleaned with Evactron®

Product range

Evactron® E50 Plasma De-Contaminators
Evactron® E-Series Plasma De-Contaminators
Evactron® Zephyr™ Plasma Cleaners
Evactron® Easy Plasma SoftClean™



  • Cleans chambers at turbo pump pressures
  • 5-20 Watts RF power
  • 10x improved cleaning rate
  • 1-50 mTorr operating pressure
  • Room air gas source

If you would like to discuss how the Evactron® Zephyr™ Plasma Cleaners will suit your cleaning needs, contact our team of technical specialists today. We are happy to discuss any plasma cleaning application and provide more information. Contact us today!