Evactron® Zephyr™ Plasma Cleaners

Evactron® Zephyr™ Plasma Cleaners

Dual vacuum mode plasma cleaning for SEM, FIB, and other vacuum instruments operating at roughing or turbomolecular pressures. Fast and effective contamination removal without damaging sensitive samples.


Evactron Plasma Cleaning by XEI Scientific

XEI Scientific, Inc. is the recognised leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.

Key Features

  • Low & High Vacuum Cleaning
  • Cleans at Turbo Pressure
  • Fast & Efficient Cleaning
  • Desktop or Rackmount Controller
  • “One Button” Cleaning Operation
  • Safe for Delicate Components

Zephyr™ Plasma Cleaning System

Evactron have developed the Zephyr™ series of plasma decontaminators specially for SEMs, FIBs, and other vacuum instruments using turbo molecular pumps. The Zephyr™ plasma clears provide fast and efficient hydrocarbon decontamination, and can operating at both roughing and turbomolecular pressures. Effective removal of contamination is essential for ensuring high quality imaging and analysis results.

Zephyr™ plasma cleaners are easy to operate, and feature “one button” cleaning operation. Both desktop and rackmountable controllers are available, with options for external control of cleaning parameters. The plasma cleaning provided is safe for both samples and sensitive components, with no risk of damage.

Sample Cleaning

If hydrocarbon contamination is allowed to build up inside instrument chambers or on the surface of samples, the quality of imaging and analysis data will be significantly degraded. The plasma decontamination technology developed by Evactron® for the Zephyr™ plasma cleaners provides and efficient and effective method for removing hydrocarbons, organics, and surface carbon. The Zephyr system will not cause damage to samples or sensitive instruments during cleaning.

Shown Left: Sample with contamination

Shown Right: Sample cleaned with Evactron®


  • Cleans chambers at turbo pump pressures
  • 5-20 Watts RF power
  • 10x improved cleaning rate
  • 1-50 mTorr operating pressure
  • Room air gas source

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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