Evactron® U50
The Evactron U50 De-Contaminator is a compact, high performance yet simplified plasma cleaner for instruments and chambers designed to operate at UHV conditions. The U50 delivers high power cleaning for removal of hydrocarbon contamination on chamber and sample surfaces.
Key Features
- RF Power: 75W peak, 50W continuous power output
- Bakeable design: Withstands bakeout to 150⁰C; TMP-compatible with no advance venting
- Dual action cleaning: Combines plasma and UV afterglow to remove hydrocarbon contamination
- UHV compatibility: Conflat 2.75 flange and a leak rate below 10⁻¹¹ Torr to make it UHV-ready
- Energy efficient: Hollow cathode, capacitive couple plasma (CCP) technology
- Programmable control: Power, cleaning time, cycle count and recipes are all user-programmable
- Fast cleaning: 100x+ faster than earlier Evactron models, with simple push-button operation
- Alternative gases: Run a range of process gases to tailor the cleaning chemistry to your application
- Wide pressure range: Operation from 0.3 Pa (2 mTorr) to 80 Pa (600 mTorr)
- External interlock: Optional external interlock connection for safety
- TMP compatible: No advance venting needed for operation
- Pop ignition: Patent-pending ignition technology at high vacuum
- Efficient free-radicals: Gas radicals immediately attack hydrocarbon bonds, producing harmless, instantly removed molecules
- Autotune ignition: No match or gas flow adjustments needed for plasma ignition
- Non-damaging: Safe for sensitive components with no sputter etch
- Flexible install: Can be installed on a variety of vacuum chambers or load lock
- Push button operation: Simple, automated cleaning initiation
- Certified: RoHS, CE, NRTL, TUV, and SEMI S2 compliant
Manufacturer
Evactron Plasma Cleaning by XEI Scientific
For almost three decades XEI Scientific has helped researchers, engineers, and manufacturers to maintain cleaner vacuum environments for electron microscopy and advanced analytical instrumentation.
XEI Scientific pioneered downstream plasma cleaning for electron microscopes and introduced the Evactron® De-Contaminator, the first commercial in-situ plasma cleaning system for electron microscope vacuum chambers. Today, Evactron plasma cleaning technology is trusted by laboratories worldwide to remove hydrocarbon contamination, support pristine vacuum conditions, and improve performance across SEM, TEM, FIB, UHV, EUV, X-ray optics, and specimen-preparation applications.
Their mission is straightforward: to help scientists and engineers achieve cleaner systems, clearer data, and more dependable results. As XEI Scientific enters its next chapter, we remain committed to practical innovation, responsive customer support, and the high standards of quality and reliability that have defined the Evactron name.
Overview
The compact design of the Evactron U50 Plasma Radical Source (PRS) makes it a versatile solution for either instrument chambers, load locks, or sample prep chambers. The Evactron U50 offers fast, effective, and powerful cleaning over a wide range of pressures, enabling hydrocarbon-free RGA spectra and fast pumpdown time to UHV.
Downloads
U50 Product Sheet
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.