Evactron® Easy Plasma SoftClean™

The ultimate in flexibility, the Evactron Easy Plasma SoftClean (EPSC) combines the Evactron E16 remote Plasma De-Contaminator with the Evactron SoftClean System, creating an easy to use chamber and desktop plasma cleaner. It can also be used as a specimen storage system, keeping samples in a contamination-free environment.

Key Features

  • Three TEM cleaning ports: Holds up to three TEM specimen rods, centrally positioned for uniform cleaning
  • Top-loading lid: Opens from the top for easy loading of SEM samples
  • Programmable touchpad: Sets ignition power, cleaning power, cycle time and cycle count
  • Room-air operation: Runs on room air to generate reactive oxygen radicals — with alternate-gas capability when a specific chemistry is needed
  • For SEM and TEM: Cleans and stores both SEM samples and TEM specimen rods and holders
  • Adjustable sample platform: Height-adjustable platform positions SEM samples for optimal cleaning
  • Dual target cleaning: Strips hydrocarbon contamination from both samples and holders
  • Autotune Ignition: Automatically tunes the plasma for reliable ignition — no manual matching

Manufacturer

Evactron Plasma Cleaning by XEI Scientific

For almost three decades XEI Scientific has helped researchers, engineers, and manufacturers to maintain cleaner vacuum environments for electron microscopy and advanced analytical instrumentation.

XEI Scientific pioneered downstream plasma cleaning for electron microscopes and introduced the Evactron® De-Contaminator, the first commercial in-situ plasma cleaning system for electron microscope vacuum chambers. Today, Evactron plasma cleaning technology is trusted by laboratories worldwide to remove hydrocarbon contamination, support pristine vacuum conditions, and improve performance across SEM, TEM, FIB, UHV, EUV, X-ray optics, and specimen-preparation applications.

Their mission is straightforward: to help scientists and engineers achieve cleaner systems, clearer data, and more dependable results. As XEI Scientific enters its next chapter, we remain committed to practical innovation, responsive customer support, and the high standards of quality and reliability that have defined the Evactron name.

SoftClean™ System

The EPSC system is equipped with three cleaning ports for TEM specimen rods and a top-loading lid for SEM samples. The central location of the cleaning ports allows for simultaneous and uniform cleaning of all TEM rods.
 
Optional, patented Safar TEM side loaders (Patent US 8,716,676 B2) feature a side-entry slot and locking mechanism which prevents any unwanted contact between the sample rods and the chamber stage during insertion and removal of the TEM rods.
 
Program ignition power, cleaning power, cycle time, and number of cycles through the tethered touchpad for flexible cleaning of hard and soft materials.
 
Using room air as a source gas, the E16 plasma creates reactive oxygen radicals and efficiently removes hydrocarbon contamination from SEM/TEM samples and sample holders.

Downloads

Brochures

Easy Plasma SoftClean™ Product Sheet

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2024/25

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

Get in touch to discuss your requirements

Whether you have a general enquiry, need support, or want to request a demo or sample measurement, simply select your enquiry type on our contact form and we’ll get back to you promptly.

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