Evactron® Easy Plasma SoftClean™

Easily clean and safely store samples by combing Evactron® E16 remote Plasma De-Contaminator with the Evactron® SoftClean system.  

Manufacturer

Evactron Plasma Cleaning by XEI Scientific

XEI Scientific, Inc. is the recognised leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.

Key Features

  • Touch Screen Interface
  • Cleans TEM Grids & Rods
  • Cleans SEM & TEM Samples
  • Inert Environment for Sample Storage
  • Removable SEM Compatible Plasma Source
  • Optional Safar Side Loaders Removable SEM

SoftClean™ System

The SoftClean™ System from Evactron® provides a simple and effective way to clean and safely store delicate samples, by combing an Evactron® E16 remote Plasma De-Contaminator with a desktop plasma chamber. The SoftClean System features three cleaning ports for TEM sample rods, centrally located to allow for simultaneous and uniform cleaning. SEM samples can also be loaded via a top-lifting lid. Together, with cleaning, the SoftClean chamber can be used to safely store samples in an inert and contamination-free environment.

The Evactron EP Plasma Decontaminator can be easily detached from the SoftClean™ chamber, and mounted to SEM, TEM, and Fib instruments for instrument chamber cleaning. This makes the SoftClean System highly versatile, able to take on multiple roles in the lab.

Sample Cleaning

The quality of imaging and analysis data will be significantly degraded if samples and instruments are decontaminated with hydrocarbons. The plasma decontamination technology from Evactron provides an effective and easy to use solution for removing contamination from samples. No complex processing required, and there is no risk of sample damage. Evactron’s technology is based on using RF plasma to chemically etch and remove hydrocarbons, organics, and surface carbon.

Shown Left: Sample with contamination
Shown Right: Sample cleaned with Evactron®

Specifications

  • Evactron EPSC with E16 plasma cleaner including desktop controller and tethered touchpad programming
  • Accommodates up to three TEM stage rods
  • SEM sample platform included
  • Uses room air for oxygen radical production
  • Optional Safar side loaders for safe loading of TEM rods and samples (US Patent 8,716,676 B2)
  • RF Power:  5-16 Watts at 13.56 MHz
  • 100-240 VAC 50/60 Hz input
  • Vacuum safety interlock
  • SoftClean dimensions: D × H: 8.5” × 7.2” (140 × 216 cm)
  • Electronic chassis: W×H×D: 12.25“×3.5”×9.34” (31×8.9×23.7cm)

Downloads

Brochures

Easy Plasma SoftClean™ Product Sheet

View Brochure

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2024/25

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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