Evactron® E50 Plasma De-Contaminators

Evactron® E50 Plasma De-Contaminators

High performance, power, and efficient plasma cleaning for SEM, TEM, and FIB instrumentation. Fast, effective, and powerful cleaning over a wide range of pressures helps guarantee quality high-resolution imaging and instrument sensitivity.


Evactron Plasma Cleaning by XEI Scientific

XEI Scientific, Inc. is the recognised leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.

Key Features

  • High Power Cleaning
  • Compact Size Plasma Source
  • Energy Efficient Plasma Generation
  • "Pop" Ignition
  • Touch Screen Interface
  • Vacuum Safety Interlock

E50 Plasma Cleaning Systems

The Evactron® E50 series of plasma de-contaminators provides high performance and high power plasma cleaning in a compact and easy to use form factor. Suitable for use with SEM, TEM, and FIB instruments, the E50 plasma cleaners provide high power cleaning to ensure maximum performance. The E50 technology uses an external hollow cathode RF (XHCRF) plasma radical source for high power and efficient operation.

The E50 plasma cleaners are very easy to set up and operate, and feature a touch screen tablet interface, with a simple “one button” cleaning control. Advanced parameters such as power, cleaning time, and cycle counts can also be adjusted, and saved as user-programmable recipes. The compact design of the E50 plasma sources makes them ideal for attaching to crowded SEM and FIB chambers.

Sample Cleaning

Contamination from hydrocarbon build-up inside instruments and on samples can compromise high resolution image quality and sensor sensitivity. The plasma de-contamination technology used by Evactron’s E50 plasma cleaners provides a fast, effective, and gentle method of removing contamination. This ensures that high-quality, artefact-free imaging and efficient analytical measurement is possible. The E50 plasma-decontaminators do not damage samples, and cause no sputter etch.

Shown Left: Sample with contamination

Shown Right: Sample cleaned with Evactron®


  • RF Power: 75W peak, 50W continuous
  • Dual action cleaning using plasma and UV afterglow
  • Energy efficient hollow cathode, capacitive coupled plasma (CCP)
  • “Pop” ignition (patent pending) at high vacuum
  • Programmable power, cleaning time, number of cycles, recipes
  • Android tablet with Bluetooth communication or touchpad communication
  • Wide range pressure operation: 0.3 Pa/ 2 mTorr to 80 Pa/ 600 mTorr
  • Optional external interlock connection
  • TMP compatible, no advance venting needed
  • Fast cleaning, 100X+ faster than earlier generation Evactron models
  • Non-damaging to sensitive components – no sputter etch
  • PRS can be installed on the SEM chamber or the load lock
  • Push button cleaning operation
  • No match or gas flow adjustments needed for plasma ignition
  • RoHS, CE, NRTL, TUV and SEMI S2 compliant

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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