Evactron® E50 Plasma De-Contaminators
The Evactron E50 De-Contaminators are compact, high performance yet simplified plasma cleaners for Electron and Ion Beam Instruments such as SEMs, TEMs, and FIBs. The E50 delivers high power cleaning for superior resolution and imaging plus improved detector and probe sensitivity that are compromised by contamination.
Manufacturer
Evactron Plasma Cleaning by XEI Scientific
XEI Scientific, Inc. is the recognised leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.
Key Features
- High Power Cleaning
- Compact Size Plasma Source
- Energy Efficient Plasma Generation
- "Pop" Ignition
- Touch Screen Interface
- Vacuum Safety Interlock
Evactron® E50 Plasma De-Contaminators™
The Evactron E50 Plasma De-contaminator was designed to remove hydrocarbon contamination from vacuum chambers such as SEMs, FIBs, TEMs, XPS and semiconductor equipment including CD-SEMs, ALD and EUVL. Its compact design fits all models of FIB/SEM chambers and loadlocks to provide in-situ sample cleaning. Evactron plasma cleaning shortens pumpdown time, maintains the ultimate vacuum level of your system, and increases sample throughput with powerful yet thorough contamination removal.
Evactron E50 System Specifications:
- Remote hollow cathode plasma radical source
- Desktop controller with pushbutton operation
- Android tablet with Bluetooth communication
- Library of tested recipes and options to change power, cycles, length of cleaning, etc.
- Chassis dimensions WxHxD: 17” x 3.4” x 6.7” (43 cm x 8.6 cm x 17 cm)
- RF Power: 35 – 75 Watts at 13.56 MHz RFHC
- 100-240 VAC 50/60 HZ input
- RoHS, CE, NRTL, TUV and SEMI S2 compliant
Evactron® E50 E-TC Plasma De-Contaminator™
Designed for facilities that prefer a tethered touchpad interface for programming.
Evactron® E50 E-TC Alternate Gas De-Contaminator™
The Evactron E50 E-TC Alternate Gas plasma cleaner has two configurations: an ultrahigh-purity filter (3nm pore size) version to meet the stringent requirements of the semiconductor industry SEMI F38-0699 directive and the precision filter (0.5µm pore size) version for general lab conditions. The in-line filters prevent the introduction of particulates from gas feedlines into the plasma stream. Alternate gases which have been tested include O2, CDA, Ar/ H2, Ar/O2, N2/H2, N2. The use of 100% H2 is not recommended for safety reasons.
Evactron® E50-OEM Plasma De-Contaminator™
The Evactron E50-OEM Plasma De-Contaminator was designed for OEM integration for SEM, FIB, high vacuum, and other analytical instruments. This simplified Evactron Plasma Radical Source (PRS) has a small footprint and utilises air plasma afterglow to reduce hydrocarbon contamination, delivering results quickly and efficiently.
Downloads
E50 Product Sheet
E50 Alternate Gas Configurations
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.