Evactron® E-Series Plasma De-Contaminators
Simple yet high performance cleaners for SEMs, TEMs, and FIBs. The E-Series delivers cleaning with simplicity for higher resolution and contrast imaging plus improving detector and probe sensitivity that are compromised by contamination.
Manufacturer
Evactron Plasma Cleaning by XEI Scientific
XEI Scientific, Inc. is the recognised leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.
Key Features
- High Cleaning Efficiency
- Compact Size Plasma Source
- TMP & Turbomolecular Pressure Operation
- "Pop" Ignition
- Touch Screen Interface
- Vacuum Safety Interlock
E-Series Plasma Cleaning System
The Evactron E-Series have been designed to provide a simple to operate method of effective chamber cleaning. Evactron’s EP and ES plasma decontaminators feature the classic Evactron plasma source, which uses and interior electrode, providing compact but high performance cleaning. Cleaning is fast, effective, and gentle, ensuring high-quality and artefact-free imaging and analysis results.
Easy to operate, the E-Series are controlled via touch screen interface, providing simple “one button” cleaning, as well as advanced controls for power levels, timing and cycle operations. Evactron’s E-Series are suitable for use with a range of equipment, including SEM and FIB chambers, high vacuum instruments, and sample preparation chambers.
Sample Cleaning
A build-up of hydrocarbon contamination inside instruments or on samples will degrade the quality of imaging and analysis data. Evactron’s plasma decontamination technology provides a simple and effective means of removing contamination from samples and equipment, without requiring complex processing or inducing sample damage. The Evactron technology uses RF plasma to chemically etch and remove hydrocarbons, organics and surface carbon.
Shown Left: Sample with contamination
Shown Right: Sample cleaned with Evactron®
Specifications
- Dual action cleaning by means of plasma and UV afterglow
- Energy efficient hollow cathode RF plasma
- “POP” Ignition (patent pending) at high vacuum for instant ignition
- Programmable power, cleaning time, number of cycles, recipes
- Android tablet with Bluetooth communication or RS-232 serial interface.
- Wide range pressure operation: 0.3Pa/2mTorr to 80Pa/600mTorr
- TMP compatible, no advance venting needed
- Fast cleaning, 60X+ faster than earlier generation Evactron models
- Non-damaging to sensitive components – no sputter etch
- Compact Plasma Radical Source fits on accessory-laden chambers
- Simple pushbutton cleaning operation
- No match or gas flow adjustments needed for plasma ignition or operation.
- Optional external operation hardwire interlock connection.
- 100-240 VAC 50/60 Hz input
- CE/TUV/NRTL safety certified
- RoHS Compliant
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.