EM-30AX Plus & LE Desktop Scanning Electron Microscope with EDS

EM-30AX Plus & LE Desktop Scanning Electron Microscope with EDS

Advanced, high-end features in a compact form factor. This desktop SEM features high resolution imaging and dual SE and BSE detectors. A 3-axis motorised stage is included as standard for efficient and simple operation. The EM-30AX has integrated EDS for elemental microanalysis.



COXEM manufactures and provides Scanning Electron Microscope (SEM), the most widely used platform technology in Nano- Metrology of Nano-scale. As a partner of Nano-fusion technology that changes industrial condition in 21 century, COXEM tries to provide the best quality service. SEM is the precision instrument, can be used for analysing the shapes or constituents of microstructure materials in quantitative and qualitative. SEM is an essential instrument for development of basic science and an indispensable infra for technical innovation, used in chemistry, biology, material science as well as nano-materials and nano-biology.

CN Tech are the exclusive Coxem distributor for:

United Kingdom and Republic of Ireland.

Key Features

  • Tungsten or CeB6 Filaments
  • High Resolution Imaging
  • SE & BSE Imaging
  • 3 Axis Motorised Stage XYT
  • Intuitive NanoStation Software

Ease of Use

The integrated features of the EM-30AX and COXEM's simple NanoStation operating software make ease of use guaranteed. Ideal for novice SEM users, NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings. Users can click to move around the sample via a mini-map, which provides an overall view of the sample. NanoStation's Expert mode will satisfy the most demanding advanced users with access to a full range of settings and advanced features.

The EM30AX includes a motorised 3-axis XYT sample stage as standard, making it efficient and easy to control the position of the sample while in the chamber. An optional "NavCam" can capture an image of the sample holder when loaded, allowing users to navigate the samples visually.

Imaging Capabilities

  • 5 nm resolution
  • 150,000X magnification
  • 1 - 30 kV beam energy
  • Dual SE & BSE detectors
  • Integrated EDS

Tungsten and CeB6 Electron Sources

COXEM's EM-30AX is the only desktop SEM platform available which can be configured with either a Tungsten (EM-30AX Plus) or CeB6 (EM-30AX LE) electron source. With a choice of electron source, a COXEM SEM has the flexibility to suit any application.

A tungsten filament electron source has a typical operating life of around 100 "beam on" hours, is low cost to replace, and be easily exchanged in less than 10 minutes. Tungsten filaments provide good imaging performance while remaining cost-effective.

CeB6, or Cerium hexaboride, filaments can produce a brighter image, which reduces noise and improves high resolution performance. The operating lifetime of a CeB6 filament is higher than a Tungsten, but has a much greater cost to replace. Replacing a CeB6 filament can require specialist maintenance, creating inconvenience and increasing downtime.When finding the right SEM, deciding on the best electron beam source can be difficult. To help with this, the team at CN Tech are happy to provide guidance on finding the right SEM for any application.

Backscatter Electron Detector

COXEM's EM30AX desktop SEM features dual secondary electron (SE) and backscatter electron (BSE) detectors. The 4 quadrant BSE detector can be operated in Composition mode for atomic weight contrasted images, or Topo mode for producing topographic images of flat samples.

The BSE detector integrated into the EM-40AX is retractable without disconnection, being able to pivot away to a parking position. This unique feature can only be found in COXEM desktop SEMs. Retracting the BSE detector allows for a shorter working distance when using the SE detector.

Shown Left: Imaging with the Secondary Electron (SE) Detector
Shown Right: Imaging with the Backscatter Electron (BSE) Detector

3-Axis Sample Positioning Stage

A motorised 3-axis XYT sample position stage ins included as standard with COXEM's EM-30AX. Navigating a sample is easy with the NanoStation operating software, which features a "click to move" interface. To provide easier examination of a flat sample's topography, the stage can be tilted. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting.



Panorama Mode

Combining the NanoStation operating software with a standard 3-axis motorised stage, has allowed COXEM to develop a Panorama mode. Panorama mode provides high resolution image capture for large samples. Hundreds of thousands of images can be collected across a large sample, through automatic control of the motorised stage. These images are then automatically stitched together by NanoStation, creating a single high magnification image of a large sample.


Energy Dispersive Spectroscopy (EDS) capability is fully integrated into COXEM's EM-30AX Desktop SEM. With integrated EDS Analysis, elemental and chemical analysis of samples can be performed on materials at high magnifications.

COXEM have partnered with Oxford Instruments, a leading developer of materials characterisation tools for in-situ use in electron microscopes. Oxford Instruments have produced a miniaturised form of their AZtecOne EDS technology for a desktop electron microscope, called the AZtecOneGO.

The Oxford Instruments AZtecOneGO EDS system included in the EM-30 AX consists of the intuitive AZtecOneGO software, and Oxford Instrument's reliable and accurate compact x-act Silicon Drift Detector (SDD). AZtecOneGO is the ideal solution for conducting EDS analysis as quickly and easily as possible.

With a simple, streamlined interface, AZtecOneGO is quick and easy to use, even by novice users with no advanced knowledge of the EDS technique. Features include X-ray mapping and linescanning, spectrum acquisition, and fast report generation.


Technical Specifications

Application Note

View Technical Specification


Coxem Brochure

View Brochure


Low Vacuum System

COXEM offer a Low Vacuum System for imaging non-conductive samples without coating during sample preparation. Low vacuum operation can be used to image biological samples or insulating materials in electronics. Low vacuum operation is used with the BSE detector for imaging, and is effective at low magnifications. The possible vacuum range is 100pa to 1pa. Shown Left: Imaging in High Vacuum Mode Shown Right: Imaging in Low Vacuum Mode

Cool Stage

The COXEM Cool Stage is a temperature-controlled sample stage for COXEM Scanning Electron Microscopes systems. A cool stage is used in electron microscopy to chill biological or other wet specimens, preserving surface features and improving imaging ability. Samples can be cooled to -25°C, and also heated up to 50°C. Temperature is controlled digitally.

Cool Stage Examples

Shown Left: Plant cells imaged without Cool Stage Shown Right: Plant cells imaged with Cool Stage

STEM Detector

Both full size and benchtop Scanning Electron Microscope (SEM) systems from COXEM can be expanded to support Scanning Transmission Electron Microscopy (STEM) capabilities with the COXEM STEM Detector. This allows a COXEM SEM to handle multiple imaging applications outside of standard SEM imaging tasks. COXEM's STEM Detector is mounted inside the SEM chamber, and can be retracted and tilted 90° out of the field of view to allow regular SEM functions. Support for the STEM Detector is fully integrated into the NanoStation operating software for COXEM SEMs, with the same simple and easy operation.

True TEM Detector

Most STEM modules differ from the true TEM principle, and use a platinum mirror and the SEM's SE detector to collect an image. The COXEM STEM Detector uses a true TEM detector beneath the TEM sample. The STEM Detector supports both Bright Field (BF) and Dark Field (DF) imaging.

TEM Grid Holder

A specially designed TEM grid holder is included with the STEM detector, which mounts onto the SEM stage. Up to 4 standard TEM grids can be accommodated in the holder. The holder has been designed to allow EDS analysis without the need for separate adjustment.

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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