Electron Beam Evaporator EBV 40A1

The electron beam evaporator EBV 40A1 is designed for ultra-pure sub-monolayer and multilayer MBE thin film growth.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • Manual or electro-pneumatic shutter, integrated flux monitor
  • W/Th-filament for evaporation from rod material or from small conductable crucible
  • Wide range of exchangeable exit apertures
  • Integral water cooling
  • Suitable for various materials
  • Unique high reliability design
  • Extremely high power densities
  • Extremely high power densities

Description

The precisely defined evaporant beam means highly uniform deposition on the sample, the deposition area being determined by the distance from the E-beam evaporator to the sample and the choice of one of the easily exchangeable exit apertures. The electron beam evaporator EBV 40A1 is configured with choice of manual or automatic shutter. Custom insertion length 190 – 345 mm (other on request).

Technical data

Mounting flange DN 40CF (rotatable)
Temperature range (for evaporated materials) 160 °C – 2300 °C (3300 °C for molybdenum connector)
Filament current typically 1.8 – 2.2 A, max 2.3 A
Evaporating rod diameter 2 mm standard (other on request), step 2 mm, wire feed 25 mm wire length 43 mm
Water cooling (required) water flow: > 0.5 l/min., temperature: 20-30 °C, max pressure: 6 bar
water flow: > 0.5 l/min., temperature: 20-30 °C, max pressure: 6 bar
Exit aperture diameters
set 1: ID 4, ID 6, ID 7.4 (standard) set 2: ID 10, ID 14, ID 19
Type of shutter manual or pneumatic
Power – 50 W for high vapor pressure materials
– up to 200 W for crucibles and thick wires
Energy range 1 – 1500 eV
Cathode type thoriated tungsten
Crucible type (option) Knudsen cell type made from: Mo, W, liner PBN, Al2O3
Crucibles volume 0.07 ml
Evaporated materials all typical materials according to crucible type
Others – flux regulation via ion current incl. electrode, feedthrough, display unit and PID-regulator
– rear-loading evaporant
Insertion length min. 190 mm (other on request) OD: 34.8 mm
Deposition area dependent on working distance (e.g. 6 mm for distance 25 mm – ID 4, 33 mm for distance 75 mm – ID 19)
Working distance 25 – 75 mm (optimum)
Bakeout temperature up to 250°C
Working pressure <10-5 mbar

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Options

  • Customised insertion length
  • With or without integrated manual/electro-pneumatic shutter
  • Linear shift
  • Crucibles

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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