Magnetron Source | 2-inch Targets

Magnetron source for applying thin layers with high homogeneity in the sputtering process. Intended for 2-inch diameter targets.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • With or without insitu tilt module
  • Range of mounting flanges
  • Chimney as standard
  • Pneumatic dome type or side swing shutter
  • Indirectly cooled

Description

Depending on the required conditions of the sputtering process, we offer 2 types of sources: type B & C.

All types are fully compatible with our M600DC-PS power supply as well as all other DC, RF and pulsed DC power supplies available on the market.

Source type B

The magnetron source type B is used to apply thin layers with high homogeneity in the sputtering process. Compatible with UHV conditions, the source is designed for sputtering magnetic and ferromagnetic materials, operating on up to 7 mm thick targets.
Mounting flange DN 63 CF
Max. power (DC mode) 400 W DC **
Max. power (RF mode) 400 W RF **
Max. voltage DC 1200 V
Connector DC/RF type 7/16
Target:
form ring
diameter 2″ (50.8 mm) ± 0.2 mm
thickness 1 – 7 mm (magnetic & non-magnetic)
cooling indirect
Water flow min. 1 l/min
Max. inlet water temperature < 28 °C
Max. water pressure 3 bar
Tubing diameter Ø6×1 mm PTFE
Magnet material Samarium Cobalt (SmCo)
Magnet max. temperature 350°C
Internal pneumatic shutter yes
Shutter type dome type or flat swing
Insitu tilt module yes, range +45° ÷ -10°
Chimney yes
Dedicated materials:
typical rates [nm/min] for 200 W:
Cu 32,84 nm/min ( distance: 160 mm; target thickness: 3 mm)***
Ti 10,07 nm/min (distance: 160 mm; target thickness: 3 mm)***
Fe 9,63 nm/min (distance: 160 mm; target thickness: 3 mm)***
Internal gas inlet yes (VCR standard)
Max. working pressure 5×10-3 – 1×10-1 mbar
Optimal working pressure 5×10-3 – 1×10-2 mbar
* Other mounting flanges on request
** The maximum power is determined by the target material
*** Distances depend on the geometry of the chamber and the magnetrons

Source type C

Source type C is both RF‑ and DC‑compatible and can deposit many classes of materials: conductors, semiconductors, and insulators. It enables the creation of uniform, homogeneous and small-grained thin films.
Mounting flange DN 63CF or DN 63ISO‑K for model MS2/63C1,
or DN 100CF or DN 100ISO‑K for model MS2/100C1
Max. power (DC mode) 400 W DC **
Max. power (RF mode) 400 W RF **
Max. voltage DC 1200 V
Connector DC/RF type 7/16
Target: Keeper standard
form circular
diameter 2″ (50.8 mm) ± 0.2 mm
thickness non-magnetic: 1-6 mm; magnetic: Fe 1mm, Ni 1mm
cooling indirect
Water flow min. 1 l/min
Max. inlet water temperature < 28 °C
Max. water pressure 3 bar
Tubing diameter Ø6×1 mm PTFE
Magnet material Neodymium Iron Boride (NdFeB)
Magnet max. temperature 200°C
Internal pneumatic shutter yes
Shutter type dome type or flat swing
Insitu tilt module yes, range +45° ÷ -10°
Chimney yes
Dedicated materials:
typical rates [nm/min] for 200 W:
Cu 34,70 nm/min (distance: 100 mm; target thickness: 3 mm)***
Ti 6,8 nm/min (distance: 100 mm; target thickness: 3 mm)***
Fe 32,41 nm/min (distance: 100 mm; target thickness: 1 mm)***
Internal gas inlet yes (VCR standard)
Working gas Ar
Optimal working pressure 5×10-3 – 1×10-2 mbar
* Other mounting flanges on request
** The maximum power is determined by the target material
*** Distances depend on the geometry of the chamber and the magnetrons

Options

  • Mass Flow Controller (MKS MF1)
  • Customised length
  • Z manipulator

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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