DST3-S - Sputter Only – Straight Cathodes

DST3-S - Sputter Only – Straight Cathodes

The DST3 Triple Target Sputter Coater is equipped with a large chamber (300 mm diameter) and three 2” diameter water-cooled cathodes which make it suitable for long time deposition. The magnetron desk sputter coater (magnetron sputtering) is equipped with RF and DC power supplies. It can sputter semiconductors dielectrics and metal (oxidizing [&] noble) targets (Deposition Table). The Confocal Sputter Coater is equipped with an auto adjustable matching box minimizing the reflected power in the RF Sputtering. For increasing film adhesion to the substrate and to improve the film structures a 300 V DC bias voltage can be applied to the substrate (optional).

Manufacturer

Vac Coat

Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.

Key Features

  • High Vacuum Turbomolecular pump
  • Full range vacuum gauge
  • Three 2” water-cooled sputtering cathodes
  • Large chamber (300 mm diameter) suitable for large specimen depositions
  • Target selection for multilayer thin films
  • Co-sputtering to form alloy films
  • Two quartz crystal monitoring system for real time thickness measurement (1 nm precision)
  • Manual or automatic Timed and Thickness deposition
  • Cathode selection motor
  • Sample rotation, height and tilt adjustable
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network
  • Equipped with three manual shutter
  • Equipped with rotary sample holder with the ability of tilting in direction of cathodes
  • Unlimited sputtering time without breaking vacuum
  • 500 °C substrate heater (optional)
  • 300 V DC substrate bias voltages (optional)
  • Two-years warranty

DST3-S (Straight Cathodes)

DST3-S with three straight cathodes is suitable for sputtering a single large specimen with diameter up to 20 Cm or several small specimens.

Touch Screen Control with Colorful Display

The DST3, Gold Sputter Coater, is equipped with a 7” colored touch screen and semi-automatic control and data input that can be operated by even inexperienced users. The vacuum and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Clean Vacuum

The vacuum chamber is Cylindrical Pyrex with 300 mm OD and 200 mm H. The DST3 Triple Target Sputter Coater is fitted with an internally mounted 90L/s Turbomolecular Pump backed by a 1.4 m3/h diaphragm or 4 m3/h two stage Rotary Vane Pump.

Specifications

Sputtering control Independent sputtering control rate for each cathode to produce fine grain structures
Temperature control Automatic safe control of the cathode’s temperatures to protect the life time of the magnets
Touch screen Data is rapidly registered by using fully automatic touch screen control
Mass Flow meter Two precision Mass Flow meter (MFC) for fine control of vacuum and pressure
Graphs Records and plots coating parameters graphs
Transfer Transfers curves and deposition process data by a USB port to PC
Power supply 0-1200 V, 0-500 mA DC
Utilities 220V-240V, 50/60HZ, 16A
Box Dimensions 50 Cm H x 60 Cm W x 47 Cm D
Shipping Weight 120kg (pump, rack and box)

Applications

Metal, Semiconductor and Dielectric Films

Nano [&] Microelectronic

Solar Cell applications

Co-Sputtering processes

Glad Sputtering

Optical components coating

Thin film sensors

Magnetic thin film devices

Fine grain structural deposition for SEM [&] FE-SEM sample preparation

Options

Quartz crystal sensor

Spare glass chamber

Sputtering Targets

Biasing voltage

Sealing gaskets

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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