DST1-300 – Magnetron Desk Sputter Coater
The magnetron desk sputter coater model DST1-300 is a coating system with the ability to coat semiconductors, dielectrics and metals (oxidising and non-oxidising). Uniform thin films with fine-grain sizes are formed in a fast cycle time. The large chamber DST1-300 with a 2, 3, or 4 inch magnetron, water-cooled cathode is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- Two stage rotary vane as a backing pump
- Full range vacuum gauge (Leybold)
- High precision quartz crystal thickness monitor
- DC power supply 600W
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software that can be updated via network
- Controls coating rate to achieve finer grain structures
- Manual or automatic timed and thickness sputtering
- GLAD sputtering
- Plasma cleaning
- Able to record and plot coating parameters graphs
- Equipped with electronic shutter
- Easy-to-change specimen stages (rotation stage as standard)
- Two-year warranty
Magnetron Sputter Coater
The unlimited sputtering time makes it suitable for deposition of thick layers. The system is equipped with 600W DC power supply, 300 W RF power supply (optional) with auto matching box. The system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation.
Touch Screen Control with Colourful Display
DST1-300 is equipped with a 7”coloured touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.
Clean Vacuum
The vacuum chamber is Cylindrical Pyrex with 300 mm OD and 200 mm H. The DST1-300 is fitted with an internally mounted 90 l/s turbo molecular pump, backed by a two stage rotary pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.
Specifications
| Control | Controls the rate of sputtering to achieve finer grain structure |
| Automatic | Automatically controls the power of sputtering independent of pressure |
| Two precision Mass Flow Meter (MFC) | For fine control of the vacuum pressure |
| Graphs | Able to record and plot coating parameter graphs |
| Transfer | Transfers curves and deposition process data by USB port to PC |
| Utilities | 220V-240V, 50/60HZ, 16A |
| Dimensions | 58 Cm H x 50 Cm W x 63 Cm D |
| Shipping Weight | 50kg |
Applications
Metal, Semiconductor and Dielectric Films
Nano & Microelectronic
Solar cell applications
Optical components coating
Thin film sensors
Magnetic thin film devices
Computer memory applications
Fine grain structural deposition for SEM & FE-SEM sample preparation
Downloads
DST1-300 Brochure
Options
Substrate bias voltage
RF generator and auto matching box
Substrate heater 500 C
Quartz crystal sensor
Vacuum cylindrical spare glass chamber
One source thermal evaporation system
Sputtering targets
Sealing gaskets
Related Products
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.