DST1-300 – Magnetron Desk Sputter Coater

The magnetron desk sputter coater model DST1-300 is a coating system with ability to coat semiconductors, dielectrics and metals (oxidizing and non-oxidizing). Uniform thin films with fine-grain sizes are formed in a fast cycle time. The large chamber DST1-300 with a 2, 3, or 4 inches magnetron, water-cooled cathode is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter.

Manufacturer

Vac Coat

Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centers through distributors worldwide with very good references and feedback.

Key Features

  • High vacuum turbo pump
  • Pumping Speed 90 l/s
  • 350 l/s Ultimate Pressure
  • 7 x10-6 Torr 7×10-7 Torr
  • Two stage rotary vane as a backing pum
  • Full range vacuum gauge (Leybold)
  • High precision quartz crystal thickness monitor
  • DC power supply 600W
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network
  • Controls coating rate to achieve finer grain structures
  • Manual or automatic Timed and Thickness sputtering
  • Able to record and plot coating parameters graphs
  • Equipped with electronic shutter
  • Easy-to-change specimen stages (rotation stage as standard)
  • Two-year warranty

High Vacuum, Single Magnetron Target Desk Sputter Coater

The unlimited sputtering time makes it suitable for deposition of thick layers. The system is equipped with 600W DC power supply, 300 W RF power supply (optional) with auto matching box. The system can deposit wide ranges of materials on different surfaces for thin film applications such as Micro & Nano electronic and SEM sample preparation.

Touch Screen Control with Colorful Display

DST1-300 is equipped with a 7”colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Magnetron Desk Sputter Coater Clean Vacuum

The vacuum chamber is Cylindrical Pyrex with 300 mm OD and 200 mm H. The DST1-300 is fitted with an internally mounted 90 l/s turbo molecular pump, backed by a two stage rotary pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.

Product range

Economy
SPT-20 – Ion Economy Sputter Coater
 
 
Low Vacuum
DSR – Dedicated Sputter Coater
DSR-L – Sputter Coater for Large Samples (100mm)

DCR – Dedicated Carbon Coater (Fiber or Rod)
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)

DSCR – Dual Purpose Sputter and Carbon Coater
DSCR-300 - Desk Sputter & Carbon Coater
 
 
High Vacuum
DST – Dedicated Sputter Coater
DST-L – Large Chamber, Dedicated Sputter Coater

DCT – Dedicated Carbon Coater (Fiber or Rod)
DCT-L – Large Chamber, Dedicated Carbon Coater (Fiber or Rod)

DSCT – Dual Purpose Sputter and Carbon Coater
DST1-300 – Magnetron Desk Sputter Coater

Applications

  • Metal, Semiconductor and Dielectric Films.
  • Nano & Microelectronic.
  • Solar cell applications.
  • Optical components coating.
  • Thin film sensors.
  • Magnetic thin film devices.
  • Computer memory applications.
  • Fine grain structural deposition for SEM & FE-SEM sample preparation.

Options

Substrate bias voltage

RF generator and auto matching box

Substrate heater 500 C

Quartz crystal sensor

Vacuum cylindrical spare glass chamber

One source thermal evaporation system

Sputtering targets

Sealing gaskets

Specifications

Control Controls the rate of sputtering to achieve finer grain structure
Automatic Automatically controls the power of sputtering independent of pressure
Two precision Mass Flow Meter (MFC) For fine control of the vacuum pressure
Graphs Able to record and plot coating parameter graphs
Transfer Transfers curves and deposition process data by USB port to PC
Utilities 220V-240V, 50/60HZ, 16A
Dimensions 58 Cm H x 50 Cm W x 63 Cm D
Shipping Weight 50kg

If you would like to learn more about the DST1-300 – Magnetron Desk Sputter Coater, contact our experienced technical team today. We would be happy to help you find the right profilometry solution for your needs. Contact us today!