DST-L – Dedicated Sputter Coater

The DST-L is a special version of the SCT with a larger 300mm chamber for high throughput coating of multiple metallurgical mounts and thin section slides.

Manufacturer

Vac Coat

Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.

Key Features

  • 300mm chamber for high throughput coating of multiple metallurgical mounts and thin section slides
  • High vacuum turbo pump 90 L/S (Leybold)
  • Two stage rotary vane vacuum pump as a backing pump
  • Full range vacuum gauge (Leybold)
  • ISO-KF 63 butterfly valve
  • DC power supply 80 W
  • Quartz crystal thickness monitor with precision of 1nm and resolution of 1 Å
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network
  • Controls coating rate to achieve finer grain structures
  • Manual or automatic Timed and Thickness sputtering
  • Able to record and plot coating parameters graphs
  • Equipped with electronic shutter
  • Easy-to-change specimen stages (rotation stage as standard)
  • Two-year warranty

Clean Vacuum

The 300mm vacuum chamber is Cylindrical Pyrex for high throughput coating of multiple metallurgical mounts and thin section slides. The DST-L high vacuum sputter coater is fitted with an internally mounted 90 L/s turbo molecular pump backed by a 4m3/h two stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.

Touch Screen Control

 

DST-L is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Specifications

Chamber 300mm chamber for high throughput coating of multiple metallurgical mounts and thin section slides
Ultimate Vacuum Less than 7 x10-7 Torr
Control Controls the rate of sputtering to achieve finer grain structure
Power Automatically controls the power of sputtering independent of pressure
Valve Electronic leak valve for Argon gas
Record Able to record and plot coating parameter graphs
Transfer Transfers curves and deposition process data by USB port to PC
Utilities 220V-240V, 50/60HZ- 16A
Shipping Weight 36kg

Applications

Fine grain structural deposition[nbsp] for SEM[nbsp] [&][nbsp] FE-SEM sample preparation

Nano [&] Microelectronic

Solar cell applications

Optical components coating

Thin film sensors

Options

Quartz crystal sensor

Planetary sample rotation

Spare glass chamber

Sputtering targets

Sealing gaskets

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

Get in touch to discuss your requirements

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