DST – Dedicated Sputter Coater

The DST – Dedicated Sputter Coater (DST1-170) is configured as a sputter coater suitable for Scanning Electron Microscope (SEM) sample preparation. A wide range of materials could be deposited by DST1-170 such as gold (Au), platinum / palladium (Pt / Pd) alloy, silver (Ag), chromium (Cr), tungsten (W), iridium (Ir) and etc. This high vacuum coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterization such as FE-SEM, EDS/WDS, TEM, and EBSD. With a 2” magnetron cathode, 80 W switching DC power supply, it could be used for research and different thin film applications.

Manufacturer

Vac Coat

Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centers through distributors worldwide with very good references and feedback.

Key Features

  • High vacuum turbo pump 90 L/S (Leybold)
  • Two stage rotary vane vacuum pump as a backing pump
  • Full range vacuum gauge (Leybold)
  • ISO-KF 63 butterfly valve
  • DC power supply 80 W
  • Quartz crystal thickness monitor with precision of 1nm and resolution of 1 Å
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network
  • Controls coating rate to achieve finer grain structures
  • Manual or automatic Timed and Thickness sputtering
  • Able to record and plot coating parameters graphs
  • Equipped with electronic shutter
  • Easy-to-change specimen stages (rotation stage as standard)
  • Two-year warranty

Clean Vacuum

 

The vacuum chamber is Cylindrical Pyrex. The DST1-170, high vacuum sputter coater, is fitted with an internally mounted 90 L/s turbo molecular pump, backed by a 4m3/h two stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.

Touch Screen Control

 

DST1-170 is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Product range

Economy
SPT-20 – Ion Economy Sputter Coater
 
 
Low Vacuum
DSR – Dedicated Sputter Coater
DSR-L – Sputter Coater for Large Samples (100mm)

DCR – Dedicated Carbon Coater (Fiber or Rod)
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)

DSCR – Dual Purpose Sputter and Carbon Coater
DSCR-300 - Desk Sputter & Carbon Coater
 
 
High Vacuum
DST – Dedicated Sputter Coater
DST-L – Large Chamber, Dedicated Sputter Coater

DCT – Dedicated Carbon Coater (Fiber or Rod)
DCT-L – Large Chamber, Dedicated Carbon Coater (Fiber or Rod)

DSCT – Dual Purpose Sputter and Carbon Coater
DST1-300 – Magnetron Desk Sputter Coater

Applications

  • Fine grain structural deposition  for SEM  &  FE-SEM sample preparation
  • Nano & Microelectronic
  • Solar cell applications
  • Optical components coating
  • Thin film sensors

Options

Quartz crystal sensor

Planetary sample rotation

Spare glass chamber

Sputtering targets

Sealing gaskets

Specifications

Ultimate Vacuum Less than 7 x10-7 Torr
Control Controls the rate of sputtering to achieve finer grain structure
Power Automatically controls the power of sputtering independent of pressure
Valve Electronic leak valve for Argon gas
Record Able to record and plot coating parameter graphs
Transfer Transfers curves and deposition process data by USB port to PC
Utilities 220V-240V, 50/60HZ- 16A
Shipping Weight 36kg

If you would like to learn more about the DST – Dedicated Sputter Coater, contact our experienced technical team today. We would be happy to help you find the right profilometry solution for your needs. Contact us today!