The vacuum chamber is Cylindrical Pyrex. The DST1-170, high vacuum sputter coater, is fitted with an internally mounted 90 L/s turbo molecular pump, backed by a 4m3/h two stage rotary vane pump. It introduces clean vacuum without oil contamination which normally exists with ordinary diffusion pump.
DST – Dedicated Sputter Coater
The DST – Dedicated Sputter Coater (DST1-170) is configured as a sputter coater suitable for Scanning Electron Microscope (SEM) sample preparation. A wide range of materials could be deposited by DST1-170 such as gold (Au), platinum / palladium (Pt / Pd) alloy, silver (Ag), chromium (Cr), tungsten (W), iridium (Ir) etc. This high vacuum coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high-quality characterisation such as FE-SEM, EDS/WDS, TEM, and EBSD. With a 2” magnetron cathode, 80 W switching DC power supply, it could be used for research and different thin film applications.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- High vacuum turbo pump 90 L/S (Leybold)
- Two stage rotary vane vacuum pump as a backing pump
- Full range vacuum gauge (Leybold)
- ISO-KF 63 butterfly valve
- DC power supply 80 W
- Quartz crystal thickness monitor with precision of 1nm and resolution of 1 Å
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software that can be updated via network
- Controls coating rate to achieve finer grain structures
- Manual or automatic Timed and Thickness sputtering
- Able to record and plot coating parameters graphs
- Equipped with electronic shutter
- Easy-to-change specimen stages (rotation stage as standard)
- Two-year warranty
Clean Vacuum
Touch Screen Control
DST1-170 is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.
Specifications
| Ultimate Vacuum | Less than 7 x10-7 Torr |
| Control | Controls the rate of sputtering to achieve finer grain structure |
| Power | Automatically controls the power of sputtering independent of pressure |
| Valve | Electronic leak valve for Argon gas |
| Record | Able to record and plot coating parameter graphs |
| Transfer | Transfers curves and deposition process data by USB port to PC |
| Utilities | 220V-240V, 50/60HZ- 16A |
| Shipping Weight | 36kg |
Applications
Fine grain structural deposition[nbsp] for SEM[nbsp] [&][nbsp] FE-SEM sample preparation
Nano [&] Microelectronic
Solar cell applications
Optical components coating
Thin film sensors
Options
Quartz crystal sensor
Planetary sample rotation
Spare glass chamber
Sputtering targets
Sealing gaskets
Related Products
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Brochures
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.