DSR-L – Sputter Coater for Large Samples (100mm)
The DSR-L model is a special version of the DSR1 using a 4″ diameter (100mm) target and 300mm chamber allowing uniform coating onto larger samples.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- Two-stage, direct drive 4m3/h, rotary vane pump
- 4″ diameter (100mm) target
- 300mm chamber allowing uniform coating onto larger samples
- High precision quartz crystal thickness monitor
- Electronic gas valves
- Sample rotation, height and tilt adjustable
- Equipped with electronic shutter
- Easy-to-change specimen stages (Planetary rotation or rotation stage as standard)
- Two-year warranty
- CE conformity
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software that can be updated via network
- Controls coating rate to achieve finer grain structures
- Semi-Fully automatic coating process (optional)
- Repeatable, programmable sputtering process in the automatic mode
- Manual or automatic Timed and Thickness deposition
- Able to record and plot coating parameters graphs
- Storing coating recipes for repeatable depositions
Sputter Coater Applications
The DSR-L model is a special version of the DSR1 using a 4″ diameter (100mm) target and 300mm chamber allowing uniform coating onto larger samples.
Touch Screen Control with Colorful Display
DSR-L, the desk sputter coater, is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.
Sample Holder
The DSR-L can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height, angel and can be changed easily.
The rotary planetary sample stage is a good choice for uniform coating of porous specimens.
Desk Sputter Coater Options and Accessories
- Quartz crystal sensors
- Planetary sample rotation
- Spare glass chamber
- Sputtering targets
- Sealing gaskets
Specifications
| Cylinder chamber | 100mm OD x 300 mm pyrex cylinder chamber |
| Dimensions | 45 Cm H x 50 Cm W x 37 Cm D |
| Shipping Weight | (included vacuum pump): 42Kg |
| Utilities | 220V-240V, 50/60HZ, 10A |
| Power supply | 80 Watt DC switching power supply |
| Monitor | High precision thickness monitor |
| Ultimate Vacuum | Less than 40 mTorr |
| Cathode | 2 inches magnetron cathode |
| Shutter | Electronic shutter |
| Leak valve | Electronic leak valve |
| Transfer | Transfer the curves and sputtering process data by USB port to PC |
Related Products
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.