DSR-L – Sputter Coater for Large Samples (100mm)

DSR-L – Sputter Coater for Large Samples (100mm)

The DSR-L model is a special version of the DSR1 using a 4″ diameter (100mm) target and 300mm chamber allowing uniform coating onto larger samples.

Manufacturer

Vac Coat

Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.

Key Features

  • Two-stage, direct drive 4m3/h, rotary vane pump
  • 4″ diameter (100mm) target
  • 300mm chamber allowing uniform coating onto larger samples
  • High precision quartz crystal thickness monitor
  • Electronic gas valves
  • Sample rotation, height and tilt adjustable
  • Equipped with electronic shutter
  • Easy-to-change specimen stages (Planetary rotation or rotation stage as standard)
  • Two-year warranty
  • CE conformity
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network
  • Controls coating rate to achieve finer grain structures
  • Semi-Fully automatic coating process (optional)
  • Repeatable, programmable sputtering process in the automatic mode
  • Manual or automatic Timed and Thickness deposition
  • Able to record and plot coating parameters graphs
  • Storing coating recipes for repeatable depositions

Sputter Coater Applications

The DSR-L model is a special version of the DSR1 using a 4″ diameter (100mm) target and 300mm chamber allowing uniform coating onto larger samples.

Touch Screen Control with Colorful Display

DSR-L, the desk sputter coater, is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Sample Holder

The DSR-L can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height, angel and can be changed easily.

The rotary planetary sample stage is a good choice for uniform coating of porous specimens.

Desk Sputter Coater Options and Accessories

  • Quartz crystal sensors
  • Planetary sample rotation
  • Spare glass chamber
  • Sputtering targets
  • Sealing gaskets

Specifications

Cylinder chamber 100mm OD x 300 mm pyrex cylinder chamber
Dimensions 45 Cm H x 50 Cm W x 37 Cm D
Shipping Weight (included vacuum pump): 42Kg
Utilities 220V-240V, 50/60HZ, 10A
Power supply 80 Watt DC switching power supply
Monitor High precision thickness monitor
Ultimate Vacuum Less than 40 mTorr
Cathode 2 inches magnetron cathode
Shutter Electronic shutter
Leak valve Electronic leak valve
Transfer Transfer the curves and sputtering process data by USB port to PC

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

Get in touch to discuss your requirements

Make an enquiry

Download PDF

Please calculate 4 plus 7.

Thank you

A download link has been sent to the e-mail address you provided.