DSR – Dedicated Sputter Coater

The Desk SEM Coater model DSR is a compact coating system able to coat noble metals such as gold (Au) palladium (Pd) platinum (Pt) and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive specimens. Uniform thin films with fine-grain sizes are formed in a fast cycle time. The produced thin film is suitable for scanning electron microscopy (SEM) analysis. The Desk Magnetron Sputter Coater (DSR1) is a high productivity tool that delivers consistent and highly repeatable results in the fully automated system. The ergonomic design and small footprint of the DSR1 SEM coating system allows easy use of the system.

Manufacturer

Vac Coat

Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centers through distributors worldwide with very good references and feedback.

Key Features

  • Two-stage, direct drive 4m3/h
  • High precision quartz crystal thickness monitor
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software that can be updated via network
  • Control coating rate to achieve finer grain structures
  • Manual or automatic Timed and Thickness sputtering
  • Easy-to-change specimen stages (Planetary rotation or rotation stage as standard)
  • Two-year warranty
  • CE conformity

Sputter Coater Applications

The DSR is a Scanning Electron Microscope (SEM) sample preparation system, SEM coater equipped with a rotary pump to achieve vacuum less than 50 mTorr which is a suitable vacuum range for noble metals sputter coating.

Touch Screen Control with Colorful Display

DSR, the desk sputter coater, is equipped with a 7” colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Sample Holder

The DSR can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height, angel and can be changed easily.

The rotary planetary sample stage is a good choice for uniform coating of porous specimens.

Desk Sputter Coater Options and Accessories

  • Quartz crystal sensors
  • Planetary sample rotation
  • Spare glass chamber
  • Sputtering targets
  • Sealing gaskets

Product range

Economy
SPT-20 – Ion Economy Sputter Coater
 
 
Low Vacuum
DSR – Dedicated Sputter Coater
DSR-L – Sputter Coater for Large Samples (100mm)

DCR – Dedicated Carbon Coater (Fiber or Rod)
DCR-L – Carbon Coater for Large or Multiple Samples (100mm)

DSCR – Dual Purpose Sputter and Carbon Coater
DSCR-300 - Desk Sputter & Carbon Coater
 
 
High Vacuum
DST – Dedicated Sputter Coater
DST-L – Large Chamber, Dedicated Sputter Coater

DCT – Dedicated Carbon Coater (Fiber or Rod)
DCT-L – Large Chamber, Dedicated Carbon Coater (Fiber or Rod)

DSCT – Dual Purpose Sputter and Carbon Coater
DST1-300 – Magnetron Desk Sputter Coater

Specifications

Cylinder chamber 170 mm OD x 140 mm pyrex cylinder chamber
Dimensions 45 Cm H x 50 Cm W x 37 Cm D
Shipping Weight (included vacuum pump): 42Kg
Utilities 220V-240V, 50/60HZ, 10A
Power supply 80 Watt DC switching power supply
Monitor High precision thickness monitor
Ultimate Vacuum Less than 40 mTorr
Cathode 2 inches magnetron cathode
Shutter Electronic shutter
Leak valve Electronic leak valve
Transfer Transfer the curves and sputtering process data by USB port to PC

If you would like to learn more about the DSR1 – Dedicated Sputter Coater, contact our experienced technical team today. We would be happy to help you find the right profilometry solution for your needs. Contact us today!