DSCR-300 - Desk Sputter & Carbon Coater

The large chamber DSCR-300, Desk Sputter and Carbon Coater, with 3 or 4 inch water-cooled magnetron cathodes is a compact coating system for both sputter and carbon coating. This system is suitable for coating large specimens with diameters of up to 12 cm using a 3” magnetron and 15 cm using a 4” magnetron, or multiple smaller specimens over a similar diameter. The water-cooled magnetrons allow prolonged sputtering time, making it suitable for deposition of thick and thin layers.

Manufacturer

Vac Coat

Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.

Key Features

  • Two-stage, direct drive rotary vane pump 6 m3/h
  • DC power supply 80 W
  • Quartz crystal thickness monitor with precision of 1nm and resolution of 1 Å
  • One 2-inch magnetron cathode
  • Automatic venting valve
  • Sample rotation, height and tilt adjustable
  • Electronic shutter
  • Easy-to-change specimen stages (rotation stage as standard)
  • Planetary sample rotation (optional)
  • Full-range vacuum gauge (Leybold)
  • No cooling system is required for short-term thin layer deposition
  • Two-year warranty
  • CE conformity
  • Full-Semi automatic sputtering
  • Full-Semi automatic carbon coating
  • Intuitive touch screen to control the coating process and rapid data input
  • User friendly software, updatable via network
  • Controls coating rate to achieve finer grain structures
  • Repeatable, programmable sputtering process in the automatic mode
  • Manual or automatic Timed and Thickness deposition
  • Carbon coating in both flash and pulse mode
  • Records and plots coating parameters graphs
  • Storing coating recipes for repeatable depositions

Desk Sputter and Carbon Coater

With Desk Coater model DSCR-300 one can deposit on different substrates for thin film applications such as Micro & Nano electronic and SEM sample preparation. It is also capable to sputter noble metals (Deposition Material Table) such as gold (Au) palladium (Pd) platinum (Pt) and gold/palladium (Au/Pd) on non-conductive or poorly conductive specimens. In addition the DSCR-300 system is capable to coat carbon films.

Please note that to sputter oxidizing metals, a turbomolecular pump is required to be installed to the DSCT-300 system.

The DSCR is a rotary pumped coater configured for DC sputtering and carbon fibre coating (thread) with interchangeable heads in one instrument.

Touch Screen Control with Colourful Display

The DSCR-300 is equipped with a 7” coloured touch screen and full automatic control and data input. The vacuum current and deposition information is shown as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.

Sample Stages

The DSCR-300 can be equipped with different sample stage configurations up to 15 cm, depending on the user requirements. The sample stages are rotatable with adjustable height and can be changed easily.

Carbon Coating Head

The device is equipped with an interchangeable head to carbon coating purpose. The ability of loading three carbon fibres with diameter of 0.8 mm, allows coating carbon layer on large samples for EDX.

SEM Sample Preparation

Using SEM (Scanning Electron Microscope) to observe non-conductive or poorly conductive specimens by SEM preparation step before SEM microscopy. Sputtering Deposition and Carbon Evaporation are standard mechanisms to sample preparation for electron microscopy. The full automation option allows easy use of the system even for beginners.

Specifications

Pyrex cylinder chamber 300 mm OD x 150 mm pyrex cylinder chamber
Dimensions 58 Cm H x 50 Cm W x 63 Cm D
Cathode 3 or 4 inches magnetron cathode
Shipping Weight 42Kg
Utilities 220V-240V, 50/60HZ, 10A
Power supply 200 Watt DC switching power supply
Ultimate Vacuum Ultimate Vacuum: Less than 5*10-2 Torr
Transfer Transfer the curves and sputtering process data by USB port to PC
Pump Two-stage, direct drive 12 m3/h, rotary vane pump
Gauge Thermocouple vacuum gauge
Monitor Quartz crystal thickness monitor with precision of 1nm
Valve Automatic venting valve
Vacuum pump weight 20 Kg

Applications

Fine grain structural deposition of Nobel metals for SEM & FE-SEM, EDX, and TEM sample preparation.

Conductive layers

Options

Quartz crystal sensor

Spare glass vacuum chamber

Sputtering targets

Sealing gaskets

Carbon rod evaporation head

High current power supply for carbon rod

Carbon fibre

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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