Differentially Pumped Rotary Feedthroughs

Provides 360° of continuous rotary freedom through the vacuum wall of a UHV system



Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.


The feedthrough has two stages of differential pumping isolated by graphite-impregnated, expanded viton seals on special sealing surfaces. A pre-loaded ball bearing set accurately controls the rotating stage position. The feedthroughs are equipped with worm drive providing fine angle adjustment. They are available with an anti-backlash stepper motor. Different motors or motor control systems available (stepper motors, servomotors, IcePAP).

Technical data

Base flange DN 40CF, DN 63CF, DN 100CF, DN 160CF
R1 rotation control handwheel / stepper motor (option)
Resolution (manual/motorised/external optical encoder) 1° / 0.1° / 0.05°
Bakeout temperature up to 150 °C
Base flange ID [mm] distance L [mm]
DN 40CF 41 35.2
DN 63CF 66 48
DN 100CF 103 47
DN160CF 153.1 44


The differentially pumped rotary feedthrough can be combined with manipulators and any other precision positioning devices.



Manipulators and Transferring Systems Brochure

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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