Deposition Process Controller DPC10

New electronic unit for deposition process controlling. Operates two independent sources/chambers at the same time.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • Designed for deposition process automation
  • Two independent process loops
  • Easily operated recipe editor with graphical interface
  • Works with any voltage controlled (via analogue interface) deposition source power supply
  • Controls evaporation rate and thickness
  • Controls substrate heating process
  • Equipped with fast CPU & 7” touchscreeen display
  • Favourites list of frequently used materials
  • 2D real time chart module

Description

The DPC10 Deposition Process Controller is an advanced and complete electronic device designed for the physical vapour deposition process controlling. DPC10 monitors and controls the rate and thickness of thin film deposition. The rate and thickness of the deposition are calculated from the frequency change of the quartz placed in the process chamber. A user-programmed device can control the deposition process in a precise and repeatable manner. User interacts with unit via front panel touchscreen by selecting/entering parameters defining the process. The device executes any recipe created by the user with a graphical editor. In addition, DPC10 works with any voltage controlled deposition source power supply (via analogue interface) and can control substrate heating process. The complete system consists of a DPC10 main electronic unit, a vacuum gauge and TM13/14 thickness monitor for each quartz crystal.

Technical data

Supply voltage 100-240 VAC, 50/60 Hz (power consumption max 43 W)
Inputs 2 analog inputs (0-10V)
12 digital inputs
Outputs 6 analog outputs (0-10V)
16 digital outputs
Supported thickness monitors TM13: 0.1 Hz | TM14: 0.01 Hz
Thickness 0 – 9999000 Å
Rate 0 – 9999 Å/s
Frequency range 2-6 MHz
Thickness resolution TM13: 0.1 Å | TM14: 0.01 Å
Rate resolution TM13: 0.1 Å/s | TM14: 0.01 Å/s
Frequency stability TM13: 0.5 ppm | TM14: 0.5 ppm
Tooling factor 1 – 400%
Measurement units Å, kÅ, nm
Measurement period 100 ms – 2 s (depend on TM type)
Shutter control manual, time, thickness
Shutter time 1 – 1000000 s
Supported active gauges CTR90, TTR91, TTR211, PTR225, PKR251/360/361, PCR280, TPR280/281, PTR90,
ITR90, ITR100, Baratron, ANALOG IN, PG105, ATMION, IKR360/361
Measurement units mbar, Pa, Torr, Psia
Communication interface RS232/485, Ethernet
User interface 7″ TFT display with touchscreen
Interface language English
Dimensions 212.6 x 128.4 x 266.1 mm (W x H x D)
Weight (approx.) 2.1 kg

Downloads

Brochures

DPC10 Brochure

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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