Deposition Chambers

Deposition process chambers are designed for various applications to coat thin films, develop new materials, or create technologies.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • Numerous UHV Ports
  • Different types of deposition sources and instruments
  • Precision Manipulator
  • Bottom cluster flange of the process chamber can be exchangeable

Description

They typically have numerous UHV ports (of various standard sizes) for the connection of various types of deposition and measuring instrumentation. They are designed typically for base pressures between 1×10-6 mbar and 1×10-11 mbar. Fabrication is from mu-metal (B<0,5μT inside) or stainless steel as required. Our standard versatile analytical chambers provide enough ports and facilities for most current and future requirements but we will also be happy to fabricate to your individual specifications.

Deposition chambers are typically equipped with:

  • Different types of deposition sources and instruments, including electron beam evaporators, effusion cells, magnetron sources, thermal evaporation sources, quartz oscillators, and many others
  • Precision manipulator
  • Pumping system (TMP, TSP with cryocooling, Ion)
  • Viewports
  • Pressure gauges

The process chamber can be equipped with a half/full LN2, cooled shield (cryo-shroud), an additional shield against contamination (replaceable liner) and source separation against cross-contamination (cryo-panel).

The bottom cluster flange of the process chamber can be exchangeable using a specially designed lifting trolley.

One versatile trolley can be used to replace both the bottom flange, cryo-panel, and liner (for easy cleaning). Thanks to the possibility of replacing the bottom flange with sources, one deposition chamber can be adapted to different applications.

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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