D-Surface View

D-Surface View is intended to analyse flat surfaces up to 300mm in diameter. The equipment can be used for wafer surface quality control and it qualifies surface roughness, shape, flatness and topography in one single measurement of a bare or processed wafer.

Manufacturer

DIP-View


DIP-View is a pioneer in high resolution deflectometry to measure and analyse critical surfaces for Off-Line quality control and In-Line inspection applications.    

DIP-View is addressing multiple segments of the industrial markets (Automotive, Semi-conductors, Optics, etc.).

Key Features

  • Vertical dynamic range 1 nm to 1mm
  • Field of view up to 300mm
  • Lateral resolution down to 10um
  • Full diameter measurement of the sample without stitching 1 shot measurement
  • Easy-to-use software interface

Offline Analysis Software

The D-Surface view has very high resolution performances which bring fast, reliable and highly sensitive solutions particularly adapted to off-line or in-line, surface local / global inspections in multiple industries.

The offline analysis software includes:

  • 2D and 3D step heights with cursors and histography analysis
  • 2D profiles and 3D views of the measurements
  • 2D and 3D roughness and waviness analysis
  • 2D and 3D filtering and levelling techniques
  • Thin film stress and sample bow calculation

Waviness Measurement

D-Surface View provides a full surface waviness measurement in one single acquisition. Users can extract critical parameters such as Bow, Warp, TTv and LTv in just a few seconds.

Roughness measurement

D-Surface View can explore roughness characteristics and detect polishing inhomogeneities or other nanometer height defects. With powerful fourrier transform filters, users can visualise short frequency and high frequency defect patterns.

Large range of measurement

In one single image and pure static acquisition, D-Surface View can extract from mm level down to nm level in a few seconds. Users can explore the full field image at the required resolution.

Industries

  • Universities, research labs and institutes
  • Semiconductor and compound semiconductor
  • LED manufacturing
  • Solar
  • Data storage
  • Automotive
  • Medical devices

And more: Contact us with your requirements

Product Comparison

D-Surface View 100 D-Surface View 200 D-Surface View 300
Measuring surface 100 x 100 mm2 (flat object) 200 x 200 mm2 (flat object) 300 x 300 mm2 (flat object)
Out of plane tolerance +/- 1mm +/- 2mm +/- 3-4mm
Lateral resolution 22 μm 44 μm 66 μm
Vertical resolution <1 nm 1-2 nm 2 nm
Measurement time typ. 1 sec typ. 1 sec typ. 1 sec
Repeatability <0,05 nm rms <0,05 nm rms <0,05 nm rms
Cameras 20 MPixels 20 MPixels 20 MPixels
Outer dimensions W X H X D 400 × 300 × 300 mm3 450 × 600 × 400 mm3 500 × 900 × 500 mm3

Applications

Texture: Roughness and Waviness

Measure 2D and 3D texture while quantifying the sample’s roughness and waviness. Distinguish between roughness and waviness components using software filters.

Form: Bow and Shape

Measure the 2D shape or bow of a surface. Quantify the height and radius of curved structures, such as a lens.

Defect Analysis

Measure the topography of defects, such as the depth of a scratch.

Thin Film Stress

Measure 2D stress induced during the manufacture of semiconductor or compound semiconductor devices having multiple process layers.

 

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

Get in touch to discuss your requirements

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