CX-200 Plus Scanning Electron Microscope

CX-200 Plus Scanning Electron Microscope

High performance in a compact size, at an attractive price. This full size SEM features high resolution imaging, and SE and BSE detectors. With a 5-axis motorised stage and chamber view camera as standard, the CX-200 Plus is easy to use. Analytical options include EDS, EBSD and CL detectors.



COXEM manufactures and provides Scanning Electron Microscope (SEM), the most widely used platform technology in Nano- Metrology of Nano-scale. As a partner of Nano-fusion technology that changes industrial condition in 21 century, COXEM tries to provide the best quality service. SEM is the precision instrument, can be used for analysing the shapes or constituents of microstructure materials in quantitative and qualitative. SEM is an essential instrument for development of basic science and an indispensable infra for technical innovation, used in chemistry, biology, material science as well as nano-materials and nano-biology.

CN Tech are the exclusive Coxem distributor for:

United Kingdom and Republic of Ireland.

Key Features

  • High Resolution Imaging
  • SE & BSE Imaging Detectors
  • Chamber View Camera
  • 5 Axis Motorised Stage XYZRT
  • EDS, WDS, EBSD & CL Options
  • Intuitive NanoStation Software

Ease of Use

Ease of use is guaranteed with COXEM's NanoStation operating software, and the integrated features of the CX-200 Plus SEM. NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings, which is ideal for novice SEM users. A mini-map provides an overall view of the sample, and users can click to move around the sample. Advanced users can use NanoStation's Expert mode to access more advanced functionality.

The CX-200 Plus includes an integrated chamber camera and a motorised 5-axis sample stage as standard, so it is quick and easy to control and view the position of the sample while in the chamber.

Imaging Capabilities

  • 3 nm resolution
  • 300,000X magnification
  • 1 - 30 kV beam energy
  • SE and BSE detectors

5-Axis Sample Positioning Stage

A motorised 5-axis XYZRT sample positioning stage is included as standard with the COXEM CX-200 Plus. With COXEM's NanoStation operating software, users can navigate the sample with an intuitive "click to move" interface. The stage can be tilted, allowing for easier examination of the topography of flat samples. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting. Large samples up to 160mm are supported, and observable area is 110mm.

Panorama Mode

Combining the NanoStation operating software with a standard 3-axis motorised stage, has allowed COXEM to develop a Panorama mode. Panorama mode provides high resolution image capture for large samples. Hundreds of thousands of images can be collected across a large sample, through automatic control of the motorised stage. These images are then automatically stitched together by NanoStation, creating a single high magnification image of a large sample.

10 Accessory Ports

The CX-200 Plus chamber has 10 Accessory Ports for expanding the electron microscope with upgrades and accessories from COXEM and third parties. Some of the ports are used by default by the SEM's standard components. There are ports specifically designed for EDS and EBSD upgrades, and for the COXEM cooling stage and STEM detector.

Analytical Options

A variety of analytical options are available for the CX-200 Plus. Upgrades for EDS and WDS elemental micro-analysis, EBSD micro-structure crystalline analysis, and CL internal structure analysis.


Magnification 15x to 300,000x
Spatial Resolution <3nm at 30kV
Vacuum Mode High vacuum
Acceleration Voltage 1 - 30kV (adjustable in 1kV scale)
Electron Source Tungsten Filament
Detector SED(DP),BSED(DP)
Sample Size 160mm in Diameter
X,Y/ Z/ T Traverse R 0-60 mm / 5-60mm/ -20 - 90º
Automation Focus, Filament, Brightness/Contrast
Dimensions (W × L × H) 640(W) x 682(L) x 1430(H) mm
Weight 230kg
Data output format JPG, TIFF, BMP
Options STEM
Cool Stage
Panorama 2.0
EDS (Oxford, Bruker)


Technical Specifications

Application Note

View Technical Specification


Coxem Brochure

View Brochure

CX-200 Plus Scanning Electron Microscope Brochure

View Brochure


Low Vacuum System

COXEM offer a Low Vacuum System for imaging non-conductive samples without coating during sample preparation. Low vacuum operation can be used to image biological samples or insulating materials in electronics. Low vacuum operation is used with the BSE detector for imaging, and is effective at low magnifications. The possible vacuum range is 100pa to 1pa. Shown Left: Imaging in High Vacuum Mode Shown Right: Imaging in Low Vacuum Mode

Cool Stage

The COXEM Cool Stage is a temperature-controlled sample stage for COXEM Scanning Electron Microscopes systems. A cool stage is used in electron microscopy to chill biological or other wet specimens, preserving surface features and improving imaging ability. Samples can be cooled to -25°C, and also heated up to 50°C. Temperature is controlled digitally.

Cool Stage Examples

Shown Left: Plant cells imaged without Cool Stage Shown Right: Plant cells imaged with Cool Stage

STEM Detector

Both full size and benchtop Scanning Electron Microscope (SEM) systems from COXEM can be expanded to support Scanning Transmission Electron Microscopy (STEM) capabilities with the COXEM STEM Detector. This allows a COXEM SEM to handle multiple imaging applications outside of standard SEM imaging tasks. COXEM's STEM Detector is mounted inside the SEM chamber, and can be retracted and tilted 90° out of the field of view to allow regular SEM functions. Support for the STEM Detector is fully integrated into the NanoStation operating software for COXEM SEMs, with the same simple and easy operation.

True TEM Detector

Most STEM modules differ from the true TEM principle, and use a platinum mirror and the SEM's SE detector to collect an image. The COXEM STEM Detector uses a true TEM detector beneath the TEM sample. The STEM Detector supports both Bright Field (BF) and Dark Field (DF) imaging.

TEM Grid Holder

A specially designed TEM grid holder is included with the STEM detector, which mounts onto the SEM stage. Up to 4 standard TEM grids can be accommodated in the holder. The holder has been designed to allow EDS analysis without the need for separate adjustment.

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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