CMP Tester CP-5000
CMP R&D Polisher with Controlled Polishing for Effective Process Development and Polishing Materials Testing. Advance process and product development with our CMP R&D polisher. We optimized product development by providing several polishing processes on one platform. This includes a wide speed range, closed-loop downforce control, versatile wafer holders, and automatic slurry delivery system. Additionally, the CMP tester monitors several in-line signals during the polishing process. Besides polishing wafers & substrates, the tester comes with an in-line surface profilometer. This combination provides information on how the surface, friction, and wear changed. As well as, why imperfections occur.
Rtec Instruments develops and manufactures advanced mechanical and surface testing and measurement solutions for research and industrial applications. We specialize in combining techniques that provide a unique perspective in material testing. Our testers include tribometer, profilometer, scratch tester, high-temperature indenter, and corrosion testers. Furthermore, our testers provide the most robust and versatile platform in the market for testing friction, wear, adhesion, hardness, roughness, and film thickness from nano to macro-scale.
- Real Time Coefficient of Friction
- Controlled Down Force and Speed
- Integrated 3D profilometer
- Several wafer sizes can be mounted
- In-line Temperature and Acoustic Emission to study process
Patented Integrated In-line 3D Profilometer
Characterize pad surface with nm resolution. The profiler comes with confocal, interferometer, dark field, and bright field modes. The tester provides automatic stitching across large surface areas. Essential for volume wear and roughness calculations.
Pad 1 Surface
Pad 2 Complete Bump Feature
3D Surface Change vs Test Runs
Unmatched Load Cell Technology and Speed
During the polishing process high resolution in-line force measurements quantify interfacial interactions. To optimize the process the CP-6 provides full control of down force. This includes speed and flow rates based on customized test protocols.