Beam flux monitor

The Beam Flux Monitor enables measurement of the beam equivalent pressure (BEP) in MBE applications.



Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • BEP measurement
  • Ion current measurement [nA units]


It is typically mounted on a linear shift/z-stage to allow the filament to be positioned near to the substrate and includes a protection shield when in the standby position.

Readouts and full control (device status, Z-axis shift) are provided by dedicated software application and Ion Multi Gauge Controller. Application can be integrated with Synthesium – advanced deposition software tool.

Technical data

Mounting flange DN 63CF (non-rotatable)
Measurement system Bayard-Alpert ion gauge
Measurement range 10-3 to 2×10-11 Torr
Linear stroke 150 mm (other on request)
Max. outer diameter 63 mm
Filament dual filament, ytrium coated iridium
Controller 3 channel MG15 – communication interface: RS232/485, Ethernet, PROFINET (option – specify at order)
Bakeout temperature up to 200 °C



Instruments with Electronics Brochure

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  • Motorisation
  • Customised insertion length

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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