AZtecLive & ULTIM Extreme EDS System

ULTIM Extreme provides the ultimate spatial resolution and low energy performance for in-situ EDS. Optimised for imaging and EDS in ultra-high resolution FEG-SEMs, ULTIM Extreme provides high resolution and low energy materials characterisation.


Oxford Instruments

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Key Features

  • Live Imaging & X-Ray Mapping
  • Live Sample Tracing
  • Live Element Identification
  • High Resolution & Sensitivity SDD

Oxford Instruments AZtecLive

The AZtecLive & ULTIM Extreme Energy Dispersive Spectroscopy (EDS) System from Oxford Instruments provides the ultimate in spatial resolution and low energy performance. Optimised for imaging and in-situ EDS in ultra-high resolution FEG-SEM systems, ULTIM Extreme provides EDS resolution approaching SEM resolutions.

A key technique for chemical and elemental analysis, AZtecLive and ULTIM Extreme makes Energy-Dispersive X-ray Spectroscopy (EDS, EDX or EDXS) faster and more accurate than any other EDS solution. AZtecLive provide live chemical imaging alongside conventional imaging from electron microscopy.

The unique windowless design of the ULTIM Extreme maximises sensitivity, allowing for materials characterisation at sub 1kV low energies. Detection is also improved for light elements such as lithium, nitrogen and oxygen.

Oxford Instrument's AZtecLive software makes real time chemical X-ray imaging possible, allowing users to see elemental distribution in real time. Navigating a sample and locating areas of interest is easy and fast with AZtecLive.

Oxford Instrument's have designed the AZtecLive & ULTIM Extreme EDS system to have full integration with COXEM SEM system. With the COXEM CX-200 Plus Scanning Electron Microscope, AZtecLive and ULTIM Extreme EDS is available as an analytical option.

Live Imaging and X-Ray Mapping

AZtecLive combines the live electron imaging of a SEM with live chemical imaging. Users can navigate a sample's elemental composition in real time, to quickly find features of interest. When a feature has been found, AZtecLive will automatically transition from live imaging to full resolution imaging and mapping for analysis.

Live Trace

A user's path navigated around a sample is automatically recorded by AZtecLive, including the location of detected elements. Users can easily return to areas of interest from the AZtecLive interface, making it simple to return to interesting features. Hot spots of elements can be highlighted across the sample.

Live Element Identification

With Oxford Instrument's unique Tru-Q technology, AZtecLive provides enhanced detail in EDS analysis. Tru-Q automatically detects and identifies elements, improving efficiency and quantified results. The element spectrum is updated in real time in AZtecLive.

ULTIM Max Silicon Drift Detector

  • High Resolution and Sensitivity
  • Ultimate Spatial Resolution
  • Low kV Materials Characterisation
  • Improved Light Element Sensitivity

The ULTIM Extreme SDD from Oxford Instruments has been designed for unrivalled high resolution and high sensitivity performance. ULTIM Extreme truly provides the ultimate in spatial resolution and low energy capabilities for EDS.

ULTIM Extreme's geometry provides for a shorter working distance, and the windowless construction grants 10-30x higher sensitivity compared to other sensors. The Extreme electronics developed by Oxford Instruments further boost the SDD's sensitivity.

The ultimate in spatial resolution is possible with ULTIM Extreme, with sub 10nm element characterisation, approaching SEM resolution.

When very low energy electron microscopy is required, ULTIM Extreme provides low kV materials characterisation. This enhances signal contrast, reduces sample damage and reduces charging.

With a special electron trap, and windowless operation, ULTIM Extreme can achieve extreme light element sensitivity. Up to a 3x increase in signal over conventional SDD systems is possible for light elements such as lithium, nitrogen and oxygen.

Product range

AZtecOneGO EDS System for COXEM Table Top SEMs
AZtecOne & x-act EDS System
AZtecLive & ULTIM Max EDS System
AZtecLive & ULTIM Extreme EDS System
AZtecHKL and Symmetry EBSD System
INCA WAVE & INCAEnergy+ WDS System


AZtecLive & ULTIM Extreme EDS System Brochure

AZtecLive & ULTIM Extreme EDS System Brochure

Do you need further information about Oxford Instrument’s ULTIM Extreme? Our knowledgeable technical team would be happy to help you find the right materials analysis solution for your needs. Contact us today and find out more. Contact us today!