AZtecLive & ULTIM Extreme EDS System

ULTIM Extreme provides the ultimate spatial resolution and low energy performance for in-situ EDS. Optimised for imaging and EDS in ultra-high resolution FEG-SEMs, ULTIM Extreme provides high resolution and low energy materials characterisation.


Oxford Instruments

Oxford Instruments plc is a leading provider of high technology products and services to the world's leading industrial companies and scientific research communities. Our core purpose is to support our customers to address some of the world's most pressing challenges, enabling a greener economy, increased connectivity, improved health and leaps in scientific understanding. We are proud to be recognised as the leaders in what we do and for the difference we make in the world.

Key Features

  • Live Imaging & X-Ray Mapping
  • Live Sample Tracing
  • Live Element Identification
  • High Resolution & Sensitivity SDD

Oxford Instruments AZtecLive

The AZtecLive & ULTIM Extreme Energy Dispersive Spectroscopy (EDS) System from Oxford Instruments provides the ultimate in spatial resolution and low energy performance. Optimised for imaging and in-situ EDS in ultra-high resolution FEG-SEM systems, ULTIM Extreme provides EDS resolution approaching SEM resolutions.

A key technique for chemical and elemental analysis, AZtecLive and ULTIM Extreme makes Energy-Dispersive X-ray Spectroscopy (EDS, EDX or EDXS) faster and more accurate than any other EDS solution. AZtecLive provide live chemical imaging alongside conventional imaging from electron microscopy.

The unique windowless design of the ULTIM Extreme maximises sensitivity, allowing for materials characterisation at sub 1kV low energies. Detection is also improved for light elements such as lithium, nitrogen and oxygen.

Oxford Instrument's AZtecLive software makes real time chemical X-ray imaging possible, allowing users to see elemental distribution in real time. Navigating a sample and locating areas of interest is easy and fast with AZtecLive.

Oxford Instrument's have designed the AZtecLive & ULTIM Extreme EDS system to have full integration with COXEM SEM system. With the COXEM CX-200 Plus Scanning Electron Microscope, AZtecLive and ULTIM Extreme EDS is available as an analytical option.

Live Imaging and X-Ray Mapping

AZtecLive combines the live electron imaging of a SEM with live chemical imaging. Users can navigate a sample's elemental composition in real time, to quickly find features of interest. When a feature has been found, AZtecLive will automatically transition from live imaging to full resolution imaging and mapping for analysis.

Live Trace

A user's path navigated around a sample is automatically recorded by AZtecLive, including the location of detected elements. Users can easily return to areas of interest from the AZtecLive interface, making it simple to return to interesting features. Hot spots of elements can be highlighted across the sample.

Live Element Identification

With Oxford Instrument's unique Tru-Q technology, AZtecLive provides enhanced detail in EDS analysis. Tru-Q automatically detects and identifies elements, improving efficiency and quantified results. The element spectrum is updated in real time in AZtecLive.

ULTIM Max Silicon Drift Detector

  • High Resolution and Sensitivity
  • Ultimate Spatial Resolution
  • Low kV Materials Characterisation
  • Improved Light Element Sensitivity

The ULTIM Extreme SDD from Oxford Instruments has been designed for unrivalled high resolution and high sensitivity performance. ULTIM Extreme truly provides the ultimate in spatial resolution and low energy capabilities for EDS.

ULTIM Extreme's geometry provides for a shorter working distance, and the windowless construction grants 10-30x higher sensitivity compared to other sensors. The Extreme electronics developed by Oxford Instruments further boost the SDD's sensitivity.

The ultimate in spatial resolution is possible with ULTIM Extreme, with sub 10nm element characterisation, approaching SEM resolution.

When very low energy electron microscopy is required, ULTIM Extreme provides low kV materials characterisation. This enhances signal contrast, reduces sample damage and reduces charging.

With a special electron trap, and windowless operation, ULTIM Extreme can achieve extreme light element sensitivity. Up to a 3x increase in signal over conventional SDD systems is possible for light elements such as lithium, nitrogen and oxygen.



AZtecLive & ULTIM Extreme EDS System Brochure

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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