Alpha-Step® D-600 Stylus Profiler

High resolution 2D & 3D profiling, with the highest vertical range of 1200μm, sub-Angstrom resolution and low force (0.003 to 15mg) as standard. Cutting-edge optical lever sensor technology provides accurate and reliable results. The D-600 includes a motorized stage with a 200mm sample chuck and advanced optics with enhanced video controls.

Manufacturer

KLA

A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.

 

Key Features

  • Highest Vertical Range at 1200μm
  • Low Force Measurements at 0.03 to 15mg
  • Step Height Repeatability of 5Å on a 1μm step
  • Video: 5MP high-resolution color camera
  • Keystone Correction: Removes distortion due to side view optics
  • 200mm Motorised XY Stage
  • Optical Lever Sensor
  • Arc Correction: Removes error due to arc motion of the stylus
  • Software: User friendly software interface

Flexible & Accurate Surface Measurement

The Alpha-Step® D-600 Stylus Profiler provides unparalleled flexibility and accuracy in surface measurement. 2D & 3D measurement of step height and roughness are supported, as well as 2D bow and stress. By utilising state of the art optical lever sensor technology, KLA are able to provide a wide vertical range, and low force measurement with improved stylus force control. The optical lever technology also provides improved repeatability over conventional force coil systems. KLA’s cutting-edge hardware is further strengthened with powerful software algorithms, providing arc correction as standard to eliminate sidewall effect.

Stylus profilometry is suitable for measuring a wide variety of materials, independent of material properties such as transparency. With the Alpha-Step®’s low force operation, delicate surfaces can be measured accurately and easily.

Enhanced High-Resolution Optics

To make operation as simple as possible, the Alpha-Step® D-600 includes a high resolution colour camera system, with 4X digital zoom and expanded lighting controls. KLA’s vision system includes keystone correction algorithms to automatically correct perspective distortions usually induced by side view optics. This combination of hardware and software innovations makes navigating samples and locating measurement targets faster and easier.

Shown left: Video from side view optics
Shown right: Video with keystone correction

2D & 3D Surface Measurement

With the Alpha-Step® D-600’s motorised sample stage, which features a 55mm scan length, it is possible to produce photo-realistic 3D renderings of surfaces. Details surface topography analysis in 3D is possible for step height, texture, and sample form. The 5mm scan length of the Alpha-Step® D-600 also allows for longer scans, and more efficient measurement of larger samples.

A 2D stress measurement options is also available, which utilises Stanley’s Equation and changes in sample bow before and after processing, to calculate thin film stress. Applications of 2D stress include semiconductor and compound semiconductor devices with multiple process layers.

Product range

Alpha-Step® D-500
Alpha-Step® D-600
Tencor™ P-7
Tencor™ P-17 & P-17 OF
Tencor™ P-170

Applications

  • Step Height: 2D step height
  • Texture: 2D roughness and waviness
  • Form: 2D bow and shape
  • Stress: 2D thin film stress

Industries

  • Universities, research labs and institutes
  • Semiconductor and compound semiconductor
  • LED: Light emitting diodes
  • Solar
  • MEMS: Micro-electro-mechanical systems
  • Automotive
  • Medical devices

And more: Contact us with your requirements

Options

Stylus Options

The Alpha-Step D-500 has a variety of styli available to support the measurement of step heights, high aspect ratio steps, roughness, sample bow, and stress. The tip radius ranges from 100nm to 50µm and determines the lateral resolution of the measurement. The included angle ranges from 20 to 100 degrees, specifies the maximum aspect ratio of the measured feature. All styli are manufactured from diamond to reduce wear and increase stylus lifetime.

Sample Chucks

The Alpha-Step D-500 has a range of chucks available to support application requirements. The standard chuck is nickel plated aluminum chuck for samples up to 140mm. A flat black chuck is available for transparent samples to minimize reflection from the chuck surface. A universal vacuum chuck is also offered and includes precision locating pins for samples from 50mm to 125mm. Both the standard and universal chucks support stress measurements with 3-point locators to hold the sample in a neutral position for accurate bow measurements.

Offline Analysis Software

The Alpha-Step D-500 offline software has the same data analysis capability that exists on the tool. This enables the user to analyze data without using valuable tool time.

Apex Analysis Software

Apex analysis software enhances the standard data analysis capability of the D-500 with an extended suite of leveling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods, plus local standards such as ASME. Apex can also serve as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eight languages.

Step Height Standards

The Alpha-Step D-500 uses thin and thick film NIST traceable step height standards offered by VLSI Standards. The standards feature an oxide step on a silicon die mounted on a quartz block. A step height range of 8nm to 250µm is available.

Isolation Tables

The Alpha-Step D-500 has both tabletop and free-standing isolation table options. The Granite Isolator™ Series offers tabletop isolation systems that combine granite with high grade silicone gel to provide passive isolation. The Onyz Series tabletop isolation systems use pneumatic air isolators to provide passive isolation. The TMC 63-500 Series isolation table is a free-standing steel frame table that uses pneumatic air isolators to provide passive isolation.

Downloads

Alpha-Step® D-600 Stylus Profiler Brochure

Alpha-Step® D-600 Stylus Profiler Brochure

Alpha-Step® D-600 Stylus Profiler Specification Sheet

Alpha-Step® D-600 Stylus Profiler Specification Sheet

Benchtop Stylus Profilers Brochure

Benchtop Stylus Profilers Brochure

If you would like to learn more about the comprehensive surface measurement capabilities offered by the Alpha-Step® D-600 stylus profiler, contact our experienced technical team today. We would be happy to help you find the right profilometry solution for your needs. Contact us today!