Alpha-Step® D-600 Stylus Profiler
High resolution 2D & 3D profiling, with the highest vertical range of 1200μm, sub-Angstrom resolution and low force (0.003 to 15mg) as standard. Cutting-edge optical lever sensor technology provides accurate and reliable results. The D-600 includes a motorized stage with a 200mm sample chuck and advanced optics with enhanced video controls.
A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.
- Highest Vertical Range at 1200μm
- Low Force Measurements at 0.03 to 15mg
- Step Height Repeatability of 5Å on a 1μm step
- Video: 5MP high-resolution color camera
- Keystone Correction: Removes distortion due to side view optics
- 200mm Motorised XY Stage
- Optical Lever Sensor
- Arc Correction: Removes error due to arc motion of the stylus
- Software: User friendly software interface
Flexible & Accurate Surface Measurement
The Alpha-Step® D-600 Stylus Profiler provides unparalleled flexibility and accuracy in surface measurement. 2D & 3D measurement of step height and roughness are supported, as well as 2D bow and stress. By utilising state of the art optical lever sensor technology, KLA are able to provide a wide vertical range, and low force measurement with improved stylus force control. The optical lever technology also provides improved repeatability over conventional force coil systems. KLA’s cutting-edge hardware is further strengthened with powerful software algorithms, providing arc correction as standard to eliminate sidewall effect.
Stylus profilometry is suitable for measuring a wide variety of materials, independent of material properties such as transparency. With the Alpha-Step®’s low force operation, delicate surfaces can be measured accurately and easily.
Enhanced High-Resolution Optics
To make operation as simple as possible, the Alpha-Step® D-600 includes a high resolution colour camera system, with 4X digital zoom and expanded lighting controls. KLA’s vision system includes keystone correction algorithms to automatically correct perspective distortions usually induced by side view optics. This combination of hardware and software innovations makes navigating samples and locating measurement targets faster and easier.
Shown left: Video from side view optics
Shown right: Video with keystone correction
2D & 3D Surface Measurement
With the Alpha-Step® D-600’s motorised sample stage, which features a 55mm scan length, it is possible to produce photo-realistic 3D renderings of surfaces. Details surface topography analysis in 3D is possible for step height, texture, and sample form. The 5mm scan length of the Alpha-Step® D-600 also allows for longer scans, and more efficient measurement of larger samples.
A 2D stress measurement options is also available, which utilises Stanley’s Equation and changes in sample bow before and after processing, to calculate thin film stress. Applications of 2D stress include semiconductor and compound semiconductor devices with multiple process layers.
Tencor™ P-17 & P-17 OF
- Step Height: 2D step height
- Texture: 2D roughness and waviness
- Form: 2D bow and shape
- Stress: 2D thin film stress
- Universities, research labs and institutes
- Semiconductor and compound semiconductor
- LED: Light emitting diodes
- MEMS: Micro-electro-mechanical systems
- Medical devices
And more: Contact us with your requirements
Alpha-Step® D-600 Stylus Profiler BrochureAlpha-Step® D-600 Stylus Profiler Brochure
Alpha-Step® D-600 Stylus Profiler Specification SheetAlpha-Step® D-600 Stylus Profiler Specification Sheet
Benchtop Stylus Profilers BrochureBenchtop Stylus Profilers Brochure
If you would like to learn more about the comprehensive surface measurement capabilities offered by the Alpha-Step® D-600 stylus profiler, contact our experienced technical team today. We would be happy to help you find the right profilometry solution for your needs. Contact us today!