4-6 Axes LHe Manipulators Open Cycle

Spectroscopy UHV manipulators with heating and LHe cooling (open cycle) possibility. It is a highly precise and highly rigid UHV specimen manipulator with modular construction, suitable for a range of X, Y, Z linear motions and R1, R2, R3 rotations. Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules.



Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.


Sample temperature depend on sample holder type:

  • Direct heating with 10 A,
  • Resistive heating up to 1100 °C,
  • EB heating up to 1400 °,
  • Liquid helium cooling:
    – 4 axes manipulator – down to 4 K*
    – 5 axes manipulator – down to 4.8 K* / 10 K**
    – 6 axes manipulator – down to 7 K* / 15 K**

* Parameters achieved without heating option and temperature stabilisation.
** Parameters achieved with heating option.

Technical data

Standard base flange DN 100CF or DN 160CF
Pressure range down to 10-11 mbar
Heating methods resistive, EB, direct
Cooling method LHe
XY range up to 600 mm
positional control handwheel/motorised*
resolution (manual/motorised) 1 mm / standard 10 μm (1 μm on request)
R1 range ± 180° or ± 360°
positional control rotary feedthrough/motorised*
resolution (motorised) 0.1°
R2 range 360° continuous
positional control motorised*
resolution (motorised) 0.1°
R3 range – 20° to +40°
positional control rotary feedthrough/motorised*
resolution (motorised) 0.1°
Bakeout temperature up to 150 °C
* stepper motor or servomotor – depending on the application.
The manipulator can be prepared for customer motors or drivers – on request.



Manipulators and Transferring Systems Brochure

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  • Full motorisation
  • Full software control
  • Helium recovery system
  • Possibility to mount an angular device for PES calibration
  • Temperature stabilisation
  • Heating option: direct, resistive or EB

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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