4-6 Axes LHe Manipulators Closed Cycle

The manipulator with helium cryostat is a versatile, closed-cycle system that applies in many UHV surface science researches. It can be configured with Z slide, XY stage, or differentially pumped rotary feedthrough. Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules. The system typically includes a compressor, high-pressure hoses, an expander, a temperature controller, a heater and a sensor.



Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.


Sample temperature depends on sample holder type:

  • EB heating – up to 1000 °C (second stage),
  • Direct heating with 10 A,
  • Resistive heating (on request),
  • Liquid helium cooling:
    below 10 K* (5-axes manipulator)

* Parameters achieved without stabilisation and without heating option.

Technical data

Standard base flange DN 100CF or DN 160CF
Pressure range down to 10-11 mbar
Heating methods resistive, EB, direct
Cooling method LHe
XY range ± 12.5 mm*
positional control micrometer/motorised**
resolution (manual/motorised) 5 μm / 1 μm
Z range up to 300 mm
positional control handwheel/motorised**
resolution (manual/motorised) 50 μm / standard 10 μm (1 μm on request)
R1 range ± 180°
positional control rotary feedthrough/motorised*
resolution (motorised) 0.1°
R2 range 360° continuous
positional control motorised**
resolution (motorised) 0.1°
R3 range – 20° to +40°
positional control rotary feedthrough/motorised**
resolution (motorised) 0.1°
Bakeout temperature up to 150 °C
* for base flange DN 160CF
** stepper motor or servomotor – depends on the application.
The manipulator can be prepared for customer motors or drivers – on request.



Manipulators and Transferring Systems Brochure

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  • Full motorisation
  • Full software control
  • Helium recovery system
  • Possibility to mount an angular device for PES calibration
  • Additional electrical contacts for silicon sample direct heating
  • Low vibration cryostat
  • Temperature stabilisation
  • Heating option: direct, resistive or EB

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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