4-5 Axes LN2 Manipulators for Flag Holders

Manipulator with LN2 cooling for flag style sample holders allows for many possibilities of station development in terms of the number of holders, various heating methods, and many useful options. This, combined with a wide range of different flag holder types, makes this manipulator station very versatile.



Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Modular Construction

Modular construction means that the specification can be upgraded or modified by the addition or replacement of well-defined modules. All axes of the manipulator are motorised by stepper motors or servomotors. The X, Y, and Z axes may also be operated manually by as required. The standard mounting flange is DN 100CF or DN 160CF. The 4-5* axes manipulator is a combination of XY stage, Z slide and rotation stages.

* 6 axes manipulator for PTS sample holders on request.

Technical data

Standard base flange DN 100CF or DN 160CF
Pressure range down to 10-11 mbar
Heating methods resistive, EB, direct
Cooling method LN2
XY range ± 12.5 mm*
positional control micrometer/motorised*
resolution (manual/motorised) 5 μm / 1 μm
Z range 5 – 800 mm (other on request)
positional control handwheel/motorised*
resolution (manual/motorised) 500 μm / standard 10 μm (1 μm on request)
R1 range ± 175°
positional control rotary feedthrough/motorised*
resolution (motorised) 0.1°
R2 range 360° continuous
positional control motorised**
resolution (motorised) 0.1°
Bakeout temperature up to 150 °C
* stepper motor or servomotor – depend on application.
Manipulator can be prepared for customer motors or drivers – on request.



Manipulators and Transferring Systems Brochure

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  • Full motorisation
  • Full software control
  • Temperature stabilisation
  • Heating options: direct, resistive or EB
  • Heaters suitable for reactive gases (resistive heating)

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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