2-5 Axes PLD Targets Manipulators
The 2-5 axes motorised PLD target manipulator is designed for pulsed laser deposition applications under ultra-high vacuum conditions.
It is a high precision, high rigidity, UHV specimen manipulator with revolver mechanism up to 6 target holders. The manipulator can work in vertical or horizontal orientation, depends on PLD process geometry.
Manufacturer
Prevac
Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.
Description
The target manipulator has two axes of rotation: R1 and R2. By changing the position of R1, different targets are selected. The R2 axis has a continuous rotation around its own axis. The manipulator has an additional hole/position (between two targets) to accommodate a laser power meter. The XY motion module allows scanning of the target via a laser beam. One axis is motorised – for scanning, second is manual – for adjusting. An additional Z axis is used to set up the transfer position for target transferring via the Load Lock Chamber. The Z movement can be motorised or manual. The computer controls the target rotation and radial scanning over the complete target diameter (fixed laser beam) for making multi-layer deposition with maximum target usage.
- Targets holder: PTS
- Base pressure: 10-10 mbar
- Possibility of fixing targets with irregular shapes
- Target sizes: 1″ or 2″, standard target thickness: 0.5 – 10 mm
- Continuous, individual rotation of targets
- Select and sequence change of targets
- Shield against mutual pollution of targets
- Radial scan, automatic control
- Target is mounted coaxially (relative to the substrate) and positioned so as to eliminate the likelihood of droplets, clusters settling on the substrate and the effects of possible target peeling
- Target holders are transferable to the load-lock chamber (or storage) for quick replacement
- Water cooling system
Technical data
| Standard base flange | DN 100CF or DN 200CF |
| Base pressure range | 10-10 mbar |
| Shutter | integrated, pneumatic |
| Cooling method | H2O |
| R2 range | 360° continuous |
| positional control | motorised* |
| resolution (motorised) | 0.1° |
| Z range | 50mm (other on request) |
| positional control | handwheel |
| resolution (manual/motorised) | 500 μm / standard 10 μm (1 μm on request) |
| XY range(option) | ± 12.5 mm |
| positional control | micrometer/motorised* |
| resolution (manual/motorised) | 5 μm / 1 μm |
| Max speed | up to 50 rpm (other on request) |
| Bakeout temperature | up to 150 °C |
| * stepper motor or servomotor – depend on application. Manipulator can be prepared for customer motors or drivers – on request. |
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CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.