2-5 Axes PLD Targets Manipulators

2-5 Axes PLD Targets Manipulators

The 2-5 axes motorised PLD target manipulator is designed for pulsed laser deposition applications under ultra-high vacuum conditions.

It is a high precision, high rigidity, UHV specimen manipulator with revolver mechanism up to 6 target holders. The manipulator can work in vertical or horizontal orientation, depends on PLD process geometry.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Description

The target manipulator has two axes of rotation: R1 and R2. By changing the position of R1, different targets are selected. The R2 axis has a continuous rotation around its own axis. The manipulator has an additional hole/position (between two targets) to accommodate a laser power meter. The XY motion module allows scanning of the target via a laser beam. One axis is motorised – for scanning, second is manual – for adjusting. An additional Z axis is used to set up the transfer position for target transferring via the Load Lock Chamber. The Z movement can be motorised or manual. The computer controls the target rotation and radial scanning over the complete target diameter (fixed laser beam) for making multi-layer deposition with maximum target usage.

  • Targets holder: PTS
  • Base pressure: 10-10 mbar
  • Possibility of fixing targets with irregular shapes
  • Target sizes: 1″ or 2″, standard target thickness: 0.5 – 10 mm
  • Continuous, individual rotation of targets
  • Select and sequence change of targets
  • Shield against mutual pollution of targets
  • Radial scan, automatic control
  • Target is mounted coaxially (relative to the substrate) and positioned so as to eliminate the likelihood of droplets, clusters settling on the substrate and the effects of possible target peeling
  • Target holders are transferable to the load-lock chamber (or storage) for quick replacement
  • Water cooling system

Technical data

Standard base flange DN 100CF or DN 200CF
Base pressure range 10-10 mbar
Shutter integrated, pneumatic
Cooling method H2O
R2 range 360° continuous
positional control motorised*
resolution (motorised) 0.1°
Z range 50mm (other on request)
positional control handwheel
resolution (manual/motorised) 500 μm / standard 10 μm (1 μm on request)
XY range(option) ± 12.5 mm
positional control micrometer/motorised*
resolution (manual/motorised) 5 μm / 1 μm
Max speed up to 50 rpm (other on request)
Bakeout temperature up to 150 °C
* stepper motor or servomotor – depend on application.
Manipulator can be prepared for customer motors or drivers – on request.

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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