1-4 Axes PLD Substrate Manipulators

The 1-4 axes motorised manipulators are suited for pulsed laser deposition applications under ultra-high vacuum conditions. Heating is performed by the resistive method. The manipulator can work in a vertical orientation.

The 1-4 axes motorised manipulator is a high rigidity, UHV specimen manipulator of modular construction, with a motorised continuous substrate R1 rotation and Z translation (additionally can be equipped with XY movement module).

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Description

It is prepared to heat the substrate up to 1000°C with accuracy +/- 1°C. The station includes the substrate (standard up to 6-inch sample holder) positioner and allows precise angular position of the substrate in relation to linear shutter.

The heater material is optimally adapted depending on the customer’s requirements and the specific conditions of the deposition process (e.g. heating temperature, presence of reactive gases). Exemplary heaters: thermocoax, graphite coated with SiC, SiC solid (β).

  • Sample holders: PTS, Plate style, Flag style
  • Base pressure: 10-10 mbar (working pressure: ~10-2 mbar)

Technical data

Standard base flange DN 100CF, DN 160CF, DN 200CF or DN 250CF
Base pressure range 10-10 mbar
Shutter integrated or external, pneumatic or manual
Heating methods Heating methods resistive, direct
Substrate temperature up to 1000 °C
Cooling method H20
Z range 50 mm (other on request)
positional control handwheel/motorised*
resolution (manual/motorised) 500 μm / standard 10 μm (1 μm on request)
R1 range 360° continuous
positional control motorised*
XY Range (option) ± 12.5 mm
positional control motorised*
resolution (manual/motorised) 5 μm / 1 μm
Max speed up to 60 rpm (other on request)
Bakeout temperature up to 150 °C
* stepper motor or servomotor – depend on application.
Manipulator can be prepared for customer motors or drivers – on request.

Downloads

Brochures

Manipulators and Transferring Systems Brochure

View Brochure

Options

  • H2O cooling shield
  • Side or integrated wedge shutter
  • XY movement stage

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

Get in touch to discuss your requirements

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