1-4 Axes MBE Manipulators
The 1-4 axes motorised MBE manipulator is designed for MBE applications under ultra-high vacuum conditions. Heating is performed by resistive or EB methods. The manipulator can work in the vertical orientation.
It is a high precision, high rigidity, UHV specimen manipulator of modular construction, suitable for a range of R1 motorised continuous substrate rotation and Z translation.
Manufacturer
Prevac
Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.
Description
Prepared to heat the substrate up to 1400°C (EB heating, UHV conditions) with accuracy +/- 1°C. The station includes the substrate (standard up to 6-inch sample holder) positioner and allows precise angular position of the substrate in relation to linear shutter.
- Sample holders: generally Plate style
- Prepared for reaching the high temperature
- Base pressure: 10-11 mbar
Technical data
| Standard base flange | DN 100CF to DN 300CF (depending on the sample size, other on request) |
| Base pressure range | 10-11 mbar |
| Shutter | integrated or external, pneumatic or manual |
| Heating methods | resistive, EB |
| Substrate temperature | up to 1200 °C (resistive) up to 1400 °C (EB) |
| Cooling method | LN2 H20 |
| Z range | 50 mm (other on request) |
| positional control | handwheel/motorised* |
| resolution (manual/motorised) | 500 μm / standard 10 μm (1 μm on request) |
| R1 range | 360° continuous |
| positional control | micrometer/motorised* |
| resolution (motorised) | 5 μm / 1 μm |
| XY range(option) | ± 12.5 mm |
| positional control | micrometer/motorised* |
| resolution (manual/motorised) | 5 μm / 1 μm |
| Max speed | up to 60 rpm (other on request) |
| Bakeout temperature | up to 150 °C / 200 °C (on request) |
| * stepper motor or servomotor – depend on application. Manipulator can be prepared for customer motors or drivers – on request. |
Heater Materials
| Graphite | flexible (stable in form), minimal outgassing at the high temperatures, oxidation resistant below 500°C |
| Graphite + PBN coating | flexible (stable in form), minimal outgassing at the high temperatures, oxidation resistant below 800°C (depends on partial pressure of oxygen) |
| Graphite + SiC coating | hard, light and stable in form, oxidation resistant below 1400°C |
| SiC solid (β) | extremely hard, light and stable in form, low thermal expansion, durable to mechanical and electrical shocking, excellent resistance to reactive gases/oxidation |
Options
- H2O shroud
- LN2 or H2O cooling
- Side or integrated wedge shutter (possible with H2O cooling option)
- XY movement stage
- Shutter on/off
Related Products
Service Support
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Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
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An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.