032 PRIMS Basic MS System
Simple and fully functional sputter deposition unit for reproducible thin film layers applying. Plug & work compact design. The process chamber contains 3 ports for magnetron sputtering sources (for metals and inorganics), mounted in a sputter-down configuration. Up to two sources used at the same time (co-deposition) The substrate stage is intended for up to 2-inch diameter samples, with a heating & rotation option.
Manufacturer
Prevac
Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.
Key Features
- Plug & work construction
- Easy-to-use mobile unit for quick testing and sputtering coatings
- Process chamber with large vacuum door for easy target or substrate replacement
- Equipped with MS2 100 ISO-K magnetron sources and novel M600DC-PS power supply
- Substrate stage for up to 2″ diameter samples
- Process chamber diameter: Ø 355 mm
- 3 ports for 2-inches magnetron sources
- 1 viewport – observation windows with shutter
- Protection shield against cross-contamination
- Base pressure range 10-7 mbar
- Fast pumping system with vacuum gauges
- Ar gas automatic dosing by mass flow control
- A rigid main frame on wheels allows for easy placement of the system
- Manual throttle valve
Description
The fast pumping system (with a manual throttle valve) combined with the small volume of the process chamber allows you to reach the base pressure in a short time.
The process chamber is equipped with connecting flanges in HV standard for connecting current and future equipment, including:
- Up to 3 magnetron sources 2”
- Substrate manipulator
- Pumping system
- Protection shield against cross-contamination
- Quartz balance
- Viewport – observation windows with shutter
- Vacuum gauges
- Pyrometer
Applications
| Applications | Examples |
| Single and multilayer conductor films (for microelectronics and semiconductor devices) | Al, Mo, Mo/Au, Ta, Ta/Au |
| Barrier layers for semiconductor metallisation's | TiN, W-Ti |
| Magnetics films | Fe, Co, Ni, Fe-Al-Si, Co-Nb-Zr, Co-Cr, Fe-Ni-Cr, Fe-Si, Co-Ni-Cr, Co-Ni-Si |
| Optical coatings – metallic (reflective) | Cr, Al, Ag |
| Optical coatings – dielectric | MgO, TiO2 , ZrO2 |
| Photomasks | Cr, Mo, W |
| Transparent gas/vapor permeation barriers | Al2O3 |
| Transparent electrical conductors | InO2, SnO2,In-Sn-O (ITO) |
Downloads
032 PRIMS Brochure
Options
- Substrate heating up to 600 °C
- Substrate stage rotation
- RF magnetron power supply
- Deposition rate measurement
- Co-deposition
- Additional gas dosing – leak valve
- Pyrometer
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.