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P-7 Stylus Profiler

Product Features

Key Features

  • Step Height Repeatability of 4Å on a 1μm step
  • Long Scan Over Full 150mm Stage
  • Auto Pattern Recognition & Sequencing
  • Advanced Apex 2D & 3D Surface Analysis Software
  • 3D Stress Capability
  • Constant Force Control Sensor
KLA P-7 stylus profiler, with an example 3D surface topography image

Long Scan Length Without Stitching

The KLA P-7 Stylus Profiler is capable of performing scans up to 150mm in length in a single scan, without the need for scan stitching. The full diameter of many wafer samples can be scanned in a single, continuous scan. The P-7 provides one of the longest scan lengths available on the market.

The P-7’s stage is automatic and fully programmable, and can be optionally configured with a motorised theta movement. A variety of sample chucks are available, to support a wide array of measurement applications. A universal vacuum chuck is included as standard, with locating pins for samples 50 to 150mm in diameter.

An example 3D step height image

High Measurement Repeatability

KLA have extensive experience in the development of surface metrology instrumentation, having spent over 40 years enhancing surface measurement technology. The P-7 has been designed to utilise KLA’s cutting-edge UltraLite® sensor, which features constant force control, a high linearity, and unrivalled repeatability and reproducibility. The UltraLite® sensor can achieve a step height repeatability of 4Å on a 1μm step, making the P-7 a market leader for reliability in production environments.

The UltraLite® sensor also features an impressive vertical resolution and range, producing 2D and 3D surface scans with high detail and clarity. Samples with large topography variations can be handled with ease with a wide 1mm Z range.

A Wide Range of 2D & 3D Measurement Applications

A comprehensive range of 2D and 3D measurements are supported by the P-7 Stylus Profiler, for both R&D and production environments. Step height can be measured in both 2D and 3D, with a vertical range from a few nanometres to 1000µm. The constant force control provided by the UltraLite® sensor improves measurement stability, and enables accurate measurement of soft materials, such as photoresist.

2D and 3D texture measurements of roughness and waviness are supported, as well as 2D measurement of form, including bow and shape. The P-7 also has options for 2D and 3D stress measurement. With a stress chuck and motorised theta stage, it is possible to produce 3D stress maps up to 150mm in diameter, without requiring stitching.

An example 3D surface topography
3D Surface Topography
An example 3D stress map
3D Stress Mapping

Advanced Automation & Pattern Recognition

For production applications, where efficiency is vital, KLA provide a wide selection of automation capabilities for the P-7. The P-7 Stylus Profiler can be configured for automated defect review, sequencing, pattern recognition, and integration with SECS/GEM and HSMS, to ensure fast and efficient operation.

The P-7 can be pre-taught patterns to automatically recognise and use to align a sample. This enables fully automated measurements, which grants enhanced measurement stability and protects against user errors. For defect review, sample maps can be uploaded identifying areas of the sample to be inspected, and suspected failure points can be highlighted for further inspection. Automation recipes can be seamlessly moved between systems for maximum flexibility.

Screenshots of the P-7’s pattern recognition system recognising an area of a sample

Product Downloads

Literature

Data Sheet

KLA P-7 Data Sheet

Specification Sheet

KLA P-7 Specification Sheet