Servicing and Maintenance for your Dektak Stylus Profiler

With over 20 year's experience repairing Veeco Dektak Stylus Profilers you can be assured that your system is in safe hands. We offer many services including: system relocation, maintenance visits, parts/consumables and breakdown intervention.


Preventative Maintenance

We can offer single visits or service contracts tailored to your needs to keep your tool in optimum condition.


Breakdown Intervention

Having a problem with your Dektak profiler? Call us today for support (loan equipment generally available). We can visit you or you can choose to have the defective unit shipped to us for repair.


Spare Parts/Consumables

We stock a large range of parts for Dektak Profilers including Styli for Dektak 3 Series, V Series, and Dektak 6, 150 and XT models.



We offer a wide range of upgrades of your existing systems, including PC's, zoom optics, colour camera etc. However as your application needs increase your old profiler may not be up to the job so why not consider trading in your existing tool for a new KLA Tencor model.

We are here to discuss all available options. Contact us today +44 (0)1354 669899 or

Download PDF

Please add 8 and 1.

Thank you

A download link has been sent to the e-mail address you provided.