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NanoFlip® Nano Indenter

Product Features

Key Features

  • InForce 50 Actuator with Changeable Tips
  • InQuest High Speed Controller
  • XYZ Motion System for Sample Targeting
  • Synchronised SEM Video Capture
  • Fast & Accurate Tip Calibration
  • Software Interface with Configurable Experiments

Flexible In-Situ Nano Indentation

The KLA NanoFlip is a flexible and expandable platform for performing nanomechanical testing in-situ with a variety of imaging instruments. The NanoFlip’s sample stage features a “flip” mechanism, which rotates the sample, allowing for direct imaging of the surface, or indentation of the surface. When indenting, the indenter and surface remain visible, allowing for indenter and sample interactions to be viewed in real time.

The NanoFlip can be used in-situ inside a wide range of imaging instruments. Optical profilers and optical microscopes, SEM and FIB systems, AFM systems, Raman Spectroscopy, and other instruments are all supported. The NanoFlip can also be used standalone inside a glove box or vacuum chamber for sensitive samples requiring a controlled environment.

Simplified Operation with Synchronised Imaging

KLA are making nanomechanical testing simple and easy with the InView software package. InView provides a modern and flexible interface for interacting with nano indentation systems. A guided setup is provided, which allows even novice users to configure mechanical tests in under a minute. A wide range of mechanical test methods are included out of the box. Custom test protocols can also be configured.

InView allows imaging to be synchronised with mechanical test data in real time. Live imaging from a SEM or other instrument is displayed side by side with testing data as it is recorded. This provide greater level of insight into the interactions of the indentation tip and sample material.

A Complete Range of Mechanical Tests

To suit the widest range of applications, the NanoFlip platform is capable of a multitude of mechanical test types. The NanoFlip can perform hardness and modulus testing (Oliver-Pharr) on many materials, including very soft samples. ISO 14577 hardness testing is included as standard. For material characterisation, scratch and wear testing is also possible, and supports many materials, including thin films, brittle ceramics, and polymers.

A variety of advanced testing modes are also available. These include Continuous Stiffness Measurement (CSM), AccuFilm™ thin film measurement with substate-independence, and ProbeDMA™ for testing viscoelastic properties of polymers.

Designed for Accuracy & Efficiency

The NanoFlip is a quick and accurate solution for in-situ nano indentation. The InForce actuators developed by KLA use electromagnetic force actuation and capacitance displacement technology. By decoupling the force actuation and displacement measurement, it is possible to independently optimise them and maximise performance. KLA’s InForce actuators have a high stiffness and maximised vertical stability, and offer the highest calibration stability available.

The NanoFlip’s stage has a high frame stiffness, concentrating deformation in the sample, and thus improving accuracy and resolution. High precision linear optical encoders on the sample stage allow for precise sample targeting.

Map Nanomechanical Properties with NanoBlitz 3D & NanoBlitz 4D

NanoBlitz 3D creates 3D nanomechanical property maps. Utilising the NanoFlip’s high-precision XY stage, NanoBlitz 3D generates an array of up to 100,000 indents on an area of a sample. For each indent Young’s modulus, hardness, and stiffness values are recorded. A 3D mechanical property map can then be created, providing a visualisation of surface mechanical properties. NanoBlitz 3D is fast, performing stage movement and indentation in less than a second for each indent.

By combining the 3D concept with the NanoFlip’s Continuous Stiffness Measurement (CSM) capability, NanoBlitz 4D provides mechanical property tomography. An array of up to 10,000 indents are performed, at 5 to 10 seconds per indent, recording Young’s modulus, hardness, and stiffness values for each as function of depth. Property maps can then be visualised at different depths.

NanoBlitz 3D image showing stiffness mapping
NanoBlitz 4D mapping at two different depths

Technical Specifications

Actuator Specifications
Displacement measurement Capacitive Gauge
Displacement range 50 microns
Displacement resolution (electronic) 0.001 nm
Optical Typical noise < 0.1 nm
Load Application Electromagnetic
Maximum Load 50 mN
Load Resolution 3 nN
Controller Specifications
Data Acquisition Rate 100 khz
Closed Loop CPU Control Rate 500 Hz
Dynamic Excitation Frequencies 0.1 Hz - 1 kHz

Product Downloads


Product Brochure

Application Notes

Effect of Annealing on 50nm Gold Films

KLA Application Note

Strain Rate Sensitivity of Thin Metal Films by Instrumented Indentation

KLA Application Note